2/21/2011	8:32:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	8:32:28 AM	Recipe started at 8:32 AM
2/21/2011	8:32:28 AM	H2 valve closed
2/21/2011	8:32:28 AM	BCl3 valve closed
2/21/2011	8:32:28 AM	PH3 valve closed
2/21/2011	8:32:28 AM	SiCl4 pre valve closed
2/21/2011	8:32:28 AM	SiCl4 post valve closed
2/21/2011	8:32:28 AM	Main Vac valve closed
2/21/2011	8:32:28 AM	Bypass valve closed
2/21/2011	8:32:28 AM	Bubbler valve closed
2/21/2011	8:32:28 AM	Helium valve opened
2/21/2011	8:32:28 AM	Helium MFC set to  500.000000
2/21/2011	8:32:28 AM	H2 MFC set to  0.000000
2/21/2011	8:32:28 AM	BCl3 MFC set to  0.000000
2/21/2011	8:32:28 AM	PHl3 MFC set to  0.000000
2/21/2011	8:32:28 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:32:28 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:32:28 AM	Tube furnace set to 0
2/21/2011	8:33:49 AM	Helium valve closed
2/21/2011	8:33:49 AM	H2 valve closed
2/21/2011	8:33:49 AM	BCl3 valve closed
2/21/2011	8:33:49 AM	PH3 valve closed
2/21/2011	8:33:49 AM	SiCl4 pre valve closed
2/21/2011	8:33:49 AM	SiCl4 post valve closed
2/21/2011	8:33:49 AM	Main Vac valve closed
2/21/2011	8:33:49 AM	Bypass valve closed
2/21/2011	8:33:49 AM	Bubbler valve closed
2/21/2011	8:33:49 AM	Helium MFC set to  0.000000
2/21/2011	8:33:49 AM	H2 MFC set to  0.000000
2/21/2011	8:33:49 AM	BCl3 MFC set to  0.000000
2/21/2011	8:33:49 AM	PHl3 MFC set to  0.000000
2/21/2011	8:33:49 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:33:49 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:33:49 AM	Tube furnace set to 0
2/21/2011	8:33:49 AM	Run finished at 8:33 AM
2/21/2011	8:33:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	8:40:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	8:40:38 AM	Recipe started at 8:40 AM
2/21/2011	8:40:38 AM	Helium valve closed
2/21/2011	8:40:38 AM	H2 valve closed
2/21/2011	8:40:38 AM	BCl3 valve closed
2/21/2011	8:40:38 AM	PH3 valve closed
2/21/2011	8:40:38 AM	SiCl4 pre valve closed
2/21/2011	8:40:38 AM	SiCl4 post valve closed
2/21/2011	8:40:38 AM	Main Vac valve closed
2/21/2011	8:40:38 AM	Bubbler valve closed
2/21/2011	8:40:38 AM	Bypass valve opened
2/21/2011	8:40:38 AM	Helium MFC set to  0.000000
2/21/2011	8:40:38 AM	H2 MFC set to  0.000000
2/21/2011	8:40:38 AM	BCl3 MFC set to  0.000000
2/21/2011	8:40:38 AM	PHl3 MFC set to  0.000000
2/21/2011	8:40:38 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:40:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:40:38 AM	Tube furnace set to 0
2/21/2011	8:41:09 AM	Helium valve closed
2/21/2011	8:41:09 AM	H2 valve closed
2/21/2011	8:41:09 AM	BCl3 valve closed
2/21/2011	8:41:09 AM	PH3 valve closed
2/21/2011	8:41:09 AM	SiCl4 pre valve closed
2/21/2011	8:41:09 AM	SiCl4 post valve closed
2/21/2011	8:41:09 AM	Bubbler valve closed
2/21/2011	8:41:09 AM	Main Vac valve opened
2/21/2011	8:41:09 AM	Bypass valve opened
2/21/2011	8:41:09 AM	Helium MFC set to  0.000000
2/21/2011	8:41:09 AM	H2 MFC set to  0.000000
2/21/2011	8:41:09 AM	BCl3 MFC set to  0.000000
2/21/2011	8:41:09 AM	PHl3 MFC set to  0.000000
2/21/2011	8:41:09 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:41:09 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:41:09 AM	Tube furnace set to 0
2/21/2011	8:41:09 AM	Run finished at 8:41 AM
2/21/2011	8:41:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	8:42:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	8:42:34 AM	Recipe started at 8:42 AM
2/21/2011	8:42:34 AM	Helium valve closed
2/21/2011	8:42:35 AM	H2 valve closed
2/21/2011	8:42:35 AM	BCl3 valve closed
2/21/2011	8:42:35 AM	PH3 valve closed
2/21/2011	8:42:35 AM	SiCl4 pre valve closed
2/21/2011	8:42:35 AM	SiCl4 post valve closed
2/21/2011	8:42:35 AM	Main Vac valve closed
2/21/2011	8:42:35 AM	Bubbler valve closed
2/21/2011	8:42:35 AM	Bypass valve opened
2/21/2011	8:42:35 AM	Helium MFC set to  0.000000
2/21/2011	8:42:35 AM	H2 MFC set to  0.000000
2/21/2011	8:42:35 AM	BCl3 MFC set to  0.000000
2/21/2011	8:42:35 AM	PHl3 MFC set to  0.000000
2/21/2011	8:42:35 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:42:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:42:35 AM	Tube furnace set to 0
2/21/2011	8:42:35 AM	Helium valve closed
2/21/2011	8:42:35 AM	H2 valve closed
2/21/2011	8:42:35 AM	BCl3 valve closed
2/21/2011	8:42:35 AM	PH3 valve closed
2/21/2011	8:42:35 AM	SiCl4 pre valve closed
2/21/2011	8:42:35 AM	SiCl4 post valve closed
2/21/2011	8:42:35 AM	Bubbler valve closed
2/21/2011	8:42:35 AM	Main Vac valve opened
2/21/2011	8:42:35 AM	Bypass valve opened
2/21/2011	8:42:35 AM	Helium MFC set to  0.000000
2/21/2011	8:42:35 AM	H2 MFC set to  0.000000
2/21/2011	8:42:35 AM	BCl3 MFC set to  0.000000
2/21/2011	8:42:35 AM	PHl3 MFC set to  0.000000
2/21/2011	8:42:35 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:42:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:42:35 AM	Tube furnace set to 0
2/21/2011	8:43:35 AM	H2 valve closed
2/21/2011	8:43:35 AM	BCl3 valve closed
2/21/2011	8:43:35 AM	PH3 valve closed
2/21/2011	8:43:35 AM	SiCl4 pre valve closed
2/21/2011	8:43:35 AM	SiCl4 post valve closed
2/21/2011	8:43:35 AM	Bubbler valve closed
2/21/2011	8:43:35 AM	Helium valve opened
2/21/2011	8:43:35 AM	Main Vac valve opened
2/21/2011	8:43:35 AM	Bypass valve opened
2/21/2011	8:43:35 AM	Helium MFC set to  100.000000
2/21/2011	8:43:35 AM	H2 MFC set to  0.000000
2/21/2011	8:43:35 AM	BCl3 MFC set to  0.000000
2/21/2011	8:43:35 AM	PHl3 MFC set to  0.000000
2/21/2011	8:43:35 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:43:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:43:35 AM	Tube furnace set to 0
2/21/2011	8:44:35 AM	Helium valve closed
2/21/2011	8:44:35 AM	H2 valve closed
2/21/2011	8:44:35 AM	BCl3 valve closed
2/21/2011	8:44:35 AM	PH3 valve closed
2/21/2011	8:44:35 AM	SiCl4 pre valve closed
2/21/2011	8:44:35 AM	SiCl4 post valve closed
2/21/2011	8:44:35 AM	Bubbler valve closed
2/21/2011	8:44:35 AM	Main Vac valve opened
2/21/2011	8:44:35 AM	Bypass valve opened
2/21/2011	8:44:35 AM	Helium MFC set to  0.000000
2/21/2011	8:44:35 AM	H2 MFC set to  0.000000
2/21/2011	8:44:35 AM	BCl3 MFC set to  0.000000
2/21/2011	8:44:35 AM	PHl3 MFC set to  0.000000
2/21/2011	8:44:35 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:44:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:44:36 AM	Tube furnace set to 0
2/21/2011	8:45:36 AM	H2 valve closed
2/21/2011	8:45:36 AM	BCl3 valve closed
2/21/2011	8:45:36 AM	PH3 valve closed
2/21/2011	8:45:36 AM	SiCl4 pre valve closed
2/21/2011	8:45:36 AM	SiCl4 post valve closed
2/21/2011	8:45:36 AM	Bubbler valve closed
2/21/2011	8:45:36 AM	Helium valve opened
2/21/2011	8:45:36 AM	Main Vac valve opened
2/21/2011	8:45:36 AM	Bypass valve opened
2/21/2011	8:45:36 AM	Helium MFC set to  100.000000
2/21/2011	8:45:36 AM	H2 MFC set to  0.000000
2/21/2011	8:45:36 AM	BCl3 MFC set to  0.000000
2/21/2011	8:45:36 AM	PHl3 MFC set to  0.000000
2/21/2011	8:45:36 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:45:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:45:36 AM	Tube furnace set to 0
2/21/2011	8:46:36 AM	Helium valve closed
2/21/2011	8:46:36 AM	H2 valve closed
2/21/2011	8:46:36 AM	BCl3 valve closed
2/21/2011	8:46:36 AM	PH3 valve closed
2/21/2011	8:46:36 AM	SiCl4 pre valve closed
2/21/2011	8:46:36 AM	SiCl4 post valve closed
2/21/2011	8:46:36 AM	Bubbler valve closed
2/21/2011	8:46:36 AM	Main Vac valve opened
2/21/2011	8:46:36 AM	Bypass valve opened
2/21/2011	8:46:36 AM	Helium MFC set to  0.000000
2/21/2011	8:46:36 AM	H2 MFC set to  0.000000
2/21/2011	8:46:36 AM	BCl3 MFC set to  0.000000
2/21/2011	8:46:36 AM	PHl3 MFC set to  0.000000
2/21/2011	8:46:36 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:46:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:46:36 AM	Tube furnace set to 0
2/21/2011	8:47:36 AM	H2 valve closed
2/21/2011	8:47:36 AM	BCl3 valve closed
2/21/2011	8:47:36 AM	PH3 valve closed
2/21/2011	8:47:36 AM	SiCl4 pre valve closed
2/21/2011	8:47:36 AM	SiCl4 post valve closed
2/21/2011	8:47:36 AM	Bubbler valve closed
2/21/2011	8:47:36 AM	Helium valve opened
2/21/2011	8:47:36 AM	Main Vac valve opened
2/21/2011	8:47:36 AM	Bypass valve opened
2/21/2011	8:47:36 AM	Helium MFC set to  100.000000
2/21/2011	8:47:36 AM	H2 MFC set to  0.000000
2/21/2011	8:47:36 AM	BCl3 MFC set to  0.000000
2/21/2011	8:47:36 AM	PHl3 MFC set to  0.000000
2/21/2011	8:47:36 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:47:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:47:36 AM	Tube furnace set to 0
2/21/2011	8:48:36 AM	Helium valve closed
2/21/2011	8:48:36 AM	H2 valve closed
2/21/2011	8:48:36 AM	BCl3 valve closed
2/21/2011	8:48:36 AM	PH3 valve closed
2/21/2011	8:48:36 AM	SiCl4 pre valve closed
2/21/2011	8:48:36 AM	SiCl4 post valve closed
2/21/2011	8:48:36 AM	Bubbler valve closed
2/21/2011	8:48:36 AM	Main Vac valve opened
2/21/2011	8:48:36 AM	Bypass valve opened
2/21/2011	8:48:36 AM	Helium MFC set to  0.000000
2/21/2011	8:48:36 AM	H2 MFC set to  0.000000
2/21/2011	8:48:36 AM	BCl3 MFC set to  0.000000
2/21/2011	8:48:36 AM	PHl3 MFC set to  0.000000
2/21/2011	8:48:36 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:48:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:48:36 AM	Tube furnace set to 0
2/21/2011	8:49:36 AM	H2 valve closed
2/21/2011	8:49:36 AM	BCl3 valve closed
2/21/2011	8:49:36 AM	PH3 valve closed
2/21/2011	8:49:36 AM	SiCl4 pre valve closed
2/21/2011	8:49:36 AM	SiCl4 post valve closed
2/21/2011	8:49:36 AM	Bubbler valve closed
2/21/2011	8:49:36 AM	Helium valve opened
2/21/2011	8:49:36 AM	Main Vac valve opened
2/21/2011	8:49:36 AM	Bypass valve opened
2/21/2011	8:49:36 AM	Helium MFC set to  100.000000
2/21/2011	8:49:36 AM	H2 MFC set to  0.000000
2/21/2011	8:49:36 AM	BCl3 MFC set to  0.000000
2/21/2011	8:49:36 AM	PHl3 MFC set to  0.000000
2/21/2011	8:49:36 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:49:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:49:37 AM	Tube furnace set to 0
2/21/2011	8:50:37 AM	Helium valve closed
2/21/2011	8:50:37 AM	H2 valve closed
2/21/2011	8:50:37 AM	BCl3 valve closed
2/21/2011	8:50:37 AM	PH3 valve closed
2/21/2011	8:50:37 AM	SiCl4 pre valve closed
2/21/2011	8:50:37 AM	SiCl4 post valve closed
2/21/2011	8:50:37 AM	Bubbler valve closed
2/21/2011	8:50:37 AM	Main Vac valve opened
2/21/2011	8:50:37 AM	Bypass valve opened
2/21/2011	8:50:37 AM	Helium MFC set to  0.000000
2/21/2011	8:50:37 AM	H2 MFC set to  0.000000
2/21/2011	8:50:37 AM	BCl3 MFC set to  0.000000
2/21/2011	8:50:37 AM	PHl3 MFC set to  0.000000
2/21/2011	8:50:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:50:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:50:37 AM	Tube furnace set to 0
2/21/2011	8:51:37 AM	H2 valve closed
2/21/2011	8:51:37 AM	BCl3 valve closed
2/21/2011	8:51:37 AM	PH3 valve closed
2/21/2011	8:51:37 AM	SiCl4 pre valve closed
2/21/2011	8:51:37 AM	SiCl4 post valve closed
2/21/2011	8:51:37 AM	Bubbler valve closed
2/21/2011	8:51:37 AM	Helium valve opened
2/21/2011	8:51:37 AM	Main Vac valve opened
2/21/2011	8:51:37 AM	Bypass valve opened
2/21/2011	8:51:37 AM	Helium MFC set to  100.000000
2/21/2011	8:51:37 AM	H2 MFC set to  0.000000
2/21/2011	8:51:37 AM	BCl3 MFC set to  0.000000
2/21/2011	8:51:37 AM	PHl3 MFC set to  0.000000
2/21/2011	8:51:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:51:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:51:37 AM	Tube furnace set to 0
2/21/2011	8:52:37 AM	Helium valve closed
2/21/2011	8:52:37 AM	H2 valve closed
2/21/2011	8:52:37 AM	BCl3 valve closed
2/21/2011	8:52:37 AM	PH3 valve closed
2/21/2011	8:52:37 AM	SiCl4 pre valve closed
2/21/2011	8:52:37 AM	SiCl4 post valve closed
2/21/2011	8:52:37 AM	Bubbler valve closed
2/21/2011	8:52:37 AM	Main Vac valve opened
2/21/2011	8:52:37 AM	Bypass valve opened
2/21/2011	8:52:37 AM	Helium MFC set to  0.000000
2/21/2011	8:52:37 AM	H2 MFC set to  0.000000
2/21/2011	8:52:37 AM	BCl3 MFC set to  0.000000
2/21/2011	8:52:37 AM	PHl3 MFC set to  0.000000
2/21/2011	8:52:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:52:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:52:37 AM	Tube furnace set to 0
2/21/2011	8:53:37 AM	H2 valve closed
2/21/2011	8:53:37 AM	BCl3 valve closed
2/21/2011	8:53:37 AM	PH3 valve closed
2/21/2011	8:53:37 AM	SiCl4 pre valve closed
2/21/2011	8:53:37 AM	SiCl4 post valve closed
2/21/2011	8:53:37 AM	Bubbler valve closed
2/21/2011	8:53:37 AM	Helium valve opened
2/21/2011	8:53:37 AM	Main Vac valve opened
2/21/2011	8:53:37 AM	Bypass valve opened
2/21/2011	8:53:37 AM	Helium MFC set to  100.000000
2/21/2011	8:53:37 AM	H2 MFC set to  0.000000
2/21/2011	8:53:37 AM	BCl3 MFC set to  0.000000
2/21/2011	8:53:37 AM	PHl3 MFC set to  0.000000
2/21/2011	8:53:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:53:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:53:37 AM	Tube furnace set to 0
2/21/2011	8:54:37 AM	Helium valve closed
2/21/2011	8:54:37 AM	H2 valve closed
2/21/2011	8:54:37 AM	BCl3 valve closed
2/21/2011	8:54:37 AM	PH3 valve closed
2/21/2011	8:54:37 AM	SiCl4 pre valve closed
2/21/2011	8:54:37 AM	SiCl4 post valve closed
2/21/2011	8:54:37 AM	Bubbler valve closed
2/21/2011	8:54:37 AM	Main Vac valve opened
2/21/2011	8:54:37 AM	Bypass valve opened
2/21/2011	8:54:37 AM	Helium MFC set to  0.000000
2/21/2011	8:54:37 AM	H2 MFC set to  0.000000
2/21/2011	8:54:37 AM	BCl3 MFC set to  0.000000
2/21/2011	8:54:37 AM	PHl3 MFC set to  0.000000
2/21/2011	8:54:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:54:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:54:38 AM	Tube furnace set to 0
2/21/2011	8:55:38 AM	H2 valve closed
2/21/2011	8:55:38 AM	BCl3 valve closed
2/21/2011	8:55:38 AM	PH3 valve closed
2/21/2011	8:55:38 AM	SiCl4 pre valve closed
2/21/2011	8:55:38 AM	SiCl4 post valve closed
2/21/2011	8:55:38 AM	Bubbler valve closed
2/21/2011	8:55:38 AM	Helium valve opened
2/21/2011	8:55:38 AM	Main Vac valve opened
2/21/2011	8:55:38 AM	Bypass valve opened
2/21/2011	8:55:38 AM	Helium MFC set to  100.000000
2/21/2011	8:55:38 AM	H2 MFC set to  0.000000
2/21/2011	8:55:38 AM	BCl3 MFC set to  0.000000
2/21/2011	8:55:38 AM	PHl3 MFC set to  0.000000
2/21/2011	8:55:38 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:55:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:55:38 AM	Tube furnace set to 0
2/21/2011	8:56:38 AM	Helium valve closed
2/21/2011	8:56:38 AM	H2 valve closed
2/21/2011	8:56:38 AM	BCl3 valve closed
2/21/2011	8:56:38 AM	PH3 valve closed
2/21/2011	8:56:38 AM	SiCl4 pre valve closed
2/21/2011	8:56:38 AM	SiCl4 post valve closed
2/21/2011	8:56:38 AM	Bubbler valve closed
2/21/2011	8:56:38 AM	Main Vac valve opened
2/21/2011	8:56:38 AM	Bypass valve opened
2/21/2011	8:56:38 AM	Helium MFC set to  0.000000
2/21/2011	8:56:38 AM	H2 MFC set to  0.000000
2/21/2011	8:56:38 AM	BCl3 MFC set to  0.000000
2/21/2011	8:56:38 AM	PHl3 MFC set to  0.000000
2/21/2011	8:56:38 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:56:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:56:38 AM	Tube furnace set to 0
2/21/2011	8:57:38 AM	H2 valve closed
2/21/2011	8:57:38 AM	BCl3 valve closed
2/21/2011	8:57:38 AM	PH3 valve closed
2/21/2011	8:57:38 AM	SiCl4 pre valve closed
2/21/2011	8:57:38 AM	SiCl4 post valve closed
2/21/2011	8:57:38 AM	Bubbler valve closed
2/21/2011	8:57:38 AM	Helium valve opened
2/21/2011	8:57:38 AM	Main Vac valve opened
2/21/2011	8:57:38 AM	Bypass valve opened
2/21/2011	8:57:38 AM	Helium MFC set to  100.000000
2/21/2011	8:57:38 AM	H2 MFC set to  0.000000
2/21/2011	8:57:38 AM	BCl3 MFC set to  0.000000
2/21/2011	8:57:38 AM	PHl3 MFC set to  0.000000
2/21/2011	8:57:38 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:57:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:57:38 AM	Tube furnace set to 0
2/21/2011	8:58:38 AM	Helium valve closed
2/21/2011	8:58:38 AM	H2 valve closed
2/21/2011	8:58:38 AM	BCl3 valve closed
2/21/2011	8:58:38 AM	PH3 valve closed
2/21/2011	8:58:38 AM	SiCl4 pre valve closed
2/21/2011	8:58:38 AM	SiCl4 post valve closed
2/21/2011	8:58:38 AM	Bubbler valve closed
2/21/2011	8:58:38 AM	Main Vac valve opened
2/21/2011	8:58:38 AM	Bypass valve opened
2/21/2011	8:58:38 AM	Helium MFC set to  0.000000
2/21/2011	8:58:38 AM	H2 MFC set to  0.000000
2/21/2011	8:58:38 AM	BCl3 MFC set to  0.000000
2/21/2011	8:58:38 AM	PHl3 MFC set to  0.000000
2/21/2011	8:58:38 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:58:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:58:38 AM	Tube furnace set to 0
2/21/2011	8:59:38 AM	H2 valve closed
2/21/2011	8:59:38 AM	BCl3 valve closed
2/21/2011	8:59:38 AM	PH3 valve closed
2/21/2011	8:59:38 AM	SiCl4 pre valve closed
2/21/2011	8:59:38 AM	SiCl4 post valve closed
2/21/2011	8:59:38 AM	Bubbler valve closed
2/21/2011	8:59:38 AM	Helium valve opened
2/21/2011	8:59:38 AM	Main Vac valve opened
2/21/2011	8:59:38 AM	Bypass valve opened
2/21/2011	8:59:38 AM	Helium MFC set to  100.000000
2/21/2011	8:59:38 AM	H2 MFC set to  0.000000
2/21/2011	8:59:38 AM	BCl3 MFC set to  0.000000
2/21/2011	8:59:38 AM	PHl3 MFC set to  0.000000
2/21/2011	8:59:38 AM	SiCl4 MFC set to  0.000000
2/21/2011	8:59:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	8:59:38 AM	Tube furnace set to 0
2/21/2011	9:00:39 AM	Helium valve closed
2/21/2011	9:00:39 AM	H2 valve closed
2/21/2011	9:00:39 AM	BCl3 valve closed
2/21/2011	9:00:39 AM	PH3 valve closed
2/21/2011	9:00:39 AM	SiCl4 pre valve closed
2/21/2011	9:00:39 AM	SiCl4 post valve closed
2/21/2011	9:00:39 AM	Bubbler valve closed
2/21/2011	9:00:39 AM	Main Vac valve opened
2/21/2011	9:00:39 AM	Bypass valve opened
2/21/2011	9:00:39 AM	Helium MFC set to  0.000000
2/21/2011	9:00:39 AM	H2 MFC set to  0.000000
2/21/2011	9:00:39 AM	BCl3 MFC set to  0.000000
2/21/2011	9:00:39 AM	PHl3 MFC set to  0.000000
2/21/2011	9:00:39 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:00:39 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:00:39 AM	Tube furnace set to 0
2/21/2011	9:01:39 AM	H2 valve closed
2/21/2011	9:01:39 AM	BCl3 valve closed
2/21/2011	9:01:39 AM	PH3 valve closed
2/21/2011	9:01:39 AM	SiCl4 pre valve closed
2/21/2011	9:01:39 AM	SiCl4 post valve closed
2/21/2011	9:01:39 AM	Bubbler valve closed
2/21/2011	9:01:39 AM	Helium valve opened
2/21/2011	9:01:39 AM	Main Vac valve opened
2/21/2011	9:01:39 AM	Bypass valve opened
2/21/2011	9:01:39 AM	Helium MFC set to  100.000000
2/21/2011	9:01:39 AM	H2 MFC set to  0.000000
2/21/2011	9:01:39 AM	BCl3 MFC set to  0.000000
2/21/2011	9:01:39 AM	PHl3 MFC set to  0.000000
2/21/2011	9:01:39 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:01:39 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:01:39 AM	Tube furnace set to 0
2/21/2011	9:02:39 AM	Helium valve closed
2/21/2011	9:02:39 AM	H2 valve closed
2/21/2011	9:02:39 AM	BCl3 valve closed
2/21/2011	9:02:39 AM	PH3 valve closed
2/21/2011	9:02:39 AM	SiCl4 pre valve closed
2/21/2011	9:02:39 AM	SiCl4 post valve closed
2/21/2011	9:02:39 AM	Bubbler valve closed
2/21/2011	9:02:39 AM	Main Vac valve opened
2/21/2011	9:02:39 AM	Bypass valve opened
2/21/2011	9:02:39 AM	Helium MFC set to  0.000000
2/21/2011	9:02:39 AM	H2 MFC set to  0.000000
2/21/2011	9:02:39 AM	BCl3 MFC set to  0.000000
2/21/2011	9:02:39 AM	PHl3 MFC set to  0.000000
2/21/2011	9:02:39 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:02:39 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:02:39 AM	Tube furnace set to 0
2/21/2011	9:02:40 AM	Run finished at 9:02 AM
2/21/2011	9:02:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	9:14:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	9:14:33 AM	Recipe started at 9:14 AM
2/21/2011	9:14:33 AM	H2 valve closed
2/21/2011	9:14:33 AM	BCl3 valve closed
2/21/2011	9:14:33 AM	PH3 valve closed
2/21/2011	9:14:33 AM	SiCl4 pre valve closed
2/21/2011	9:14:33 AM	SiCl4 post valve closed
2/21/2011	9:14:33 AM	Main Vac valve closed
2/21/2011	9:14:33 AM	Bypass valve closed
2/21/2011	9:14:33 AM	Bubbler valve closed
2/21/2011	9:14:33 AM	Helium valve opened
2/21/2011	9:14:33 AM	Helium MFC set to  500.000000
2/21/2011	9:14:33 AM	H2 MFC set to  0.000000
2/21/2011	9:14:33 AM	BCl3 MFC set to  0.000000
2/21/2011	9:14:33 AM	PHl3 MFC set to  0.000000
2/21/2011	9:14:33 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:14:33 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:14:33 AM	Tube furnace set to 0
2/21/2011	9:15:47 AM	Helium valve closed
2/21/2011	9:15:47 AM	H2 valve closed
2/21/2011	9:15:47 AM	BCl3 valve closed
2/21/2011	9:15:47 AM	PH3 valve closed
2/21/2011	9:15:47 AM	SiCl4 pre valve closed
2/21/2011	9:15:47 AM	SiCl4 post valve closed
2/21/2011	9:15:47 AM	Main Vac valve closed
2/21/2011	9:15:47 AM	Bypass valve closed
2/21/2011	9:15:47 AM	Bubbler valve closed
2/21/2011	9:15:47 AM	Helium MFC set to  0.000000
2/21/2011	9:15:47 AM	H2 MFC set to  0.000000
2/21/2011	9:15:47 AM	BCl3 MFC set to  0.000000
2/21/2011	9:15:47 AM	PHl3 MFC set to  0.000000
2/21/2011	9:15:47 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:15:47 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:15:47 AM	Tube furnace set to 0
2/21/2011	9:15:48 AM	Run finished at 9:15 AM
2/21/2011	9:15:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	9:20:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	9:20:51 AM	Recipe started at 9:20 AM
2/21/2011	9:20:51 AM	Helium valve closed
2/21/2011	9:20:51 AM	H2 valve closed
2/21/2011	9:20:51 AM	BCl3 valve closed
2/21/2011	9:20:51 AM	PH3 valve closed
2/21/2011	9:20:51 AM	SiCl4 pre valve closed
2/21/2011	9:20:51 AM	SiCl4 post valve closed
2/21/2011	9:20:51 AM	Main Vac valve closed
2/21/2011	9:20:51 AM	Bubbler valve closed
2/21/2011	9:20:51 AM	Bypass valve opened
2/21/2011	9:20:51 AM	Helium MFC set to  0.000000
2/21/2011	9:20:51 AM	H2 MFC set to  0.000000
2/21/2011	9:20:51 AM	BCl3 MFC set to  0.000000
2/21/2011	9:20:51 AM	PHl3 MFC set to  0.000000
2/21/2011	9:20:51 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:20:51 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:20:52 AM	Tube furnace set to 0
2/21/2011	9:21:21 AM	Helium valve closed
2/21/2011	9:21:21 AM	H2 valve closed
2/21/2011	9:21:21 AM	BCl3 valve closed
2/21/2011	9:21:21 AM	PH3 valve closed
2/21/2011	9:21:21 AM	SiCl4 pre valve closed
2/21/2011	9:21:21 AM	SiCl4 post valve closed
2/21/2011	9:21:21 AM	Bubbler valve closed
2/21/2011	9:21:21 AM	Main Vac valve opened
2/21/2011	9:21:21 AM	Bypass valve opened
2/21/2011	9:21:21 AM	Helium MFC set to  0.000000
2/21/2011	9:21:21 AM	H2 MFC set to  0.000000
2/21/2011	9:21:21 AM	BCl3 MFC set to  0.000000
2/21/2011	9:21:21 AM	PHl3 MFC set to  0.000000
2/21/2011	9:21:21 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:21:21 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:21:21 AM	Tube furnace set to 0
2/21/2011	9:21:21 AM	Run finished at 9:21 AM
2/21/2011	9:21:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	9:21:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	9:21:55 AM	Recipe started at 9:21 AM
2/21/2011	9:21:55 AM	Helium valve closed
2/21/2011	9:21:55 AM	H2 valve closed
2/21/2011	9:21:55 AM	BCl3 valve closed
2/21/2011	9:21:55 AM	PH3 valve closed
2/21/2011	9:21:55 AM	SiCl4 pre valve closed
2/21/2011	9:21:55 AM	SiCl4 post valve closed
2/21/2011	9:21:55 AM	Main Vac valve closed
2/21/2011	9:21:55 AM	Bubbler valve closed
2/21/2011	9:21:55 AM	Bypass valve opened
2/21/2011	9:21:55 AM	Helium MFC set to  0.000000
2/21/2011	9:21:55 AM	H2 MFC set to  0.000000
2/21/2011	9:21:55 AM	BCl3 MFC set to  0.000000
2/21/2011	9:21:55 AM	PHl3 MFC set to  0.000000
2/21/2011	9:21:55 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:21:55 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:21:55 AM	Tube furnace set to 0
2/21/2011	9:21:55 AM	Helium valve closed
2/21/2011	9:21:55 AM	H2 valve closed
2/21/2011	9:21:55 AM	BCl3 valve closed
2/21/2011	9:21:55 AM	PH3 valve closed
2/21/2011	9:21:55 AM	SiCl4 pre valve closed
2/21/2011	9:21:55 AM	SiCl4 post valve closed
2/21/2011	9:21:55 AM	Bubbler valve closed
2/21/2011	9:21:55 AM	Main Vac valve opened
2/21/2011	9:21:55 AM	Bypass valve opened
2/21/2011	9:21:55 AM	Helium MFC set to  0.000000
2/21/2011	9:21:55 AM	H2 MFC set to  0.000000
2/21/2011	9:21:55 AM	BCl3 MFC set to  0.000000
2/21/2011	9:21:55 AM	PHl3 MFC set to  0.000000
2/21/2011	9:21:55 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:21:55 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:21:56 AM	Tube furnace set to 0
2/21/2011	9:22:56 AM	H2 valve closed
2/21/2011	9:22:56 AM	BCl3 valve closed
2/21/2011	9:22:56 AM	PH3 valve closed
2/21/2011	9:22:56 AM	SiCl4 pre valve closed
2/21/2011	9:22:56 AM	SiCl4 post valve closed
2/21/2011	9:22:56 AM	Bubbler valve closed
2/21/2011	9:22:56 AM	Helium valve opened
2/21/2011	9:22:56 AM	Main Vac valve opened
2/21/2011	9:22:56 AM	Bypass valve opened
2/21/2011	9:22:56 AM	Helium MFC set to  100.000000
2/21/2011	9:22:56 AM	H2 MFC set to  0.000000
2/21/2011	9:22:56 AM	BCl3 MFC set to  0.000000
2/21/2011	9:22:56 AM	PHl3 MFC set to  0.000000
2/21/2011	9:22:56 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:22:56 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:22:56 AM	Tube furnace set to 0
2/21/2011	9:23:56 AM	Helium valve closed
2/21/2011	9:23:56 AM	H2 valve closed
2/21/2011	9:23:56 AM	BCl3 valve closed
2/21/2011	9:23:56 AM	PH3 valve closed
2/21/2011	9:23:56 AM	SiCl4 pre valve closed
2/21/2011	9:23:56 AM	SiCl4 post valve closed
2/21/2011	9:23:56 AM	Bubbler valve closed
2/21/2011	9:23:56 AM	Main Vac valve opened
2/21/2011	9:23:56 AM	Bypass valve opened
2/21/2011	9:23:56 AM	Helium MFC set to  0.000000
2/21/2011	9:23:56 AM	H2 MFC set to  0.000000
2/21/2011	9:23:56 AM	BCl3 MFC set to  0.000000
2/21/2011	9:23:56 AM	PHl3 MFC set to  0.000000
2/21/2011	9:23:56 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:23:56 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:23:56 AM	Tube furnace set to 0
2/21/2011	9:24:56 AM	H2 valve closed
2/21/2011	9:24:56 AM	BCl3 valve closed
2/21/2011	9:24:56 AM	PH3 valve closed
2/21/2011	9:24:56 AM	SiCl4 pre valve closed
2/21/2011	9:24:56 AM	SiCl4 post valve closed
2/21/2011	9:24:56 AM	Bubbler valve closed
2/21/2011	9:24:56 AM	Helium valve opened
2/21/2011	9:24:56 AM	Main Vac valve opened
2/21/2011	9:24:56 AM	Bypass valve opened
2/21/2011	9:24:56 AM	Helium MFC set to  100.000000
2/21/2011	9:24:56 AM	H2 MFC set to  0.000000
2/21/2011	9:24:56 AM	BCl3 MFC set to  0.000000
2/21/2011	9:24:56 AM	PHl3 MFC set to  0.000000
2/21/2011	9:24:56 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:24:56 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:24:56 AM	Tube furnace set to 0
2/21/2011	9:25:56 AM	Helium valve closed
2/21/2011	9:25:56 AM	H2 valve closed
2/21/2011	9:25:56 AM	BCl3 valve closed
2/21/2011	9:25:56 AM	PH3 valve closed
2/21/2011	9:25:56 AM	SiCl4 pre valve closed
2/21/2011	9:25:56 AM	SiCl4 post valve closed
2/21/2011	9:25:56 AM	Bubbler valve closed
2/21/2011	9:25:56 AM	Main Vac valve opened
2/21/2011	9:25:56 AM	Bypass valve opened
2/21/2011	9:25:56 AM	Helium MFC set to  0.000000
2/21/2011	9:25:56 AM	H2 MFC set to  0.000000
2/21/2011	9:25:56 AM	BCl3 MFC set to  0.000000
2/21/2011	9:25:56 AM	PHl3 MFC set to  0.000000
2/21/2011	9:25:56 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:25:56 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:25:56 AM	Tube furnace set to 0
2/21/2011	9:26:56 AM	H2 valve closed
2/21/2011	9:26:56 AM	BCl3 valve closed
2/21/2011	9:26:56 AM	PH3 valve closed
2/21/2011	9:26:56 AM	SiCl4 pre valve closed
2/21/2011	9:26:56 AM	SiCl4 post valve closed
2/21/2011	9:26:56 AM	Bubbler valve closed
2/21/2011	9:26:56 AM	Helium valve opened
2/21/2011	9:26:56 AM	Main Vac valve opened
2/21/2011	9:26:56 AM	Bypass valve opened
2/21/2011	9:26:56 AM	Helium MFC set to  100.000000
2/21/2011	9:26:56 AM	H2 MFC set to  0.000000
2/21/2011	9:26:56 AM	BCl3 MFC set to  0.000000
2/21/2011	9:26:56 AM	PHl3 MFC set to  0.000000
2/21/2011	9:26:56 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:26:56 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:26:57 AM	Tube furnace set to 0
2/21/2011	9:27:57 AM	Helium valve closed
2/21/2011	9:27:57 AM	H2 valve closed
2/21/2011	9:27:57 AM	BCl3 valve closed
2/21/2011	9:27:57 AM	PH3 valve closed
2/21/2011	9:27:57 AM	SiCl4 pre valve closed
2/21/2011	9:27:57 AM	SiCl4 post valve closed
2/21/2011	9:27:57 AM	Bubbler valve closed
2/21/2011	9:27:57 AM	Main Vac valve opened
2/21/2011	9:27:57 AM	Bypass valve opened
2/21/2011	9:27:57 AM	Helium MFC set to  0.000000
2/21/2011	9:27:57 AM	H2 MFC set to  0.000000
2/21/2011	9:27:57 AM	BCl3 MFC set to  0.000000
2/21/2011	9:27:57 AM	PHl3 MFC set to  0.000000
2/21/2011	9:27:57 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:27:57 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:27:57 AM	Tube furnace set to 0
2/21/2011	9:28:57 AM	H2 valve closed
2/21/2011	9:28:57 AM	BCl3 valve closed
2/21/2011	9:28:57 AM	PH3 valve closed
2/21/2011	9:28:57 AM	SiCl4 pre valve closed
2/21/2011	9:28:57 AM	SiCl4 post valve closed
2/21/2011	9:28:57 AM	Bubbler valve closed
2/21/2011	9:28:57 AM	Helium valve opened
2/21/2011	9:28:57 AM	Main Vac valve opened
2/21/2011	9:28:57 AM	Bypass valve opened
2/21/2011	9:28:57 AM	Helium MFC set to  100.000000
2/21/2011	9:28:57 AM	H2 MFC set to  0.000000
2/21/2011	9:28:57 AM	BCl3 MFC set to  0.000000
2/21/2011	9:28:57 AM	PHl3 MFC set to  0.000000
2/21/2011	9:28:57 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:28:57 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:28:57 AM	Tube furnace set to 0
2/21/2011	9:29:57 AM	Helium valve closed
2/21/2011	9:29:57 AM	H2 valve closed
2/21/2011	9:29:57 AM	BCl3 valve closed
2/21/2011	9:29:57 AM	PH3 valve closed
2/21/2011	9:29:57 AM	SiCl4 pre valve closed
2/21/2011	9:29:57 AM	SiCl4 post valve closed
2/21/2011	9:29:57 AM	Bubbler valve closed
2/21/2011	9:29:57 AM	Main Vac valve opened
2/21/2011	9:29:57 AM	Bypass valve opened
2/21/2011	9:29:57 AM	Helium MFC set to  0.000000
2/21/2011	9:29:57 AM	H2 MFC set to  0.000000
2/21/2011	9:29:57 AM	BCl3 MFC set to  0.000000
2/21/2011	9:29:57 AM	PHl3 MFC set to  0.000000
2/21/2011	9:29:57 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:29:57 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:29:57 AM	Tube furnace set to 0
2/21/2011	9:30:57 AM	H2 valve closed
2/21/2011	9:30:57 AM	BCl3 valve closed
2/21/2011	9:30:57 AM	PH3 valve closed
2/21/2011	9:30:57 AM	SiCl4 pre valve closed
2/21/2011	9:30:57 AM	SiCl4 post valve closed
2/21/2011	9:30:57 AM	Bubbler valve closed
2/21/2011	9:30:57 AM	Helium valve opened
2/21/2011	9:30:57 AM	Main Vac valve opened
2/21/2011	9:30:57 AM	Bypass valve opened
2/21/2011	9:30:57 AM	Helium MFC set to  100.000000
2/21/2011	9:30:57 AM	H2 MFC set to  0.000000
2/21/2011	9:30:57 AM	BCl3 MFC set to  0.000000
2/21/2011	9:30:57 AM	PHl3 MFC set to  0.000000
2/21/2011	9:30:57 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:30:57 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:30:57 AM	Tube furnace set to 0
2/21/2011	9:31:57 AM	Helium valve closed
2/21/2011	9:31:57 AM	H2 valve closed
2/21/2011	9:31:57 AM	BCl3 valve closed
2/21/2011	9:31:57 AM	PH3 valve closed
2/21/2011	9:31:57 AM	SiCl4 pre valve closed
2/21/2011	9:31:57 AM	SiCl4 post valve closed
2/21/2011	9:31:57 AM	Bubbler valve closed
2/21/2011	9:31:57 AM	Main Vac valve opened
2/21/2011	9:31:57 AM	Bypass valve opened
2/21/2011	9:31:57 AM	Helium MFC set to  0.000000
2/21/2011	9:31:57 AM	H2 MFC set to  0.000000
2/21/2011	9:31:57 AM	BCl3 MFC set to  0.000000
2/21/2011	9:31:57 AM	PHl3 MFC set to  0.000000
2/21/2011	9:31:57 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:31:57 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:31:58 AM	Tube furnace set to 0
2/21/2011	9:32:58 AM	H2 valve closed
2/21/2011	9:32:58 AM	BCl3 valve closed
2/21/2011	9:32:58 AM	PH3 valve closed
2/21/2011	9:32:58 AM	SiCl4 pre valve closed
2/21/2011	9:32:58 AM	SiCl4 post valve closed
2/21/2011	9:32:58 AM	Bubbler valve closed
2/21/2011	9:32:58 AM	Helium valve opened
2/21/2011	9:32:58 AM	Main Vac valve opened
2/21/2011	9:32:58 AM	Bypass valve opened
2/21/2011	9:32:58 AM	Helium MFC set to  100.000000
2/21/2011	9:32:58 AM	H2 MFC set to  0.000000
2/21/2011	9:32:58 AM	BCl3 MFC set to  0.000000
2/21/2011	9:32:58 AM	PHl3 MFC set to  0.000000
2/21/2011	9:32:58 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:32:58 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:32:58 AM	Tube furnace set to 0
2/21/2011	9:33:58 AM	Helium valve closed
2/21/2011	9:33:58 AM	H2 valve closed
2/21/2011	9:33:58 AM	BCl3 valve closed
2/21/2011	9:33:58 AM	PH3 valve closed
2/21/2011	9:33:58 AM	SiCl4 pre valve closed
2/21/2011	9:33:58 AM	SiCl4 post valve closed
2/21/2011	9:33:58 AM	Bubbler valve closed
2/21/2011	9:33:58 AM	Main Vac valve opened
2/21/2011	9:33:58 AM	Bypass valve opened
2/21/2011	9:33:58 AM	Helium MFC set to  0.000000
2/21/2011	9:33:58 AM	H2 MFC set to  0.000000
2/21/2011	9:33:58 AM	BCl3 MFC set to  0.000000
2/21/2011	9:33:58 AM	PHl3 MFC set to  0.000000
2/21/2011	9:33:58 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:33:58 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:33:58 AM	Tube furnace set to 0
2/21/2011	9:34:58 AM	H2 valve closed
2/21/2011	9:34:58 AM	BCl3 valve closed
2/21/2011	9:34:58 AM	PH3 valve closed
2/21/2011	9:34:58 AM	SiCl4 pre valve closed
2/21/2011	9:34:58 AM	SiCl4 post valve closed
2/21/2011	9:34:58 AM	Bubbler valve closed
2/21/2011	9:34:58 AM	Helium valve opened
2/21/2011	9:34:58 AM	Main Vac valve opened
2/21/2011	9:34:58 AM	Bypass valve opened
2/21/2011	9:34:58 AM	Helium MFC set to  100.000000
2/21/2011	9:34:58 AM	H2 MFC set to  0.000000
2/21/2011	9:34:58 AM	BCl3 MFC set to  0.000000
2/21/2011	9:34:58 AM	PHl3 MFC set to  0.000000
2/21/2011	9:34:58 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:34:58 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:34:58 AM	Tube furnace set to 0
2/21/2011	9:35:58 AM	Helium valve closed
2/21/2011	9:35:58 AM	H2 valve closed
2/21/2011	9:35:58 AM	BCl3 valve closed
2/21/2011	9:35:58 AM	PH3 valve closed
2/21/2011	9:35:58 AM	SiCl4 pre valve closed
2/21/2011	9:35:58 AM	SiCl4 post valve closed
2/21/2011	9:35:58 AM	Bubbler valve closed
2/21/2011	9:35:58 AM	Main Vac valve opened
2/21/2011	9:35:58 AM	Bypass valve opened
2/21/2011	9:35:58 AM	Helium MFC set to  0.000000
2/21/2011	9:35:58 AM	H2 MFC set to  0.000000
2/21/2011	9:35:58 AM	BCl3 MFC set to  0.000000
2/21/2011	9:35:58 AM	PHl3 MFC set to  0.000000
2/21/2011	9:35:58 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:35:58 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:35:58 AM	Tube furnace set to 0
2/21/2011	9:36:58 AM	H2 valve closed
2/21/2011	9:36:58 AM	BCl3 valve closed
2/21/2011	9:36:58 AM	PH3 valve closed
2/21/2011	9:36:58 AM	SiCl4 pre valve closed
2/21/2011	9:36:58 AM	SiCl4 post valve closed
2/21/2011	9:36:58 AM	Bubbler valve closed
2/21/2011	9:36:58 AM	Helium valve opened
2/21/2011	9:36:58 AM	Main Vac valve opened
2/21/2011	9:36:58 AM	Bypass valve opened
2/21/2011	9:36:58 AM	Helium MFC set to  100.000000
2/21/2011	9:36:58 AM	H2 MFC set to  0.000000
2/21/2011	9:36:58 AM	BCl3 MFC set to  0.000000
2/21/2011	9:36:58 AM	PHl3 MFC set to  0.000000
2/21/2011	9:36:58 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:36:58 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:36:59 AM	Tube furnace set to 0
2/21/2011	9:37:59 AM	Helium valve closed
2/21/2011	9:37:59 AM	H2 valve closed
2/21/2011	9:37:59 AM	BCl3 valve closed
2/21/2011	9:37:59 AM	PH3 valve closed
2/21/2011	9:37:59 AM	SiCl4 pre valve closed
2/21/2011	9:37:59 AM	SiCl4 post valve closed
2/21/2011	9:37:59 AM	Bubbler valve closed
2/21/2011	9:37:59 AM	Main Vac valve opened
2/21/2011	9:37:59 AM	Bypass valve opened
2/21/2011	9:37:59 AM	Helium MFC set to  0.000000
2/21/2011	9:37:59 AM	H2 MFC set to  0.000000
2/21/2011	9:37:59 AM	BCl3 MFC set to  0.000000
2/21/2011	9:37:59 AM	PHl3 MFC set to  0.000000
2/21/2011	9:37:59 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:37:59 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:37:59 AM	Tube furnace set to 0
2/21/2011	9:38:59 AM	H2 valve closed
2/21/2011	9:38:59 AM	BCl3 valve closed
2/21/2011	9:38:59 AM	PH3 valve closed
2/21/2011	9:38:59 AM	SiCl4 pre valve closed
2/21/2011	9:38:59 AM	SiCl4 post valve closed
2/21/2011	9:38:59 AM	Bubbler valve closed
2/21/2011	9:38:59 AM	Helium valve opened
2/21/2011	9:38:59 AM	Main Vac valve opened
2/21/2011	9:38:59 AM	Bypass valve opened
2/21/2011	9:38:59 AM	Helium MFC set to  100.000000
2/21/2011	9:38:59 AM	H2 MFC set to  0.000000
2/21/2011	9:38:59 AM	BCl3 MFC set to  0.000000
2/21/2011	9:38:59 AM	PHl3 MFC set to  0.000000
2/21/2011	9:38:59 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:38:59 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:38:59 AM	Tube furnace set to 0
2/21/2011	9:39:59 AM	Helium valve closed
2/21/2011	9:39:59 AM	H2 valve closed
2/21/2011	9:39:59 AM	BCl3 valve closed
2/21/2011	9:39:59 AM	PH3 valve closed
2/21/2011	9:39:59 AM	SiCl4 pre valve closed
2/21/2011	9:39:59 AM	SiCl4 post valve closed
2/21/2011	9:39:59 AM	Bubbler valve closed
2/21/2011	9:39:59 AM	Main Vac valve opened
2/21/2011	9:39:59 AM	Bypass valve opened
2/21/2011	9:39:59 AM	Helium MFC set to  0.000000
2/21/2011	9:39:59 AM	H2 MFC set to  0.000000
2/21/2011	9:39:59 AM	BCl3 MFC set to  0.000000
2/21/2011	9:39:59 AM	PHl3 MFC set to  0.000000
2/21/2011	9:39:59 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:39:59 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:39:59 AM	Tube furnace set to 0
2/21/2011	9:40:59 AM	H2 valve closed
2/21/2011	9:40:59 AM	BCl3 valve closed
2/21/2011	9:40:59 AM	PH3 valve closed
2/21/2011	9:40:59 AM	SiCl4 pre valve closed
2/21/2011	9:40:59 AM	SiCl4 post valve closed
2/21/2011	9:40:59 AM	Bubbler valve closed
2/21/2011	9:40:59 AM	Helium valve opened
2/21/2011	9:40:59 AM	Main Vac valve opened
2/21/2011	9:40:59 AM	Bypass valve opened
2/21/2011	9:40:59 AM	Helium MFC set to  100.000000
2/21/2011	9:40:59 AM	H2 MFC set to  0.000000
2/21/2011	9:40:59 AM	BCl3 MFC set to  0.000000
2/21/2011	9:40:59 AM	PHl3 MFC set to  0.000000
2/21/2011	9:40:59 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:40:59 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:40:59 AM	Tube furnace set to 0
2/21/2011	9:41:59 AM	Helium valve closed
2/21/2011	9:41:59 AM	H2 valve closed
2/21/2011	9:41:59 AM	BCl3 valve closed
2/21/2011	9:41:59 AM	PH3 valve closed
2/21/2011	9:41:59 AM	SiCl4 pre valve closed
2/21/2011	9:41:59 AM	SiCl4 post valve closed
2/21/2011	9:41:59 AM	Bubbler valve closed
2/21/2011	9:41:59 AM	Main Vac valve opened
2/21/2011	9:41:59 AM	Bypass valve opened
2/21/2011	9:41:59 AM	Helium MFC set to  0.000000
2/21/2011	9:41:59 AM	H2 MFC set to  0.000000
2/21/2011	9:41:59 AM	BCl3 MFC set to  0.000000
2/21/2011	9:41:59 AM	PHl3 MFC set to  0.000000
2/21/2011	9:41:59 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:41:59 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:41:59 AM	Tube furnace set to 0
2/21/2011	9:42:00 AM	Run finished at 9:42 AM
2/21/2011	9:42:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	9:46:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	9:46:48 AM	Recipe started at 9:46 AM
2/21/2011	9:46:48 AM	H2 valve closed
2/21/2011	9:46:48 AM	BCl3 valve closed
2/21/2011	9:46:49 AM	PH3 valve closed
2/21/2011	9:46:49 AM	SiCl4 pre valve closed
2/21/2011	9:46:49 AM	SiCl4 post valve closed
2/21/2011	9:46:49 AM	Main Vac valve closed
2/21/2011	9:46:49 AM	Bypass valve closed
2/21/2011	9:46:49 AM	Bubbler valve closed
2/21/2011	9:46:49 AM	Helium valve opened
2/21/2011	9:46:49 AM	Helium MFC set to  500.000000
2/21/2011	9:46:49 AM	H2 MFC set to  0.000000
2/21/2011	9:46:49 AM	BCl3 MFC set to  0.000000
2/21/2011	9:46:49 AM	PHl3 MFC set to  0.000000
2/21/2011	9:46:49 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:46:49 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:46:49 AM	Tube furnace set to 0
2/21/2011	9:48:04 AM	Helium valve closed
2/21/2011	9:48:04 AM	H2 valve closed
2/21/2011	9:48:04 AM	BCl3 valve closed
2/21/2011	9:48:04 AM	PH3 valve closed
2/21/2011	9:48:04 AM	SiCl4 pre valve closed
2/21/2011	9:48:04 AM	SiCl4 post valve closed
2/21/2011	9:48:04 AM	Main Vac valve closed
2/21/2011	9:48:04 AM	Bypass valve closed
2/21/2011	9:48:04 AM	Bubbler valve closed
2/21/2011	9:48:04 AM	Helium MFC set to  0.000000
2/21/2011	9:48:04 AM	H2 MFC set to  0.000000
2/21/2011	9:48:04 AM	BCl3 MFC set to  0.000000
2/21/2011	9:48:04 AM	PHl3 MFC set to  0.000000
2/21/2011	9:48:04 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:48:04 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:48:04 AM	Tube furnace set to 0
2/21/2011	9:48:05 AM	Run finished at 9:48 AM
2/21/2011	9:48:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	9:56:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	9:56:28 AM	Recipe started at 9:56 AM
2/21/2011	9:56:28 AM	Helium valve closed
2/21/2011	9:56:28 AM	H2 valve closed
2/21/2011	9:56:28 AM	BCl3 valve closed
2/21/2011	9:56:28 AM	PH3 valve closed
2/21/2011	9:56:28 AM	SiCl4 pre valve closed
2/21/2011	9:56:28 AM	SiCl4 post valve closed
2/21/2011	9:56:28 AM	Main Vac valve closed
2/21/2011	9:56:28 AM	Bubbler valve closed
2/21/2011	9:56:28 AM	Bypass valve opened
2/21/2011	9:56:28 AM	Helium MFC set to  0.000000
2/21/2011	9:56:28 AM	H2 MFC set to  0.000000
2/21/2011	9:56:28 AM	BCl3 MFC set to  0.000000
2/21/2011	9:56:28 AM	PHl3 MFC set to  0.000000
2/21/2011	9:56:28 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:56:28 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:56:28 AM	Tube furnace set to 0
2/21/2011	9:56:58 AM	Helium valve closed
2/21/2011	9:56:58 AM	H2 valve closed
2/21/2011	9:56:58 AM	BCl3 valve closed
2/21/2011	9:56:58 AM	PH3 valve closed
2/21/2011	9:56:58 AM	SiCl4 pre valve closed
2/21/2011	9:56:58 AM	SiCl4 post valve closed
2/21/2011	9:56:58 AM	Bubbler valve closed
2/21/2011	9:56:58 AM	Main Vac valve opened
2/21/2011	9:56:58 AM	Bypass valve opened
2/21/2011	9:56:58 AM	Helium MFC set to  0.000000
2/21/2011	9:56:58 AM	H2 MFC set to  0.000000
2/21/2011	9:56:58 AM	BCl3 MFC set to  0.000000
2/21/2011	9:56:58 AM	PHl3 MFC set to  0.000000
2/21/2011	9:56:58 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:56:58 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:56:58 AM	Tube furnace set to 0
2/21/2011	9:56:59 AM	Run finished at 9:56 AM
2/21/2011	9:56:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	9:57:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	9:57:36 AM	Recipe started at 9:57 AM
2/21/2011	9:57:36 AM	Helium valve closed
2/21/2011	9:57:36 AM	H2 valve closed
2/21/2011	9:57:36 AM	BCl3 valve closed
2/21/2011	9:57:36 AM	PH3 valve closed
2/21/2011	9:57:36 AM	SiCl4 pre valve closed
2/21/2011	9:57:36 AM	SiCl4 post valve closed
2/21/2011	9:57:36 AM	Main Vac valve closed
2/21/2011	9:57:36 AM	Bubbler valve closed
2/21/2011	9:57:36 AM	Bypass valve opened
2/21/2011	9:57:36 AM	Helium MFC set to  0.000000
2/21/2011	9:57:36 AM	H2 MFC set to  0.000000
2/21/2011	9:57:36 AM	BCl3 MFC set to  0.000000
2/21/2011	9:57:36 AM	PHl3 MFC set to  0.000000
2/21/2011	9:57:36 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:57:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:57:36 AM	Tube furnace set to 0
2/21/2011	9:57:36 AM	Helium valve closed
2/21/2011	9:57:36 AM	H2 valve closed
2/21/2011	9:57:36 AM	BCl3 valve closed
2/21/2011	9:57:36 AM	PH3 valve closed
2/21/2011	9:57:37 AM	SiCl4 pre valve closed
2/21/2011	9:57:37 AM	SiCl4 post valve closed
2/21/2011	9:57:37 AM	Bubbler valve closed
2/21/2011	9:57:37 AM	Main Vac valve opened
2/21/2011	9:57:37 AM	Bypass valve opened
2/21/2011	9:57:37 AM	Helium MFC set to  0.000000
2/21/2011	9:57:37 AM	H2 MFC set to  0.000000
2/21/2011	9:57:37 AM	BCl3 MFC set to  0.000000
2/21/2011	9:57:37 AM	PHl3 MFC set to  0.000000
2/21/2011	9:57:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:57:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:57:37 AM	Tube furnace set to 0
2/21/2011	9:58:37 AM	H2 valve closed
2/21/2011	9:58:37 AM	BCl3 valve closed
2/21/2011	9:58:37 AM	PH3 valve closed
2/21/2011	9:58:37 AM	SiCl4 pre valve closed
2/21/2011	9:58:37 AM	SiCl4 post valve closed
2/21/2011	9:58:37 AM	Bubbler valve closed
2/21/2011	9:58:37 AM	Helium valve opened
2/21/2011	9:58:37 AM	Main Vac valve opened
2/21/2011	9:58:37 AM	Bypass valve opened
2/21/2011	9:58:37 AM	Helium MFC set to  100.000000
2/21/2011	9:58:37 AM	H2 MFC set to  0.000000
2/21/2011	9:58:37 AM	BCl3 MFC set to  0.000000
2/21/2011	9:58:37 AM	PHl3 MFC set to  0.000000
2/21/2011	9:58:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:58:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:58:37 AM	Tube furnace set to 0
2/21/2011	9:59:37 AM	Helium valve closed
2/21/2011	9:59:37 AM	H2 valve closed
2/21/2011	9:59:37 AM	BCl3 valve closed
2/21/2011	9:59:37 AM	PH3 valve closed
2/21/2011	9:59:37 AM	SiCl4 pre valve closed
2/21/2011	9:59:37 AM	SiCl4 post valve closed
2/21/2011	9:59:37 AM	Bubbler valve closed
2/21/2011	9:59:37 AM	Main Vac valve opened
2/21/2011	9:59:37 AM	Bypass valve opened
2/21/2011	9:59:37 AM	Helium MFC set to  0.000000
2/21/2011	9:59:37 AM	H2 MFC set to  0.000000
2/21/2011	9:59:37 AM	BCl3 MFC set to  0.000000
2/21/2011	9:59:37 AM	PHl3 MFC set to  0.000000
2/21/2011	9:59:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	9:59:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	9:59:37 AM	Tube furnace set to 0
2/21/2011	10:00:37 AM	H2 valve closed
2/21/2011	10:00:37 AM	BCl3 valve closed
2/21/2011	10:00:37 AM	PH3 valve closed
2/21/2011	10:00:37 AM	SiCl4 pre valve closed
2/21/2011	10:00:37 AM	SiCl4 post valve closed
2/21/2011	10:00:37 AM	Bubbler valve closed
2/21/2011	10:00:37 AM	Helium valve opened
2/21/2011	10:00:37 AM	Main Vac valve opened
2/21/2011	10:00:37 AM	Bypass valve opened
2/21/2011	10:00:37 AM	Helium MFC set to  100.000000
2/21/2011	10:00:37 AM	H2 MFC set to  0.000000
2/21/2011	10:00:37 AM	BCl3 MFC set to  0.000000
2/21/2011	10:00:37 AM	PHl3 MFC set to  0.000000
2/21/2011	10:00:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:00:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:00:37 AM	Tube furnace set to 0
2/21/2011	10:01:37 AM	Helium valve closed
2/21/2011	10:01:37 AM	H2 valve closed
2/21/2011	10:01:37 AM	BCl3 valve closed
2/21/2011	10:01:37 AM	PH3 valve closed
2/21/2011	10:01:37 AM	SiCl4 pre valve closed
2/21/2011	10:01:37 AM	SiCl4 post valve closed
2/21/2011	10:01:37 AM	Bubbler valve closed
2/21/2011	10:01:37 AM	Main Vac valve opened
2/21/2011	10:01:37 AM	Bypass valve opened
2/21/2011	10:01:37 AM	Helium MFC set to  0.000000
2/21/2011	10:01:37 AM	H2 MFC set to  0.000000
2/21/2011	10:01:37 AM	BCl3 MFC set to  0.000000
2/21/2011	10:01:37 AM	PHl3 MFC set to  0.000000
2/21/2011	10:01:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:01:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:01:37 AM	Tube furnace set to 0
2/21/2011	10:02:37 AM	H2 valve closed
2/21/2011	10:02:37 AM	BCl3 valve closed
2/21/2011	10:02:37 AM	PH3 valve closed
2/21/2011	10:02:37 AM	SiCl4 pre valve closed
2/21/2011	10:02:37 AM	SiCl4 post valve closed
2/21/2011	10:02:37 AM	Bubbler valve closed
2/21/2011	10:02:37 AM	Helium valve opened
2/21/2011	10:02:37 AM	Main Vac valve opened
2/21/2011	10:02:37 AM	Bypass valve opened
2/21/2011	10:02:37 AM	Helium MFC set to  100.000000
2/21/2011	10:02:37 AM	H2 MFC set to  0.000000
2/21/2011	10:02:37 AM	BCl3 MFC set to  0.000000
2/21/2011	10:02:37 AM	PHl3 MFC set to  0.000000
2/21/2011	10:02:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:02:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:02:38 AM	Tube furnace set to 0
2/21/2011	10:03:38 AM	Helium valve closed
2/21/2011	10:03:38 AM	H2 valve closed
2/21/2011	10:03:38 AM	BCl3 valve closed
2/21/2011	10:03:38 AM	PH3 valve closed
2/21/2011	10:03:38 AM	SiCl4 pre valve closed
2/21/2011	10:03:38 AM	SiCl4 post valve closed
2/21/2011	10:03:38 AM	Bubbler valve closed
2/21/2011	10:03:38 AM	Main Vac valve opened
2/21/2011	10:03:38 AM	Bypass valve opened
2/21/2011	10:03:38 AM	Helium MFC set to  0.000000
2/21/2011	10:03:38 AM	H2 MFC set to  0.000000
2/21/2011	10:03:38 AM	BCl3 MFC set to  0.000000
2/21/2011	10:03:38 AM	PHl3 MFC set to  0.000000
2/21/2011	10:03:38 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:03:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:03:38 AM	Tube furnace set to 0
2/21/2011	10:04:38 AM	H2 valve closed
2/21/2011	10:04:38 AM	BCl3 valve closed
2/21/2011	10:04:38 AM	PH3 valve closed
2/21/2011	10:04:38 AM	SiCl4 pre valve closed
2/21/2011	10:04:38 AM	SiCl4 post valve closed
2/21/2011	10:04:38 AM	Bubbler valve closed
2/21/2011	10:04:38 AM	Helium valve opened
2/21/2011	10:04:38 AM	Main Vac valve opened
2/21/2011	10:04:38 AM	Bypass valve opened
2/21/2011	10:04:38 AM	Helium MFC set to  100.000000
2/21/2011	10:04:38 AM	H2 MFC set to  0.000000
2/21/2011	10:04:38 AM	BCl3 MFC set to  0.000000
2/21/2011	10:04:38 AM	PHl3 MFC set to  0.000000
2/21/2011	10:04:38 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:04:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:04:38 AM	Tube furnace set to 0
2/21/2011	10:05:38 AM	Helium valve closed
2/21/2011	10:05:38 AM	H2 valve closed
2/21/2011	10:05:38 AM	BCl3 valve closed
2/21/2011	10:05:38 AM	PH3 valve closed
2/21/2011	10:05:38 AM	SiCl4 pre valve closed
2/21/2011	10:05:38 AM	SiCl4 post valve closed
2/21/2011	10:05:38 AM	Bubbler valve closed
2/21/2011	10:05:38 AM	Main Vac valve opened
2/21/2011	10:05:38 AM	Bypass valve opened
2/21/2011	10:05:38 AM	Helium MFC set to  0.000000
2/21/2011	10:05:38 AM	H2 MFC set to  0.000000
2/21/2011	10:05:38 AM	BCl3 MFC set to  0.000000
2/21/2011	10:05:38 AM	PHl3 MFC set to  0.000000
2/21/2011	10:05:38 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:05:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:05:38 AM	Tube furnace set to 0
2/21/2011	10:06:38 AM	H2 valve closed
2/21/2011	10:06:38 AM	BCl3 valve closed
2/21/2011	10:06:38 AM	PH3 valve closed
2/21/2011	10:06:38 AM	SiCl4 pre valve closed
2/21/2011	10:06:38 AM	SiCl4 post valve closed
2/21/2011	10:06:38 AM	Bubbler valve closed
2/21/2011	10:06:38 AM	Helium valve opened
2/21/2011	10:06:38 AM	Main Vac valve opened
2/21/2011	10:06:38 AM	Bypass valve opened
2/21/2011	10:06:38 AM	Helium MFC set to  100.000000
2/21/2011	10:06:38 AM	H2 MFC set to  0.000000
2/21/2011	10:06:38 AM	BCl3 MFC set to  0.000000
2/21/2011	10:06:38 AM	PHl3 MFC set to  0.000000
2/21/2011	10:06:38 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:06:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:06:38 AM	Tube furnace set to 0
2/21/2011	10:07:38 AM	Helium valve closed
2/21/2011	10:07:38 AM	H2 valve closed
2/21/2011	10:07:38 AM	BCl3 valve closed
2/21/2011	10:07:38 AM	PH3 valve closed
2/21/2011	10:07:38 AM	SiCl4 pre valve closed
2/21/2011	10:07:38 AM	SiCl4 post valve closed
2/21/2011	10:07:38 AM	Bubbler valve closed
2/21/2011	10:07:38 AM	Main Vac valve opened
2/21/2011	10:07:38 AM	Bypass valve opened
2/21/2011	10:07:38 AM	Helium MFC set to  0.000000
2/21/2011	10:07:38 AM	H2 MFC set to  0.000000
2/21/2011	10:07:38 AM	BCl3 MFC set to  0.000000
2/21/2011	10:07:38 AM	PHl3 MFC set to  0.000000
2/21/2011	10:07:38 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:07:38 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:07:39 AM	Tube furnace set to 0
2/21/2011	10:08:39 AM	H2 valve closed
2/21/2011	10:08:39 AM	BCl3 valve closed
2/21/2011	10:08:39 AM	PH3 valve closed
2/21/2011	10:08:39 AM	SiCl4 pre valve closed
2/21/2011	10:08:39 AM	SiCl4 post valve closed
2/21/2011	10:08:39 AM	Bubbler valve closed
2/21/2011	10:08:39 AM	Helium valve opened
2/21/2011	10:08:39 AM	Main Vac valve opened
2/21/2011	10:08:39 AM	Bypass valve opened
2/21/2011	10:08:39 AM	Helium MFC set to  100.000000
2/21/2011	10:08:39 AM	H2 MFC set to  0.000000
2/21/2011	10:08:39 AM	BCl3 MFC set to  0.000000
2/21/2011	10:08:39 AM	PHl3 MFC set to  0.000000
2/21/2011	10:08:39 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:08:39 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:08:39 AM	Tube furnace set to 0
2/21/2011	10:09:39 AM	Helium valve closed
2/21/2011	10:09:39 AM	H2 valve closed
2/21/2011	10:09:39 AM	BCl3 valve closed
2/21/2011	10:09:39 AM	PH3 valve closed
2/21/2011	10:09:39 AM	SiCl4 pre valve closed
2/21/2011	10:09:39 AM	SiCl4 post valve closed
2/21/2011	10:09:39 AM	Bubbler valve closed
2/21/2011	10:09:39 AM	Main Vac valve opened
2/21/2011	10:09:39 AM	Bypass valve opened
2/21/2011	10:09:39 AM	Helium MFC set to  0.000000
2/21/2011	10:09:39 AM	H2 MFC set to  0.000000
2/21/2011	10:09:39 AM	BCl3 MFC set to  0.000000
2/21/2011	10:09:39 AM	PHl3 MFC set to  0.000000
2/21/2011	10:09:39 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:09:39 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:09:39 AM	Tube furnace set to 0
2/21/2011	10:10:39 AM	H2 valve closed
2/21/2011	10:10:39 AM	BCl3 valve closed
2/21/2011	10:10:39 AM	PH3 valve closed
2/21/2011	10:10:39 AM	SiCl4 pre valve closed
2/21/2011	10:10:39 AM	SiCl4 post valve closed
2/21/2011	10:10:39 AM	Bubbler valve closed
2/21/2011	10:10:39 AM	Helium valve opened
2/21/2011	10:10:39 AM	Main Vac valve opened
2/21/2011	10:10:39 AM	Bypass valve opened
2/21/2011	10:10:39 AM	Helium MFC set to  100.000000
2/21/2011	10:10:39 AM	H2 MFC set to  0.000000
2/21/2011	10:10:39 AM	BCl3 MFC set to  0.000000
2/21/2011	10:10:39 AM	PHl3 MFC set to  0.000000
2/21/2011	10:10:39 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:10:39 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:10:39 AM	Tube furnace set to 0
2/21/2011	10:11:39 AM	Helium valve closed
2/21/2011	10:11:39 AM	H2 valve closed
2/21/2011	10:11:39 AM	BCl3 valve closed
2/21/2011	10:11:39 AM	PH3 valve closed
2/21/2011	10:11:39 AM	SiCl4 pre valve closed
2/21/2011	10:11:39 AM	SiCl4 post valve closed
2/21/2011	10:11:39 AM	Bubbler valve closed
2/21/2011	10:11:39 AM	Main Vac valve opened
2/21/2011	10:11:39 AM	Bypass valve opened
2/21/2011	10:11:39 AM	Helium MFC set to  0.000000
2/21/2011	10:11:39 AM	H2 MFC set to  0.000000
2/21/2011	10:11:39 AM	BCl3 MFC set to  0.000000
2/21/2011	10:11:39 AM	PHl3 MFC set to  0.000000
2/21/2011	10:11:39 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:11:39 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:11:39 AM	Tube furnace set to 0
2/21/2011	10:12:39 AM	H2 valve closed
2/21/2011	10:12:39 AM	BCl3 valve closed
2/21/2011	10:12:39 AM	PH3 valve closed
2/21/2011	10:12:39 AM	SiCl4 pre valve closed
2/21/2011	10:12:39 AM	SiCl4 post valve closed
2/21/2011	10:12:39 AM	Bubbler valve closed
2/21/2011	10:12:39 AM	Helium valve opened
2/21/2011	10:12:39 AM	Main Vac valve opened
2/21/2011	10:12:39 AM	Bypass valve opened
2/21/2011	10:12:39 AM	Helium MFC set to  100.000000
2/21/2011	10:12:39 AM	H2 MFC set to  0.000000
2/21/2011	10:12:39 AM	BCl3 MFC set to  0.000000
2/21/2011	10:12:39 AM	PHl3 MFC set to  0.000000
2/21/2011	10:12:39 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:12:39 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:12:40 AM	Tube furnace set to 0
2/21/2011	10:13:40 AM	Helium valve closed
2/21/2011	10:13:40 AM	H2 valve closed
2/21/2011	10:13:40 AM	BCl3 valve closed
2/21/2011	10:13:40 AM	PH3 valve closed
2/21/2011	10:13:40 AM	SiCl4 pre valve closed
2/21/2011	10:13:40 AM	SiCl4 post valve closed
2/21/2011	10:13:40 AM	Bubbler valve closed
2/21/2011	10:13:40 AM	Main Vac valve opened
2/21/2011	10:13:40 AM	Bypass valve opened
2/21/2011	10:13:40 AM	Helium MFC set to  0.000000
2/21/2011	10:13:40 AM	H2 MFC set to  0.000000
2/21/2011	10:13:40 AM	BCl3 MFC set to  0.000000
2/21/2011	10:13:40 AM	PHl3 MFC set to  0.000000
2/21/2011	10:13:40 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:13:40 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:13:40 AM	Tube furnace set to 0
2/21/2011	10:14:40 AM	H2 valve closed
2/21/2011	10:14:40 AM	BCl3 valve closed
2/21/2011	10:14:40 AM	PH3 valve closed
2/21/2011	10:14:40 AM	SiCl4 pre valve closed
2/21/2011	10:14:40 AM	SiCl4 post valve closed
2/21/2011	10:14:40 AM	Bubbler valve closed
2/21/2011	10:14:40 AM	Helium valve opened
2/21/2011	10:14:40 AM	Main Vac valve opened
2/21/2011	10:14:40 AM	Bypass valve opened
2/21/2011	10:14:40 AM	Helium MFC set to  100.000000
2/21/2011	10:14:40 AM	H2 MFC set to  0.000000
2/21/2011	10:14:40 AM	BCl3 MFC set to  0.000000
2/21/2011	10:14:40 AM	PHl3 MFC set to  0.000000
2/21/2011	10:14:40 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:14:40 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:14:40 AM	Tube furnace set to 0
2/21/2011	10:15:40 AM	Helium valve closed
2/21/2011	10:15:40 AM	H2 valve closed
2/21/2011	10:15:40 AM	BCl3 valve closed
2/21/2011	10:15:40 AM	PH3 valve closed
2/21/2011	10:15:40 AM	SiCl4 pre valve closed
2/21/2011	10:15:40 AM	SiCl4 post valve closed
2/21/2011	10:15:40 AM	Bubbler valve closed
2/21/2011	10:15:40 AM	Main Vac valve opened
2/21/2011	10:15:40 AM	Bypass valve opened
2/21/2011	10:15:40 AM	Helium MFC set to  0.000000
2/21/2011	10:15:40 AM	H2 MFC set to  0.000000
2/21/2011	10:15:40 AM	BCl3 MFC set to  0.000000
2/21/2011	10:15:40 AM	PHl3 MFC set to  0.000000
2/21/2011	10:15:40 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:15:40 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:15:40 AM	Tube furnace set to 0
2/21/2011	10:16:40 AM	H2 valve closed
2/21/2011	10:16:40 AM	BCl3 valve closed
2/21/2011	10:16:40 AM	PH3 valve closed
2/21/2011	10:16:40 AM	SiCl4 pre valve closed
2/21/2011	10:16:40 AM	SiCl4 post valve closed
2/21/2011	10:16:40 AM	Bubbler valve closed
2/21/2011	10:16:40 AM	Helium valve opened
2/21/2011	10:16:40 AM	Main Vac valve opened
2/21/2011	10:16:40 AM	Bypass valve opened
2/21/2011	10:16:40 AM	Helium MFC set to  100.000000
2/21/2011	10:16:40 AM	H2 MFC set to  0.000000
2/21/2011	10:16:40 AM	BCl3 MFC set to  0.000000
2/21/2011	10:16:40 AM	PHl3 MFC set to  0.000000
2/21/2011	10:16:40 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:16:40 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:16:40 AM	Tube furnace set to 0
2/21/2011	10:17:40 AM	Helium valve closed
2/21/2011	10:17:40 AM	H2 valve closed
2/21/2011	10:17:40 AM	BCl3 valve closed
2/21/2011	10:17:40 AM	PH3 valve closed
2/21/2011	10:17:40 AM	SiCl4 pre valve closed
2/21/2011	10:17:40 AM	SiCl4 post valve closed
2/21/2011	10:17:40 AM	Bubbler valve closed
2/21/2011	10:17:40 AM	Main Vac valve opened
2/21/2011	10:17:40 AM	Bypass valve opened
2/21/2011	10:17:40 AM	Helium MFC set to  0.000000
2/21/2011	10:17:40 AM	H2 MFC set to  0.000000
2/21/2011	10:17:40 AM	BCl3 MFC set to  0.000000
2/21/2011	10:17:40 AM	PHl3 MFC set to  0.000000
2/21/2011	10:17:40 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:17:40 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:17:41 AM	Tube furnace set to 0
2/21/2011	10:17:42 AM	Run finished at 10:17 AM
2/21/2011	10:17:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	10:22:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	10:22:32 AM	Recipe started at 10:22 AM
2/21/2011	10:22:32 AM	H2 valve closed
2/21/2011	10:22:32 AM	BCl3 valve closed
2/21/2011	10:22:32 AM	PH3 valve closed
2/21/2011	10:22:32 AM	SiCl4 pre valve closed
2/21/2011	10:22:32 AM	SiCl4 post valve closed
2/21/2011	10:22:32 AM	Main Vac valve closed
2/21/2011	10:22:32 AM	Bypass valve closed
2/21/2011	10:22:32 AM	Bubbler valve closed
2/21/2011	10:22:32 AM	Helium valve opened
2/21/2011	10:22:32 AM	Helium MFC set to  500.000000
2/21/2011	10:22:32 AM	H2 MFC set to  0.000000
2/21/2011	10:22:32 AM	BCl3 MFC set to  0.000000
2/21/2011	10:22:32 AM	PHl3 MFC set to  0.000000
2/21/2011	10:22:32 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:22:32 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:22:32 AM	Tube furnace set to 0
2/21/2011	10:23:48 AM	Helium valve closed
2/21/2011	10:23:48 AM	H2 valve closed
2/21/2011	10:23:48 AM	BCl3 valve closed
2/21/2011	10:23:48 AM	PH3 valve closed
2/21/2011	10:23:48 AM	SiCl4 pre valve closed
2/21/2011	10:23:48 AM	SiCl4 post valve closed
2/21/2011	10:23:48 AM	Main Vac valve closed
2/21/2011	10:23:48 AM	Bypass valve closed
2/21/2011	10:23:48 AM	Bubbler valve closed
2/21/2011	10:23:48 AM	Helium MFC set to  0.000000
2/21/2011	10:23:48 AM	H2 MFC set to  0.000000
2/21/2011	10:23:48 AM	BCl3 MFC set to  0.000000
2/21/2011	10:23:48 AM	PHl3 MFC set to  0.000000
2/21/2011	10:23:48 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:23:48 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:23:48 AM	Tube furnace set to 0
2/21/2011	10:23:48 AM	Run finished at 10:23 AM
2/21/2011	10:23:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	10:32:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	10:32:22 AM	Recipe started at 10:32 AM
2/21/2011	10:32:22 AM	Helium valve closed
2/21/2011	10:32:22 AM	H2 valve closed
2/21/2011	10:32:22 AM	BCl3 valve closed
2/21/2011	10:32:23 AM	PH3 valve closed
2/21/2011	10:32:23 AM	SiCl4 pre valve closed
2/21/2011	10:32:23 AM	SiCl4 post valve closed
2/21/2011	10:32:23 AM	Main Vac valve closed
2/21/2011	10:32:23 AM	Bubbler valve closed
2/21/2011	10:32:23 AM	Bypass valve opened
2/21/2011	10:32:23 AM	Helium MFC set to  0.000000
2/21/2011	10:32:23 AM	H2 MFC set to  0.000000
2/21/2011	10:32:23 AM	BCl3 MFC set to  0.000000
2/21/2011	10:32:23 AM	PHl3 MFC set to  0.000000
2/21/2011	10:32:23 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:32:23 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:32:23 AM	Tube furnace set to 0
2/21/2011	10:32:53 AM	Helium valve closed
2/21/2011	10:32:53 AM	H2 valve closed
2/21/2011	10:32:53 AM	BCl3 valve closed
2/21/2011	10:32:53 AM	PH3 valve closed
2/21/2011	10:32:53 AM	SiCl4 pre valve closed
2/21/2011	10:32:53 AM	SiCl4 post valve closed
2/21/2011	10:32:53 AM	Bubbler valve closed
2/21/2011	10:32:53 AM	Main Vac valve opened
2/21/2011	10:32:53 AM	Bypass valve opened
2/21/2011	10:32:53 AM	Helium MFC set to  0.000000
2/21/2011	10:32:53 AM	H2 MFC set to  0.000000
2/21/2011	10:32:53 AM	BCl3 MFC set to  0.000000
2/21/2011	10:32:53 AM	PHl3 MFC set to  0.000000
2/21/2011	10:32:53 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:32:53 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:32:54 AM	Tube furnace set to 0
2/21/2011	10:32:54 AM	Run finished at 10:32 AM
2/21/2011	10:32:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	10:35:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	10:35:32 AM	Recipe started at 10:35 AM
2/21/2011	10:35:32 AM	Helium valve closed
2/21/2011	10:35:32 AM	H2 valve closed
2/21/2011	10:35:32 AM	BCl3 valve closed
2/21/2011	10:35:32 AM	PH3 valve closed
2/21/2011	10:35:32 AM	SiCl4 pre valve closed
2/21/2011	10:35:32 AM	SiCl4 post valve closed
2/21/2011	10:35:32 AM	Main Vac valve closed
2/21/2011	10:35:32 AM	Bubbler valve closed
2/21/2011	10:35:32 AM	Bypass valve opened
2/21/2011	10:35:32 AM	Helium MFC set to  0.000000
2/21/2011	10:35:32 AM	H2 MFC set to  0.000000
2/21/2011	10:35:32 AM	BCl3 MFC set to  0.000000
2/21/2011	10:35:32 AM	PHl3 MFC set to  0.000000
2/21/2011	10:35:32 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:35:32 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:35:32 AM	Tube furnace set to 0
2/21/2011	10:35:32 AM	Helium valve closed
2/21/2011	10:35:32 AM	H2 valve closed
2/21/2011	10:35:32 AM	BCl3 valve closed
2/21/2011	10:35:32 AM	PH3 valve closed
2/21/2011	10:35:32 AM	SiCl4 pre valve closed
2/21/2011	10:35:32 AM	SiCl4 post valve closed
2/21/2011	10:35:32 AM	Bubbler valve closed
2/21/2011	10:35:32 AM	Main Vac valve opened
2/21/2011	10:35:32 AM	Bypass valve opened
2/21/2011	10:35:32 AM	Helium MFC set to  0.000000
2/21/2011	10:35:32 AM	H2 MFC set to  0.000000
2/21/2011	10:35:32 AM	BCl3 MFC set to  0.000000
2/21/2011	10:35:32 AM	PHl3 MFC set to  0.000000
2/21/2011	10:35:32 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:35:32 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:35:32 AM	Tube furnace set to 0
2/21/2011	10:36:32 AM	H2 valve closed
2/21/2011	10:36:32 AM	BCl3 valve closed
2/21/2011	10:36:32 AM	PH3 valve closed
2/21/2011	10:36:32 AM	SiCl4 pre valve closed
2/21/2011	10:36:32 AM	SiCl4 post valve closed
2/21/2011	10:36:32 AM	Bubbler valve closed
2/21/2011	10:36:32 AM	Helium valve opened
2/21/2011	10:36:32 AM	Main Vac valve opened
2/21/2011	10:36:32 AM	Bypass valve opened
2/21/2011	10:36:32 AM	Helium MFC set to  100.000000
2/21/2011	10:36:32 AM	H2 MFC set to  0.000000
2/21/2011	10:36:32 AM	BCl3 MFC set to  0.000000
2/21/2011	10:36:32 AM	PHl3 MFC set to  0.000000
2/21/2011	10:36:32 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:36:32 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:36:33 AM	Tube furnace set to 0
2/21/2011	10:37:33 AM	Helium valve closed
2/21/2011	10:37:33 AM	H2 valve closed
2/21/2011	10:37:33 AM	BCl3 valve closed
2/21/2011	10:37:33 AM	PH3 valve closed
2/21/2011	10:37:33 AM	SiCl4 pre valve closed
2/21/2011	10:37:33 AM	SiCl4 post valve closed
2/21/2011	10:37:33 AM	Bubbler valve closed
2/21/2011	10:37:33 AM	Main Vac valve opened
2/21/2011	10:37:33 AM	Bypass valve opened
2/21/2011	10:37:33 AM	Helium MFC set to  0.000000
2/21/2011	10:37:33 AM	H2 MFC set to  0.000000
2/21/2011	10:37:33 AM	BCl3 MFC set to  0.000000
2/21/2011	10:37:33 AM	PHl3 MFC set to  0.000000
2/21/2011	10:37:33 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:37:33 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:37:33 AM	Tube furnace set to 0
2/21/2011	10:38:33 AM	H2 valve closed
2/21/2011	10:38:33 AM	BCl3 valve closed
2/21/2011	10:38:33 AM	PH3 valve closed
2/21/2011	10:38:33 AM	SiCl4 pre valve closed
2/21/2011	10:38:33 AM	SiCl4 post valve closed
2/21/2011	10:38:33 AM	Bubbler valve closed
2/21/2011	10:38:33 AM	Helium valve opened
2/21/2011	10:38:33 AM	Main Vac valve opened
2/21/2011	10:38:33 AM	Bypass valve opened
2/21/2011	10:38:33 AM	Helium MFC set to  100.000000
2/21/2011	10:38:33 AM	H2 MFC set to  0.000000
2/21/2011	10:38:33 AM	BCl3 MFC set to  0.000000
2/21/2011	10:38:33 AM	PHl3 MFC set to  0.000000
2/21/2011	10:38:33 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:38:33 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:38:33 AM	Tube furnace set to 0
2/21/2011	10:39:33 AM	Helium valve closed
2/21/2011	10:39:33 AM	H2 valve closed
2/21/2011	10:39:33 AM	BCl3 valve closed
2/21/2011	10:39:33 AM	PH3 valve closed
2/21/2011	10:39:33 AM	SiCl4 pre valve closed
2/21/2011	10:39:33 AM	SiCl4 post valve closed
2/21/2011	10:39:33 AM	Bubbler valve closed
2/21/2011	10:39:33 AM	Main Vac valve opened
2/21/2011	10:39:33 AM	Bypass valve opened
2/21/2011	10:39:33 AM	Helium MFC set to  0.000000
2/21/2011	10:39:33 AM	H2 MFC set to  0.000000
2/21/2011	10:39:33 AM	BCl3 MFC set to  0.000000
2/21/2011	10:39:33 AM	PHl3 MFC set to  0.000000
2/21/2011	10:39:33 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:39:33 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:39:33 AM	Tube furnace set to 0
2/21/2011	10:40:33 AM	H2 valve closed
2/21/2011	10:40:33 AM	BCl3 valve closed
2/21/2011	10:40:33 AM	PH3 valve closed
2/21/2011	10:40:33 AM	SiCl4 pre valve closed
2/21/2011	10:40:33 AM	SiCl4 post valve closed
2/21/2011	10:40:33 AM	Bubbler valve closed
2/21/2011	10:40:33 AM	Helium valve opened
2/21/2011	10:40:33 AM	Main Vac valve opened
2/21/2011	10:40:33 AM	Bypass valve opened
2/21/2011	10:40:33 AM	Helium MFC set to  100.000000
2/21/2011	10:40:33 AM	H2 MFC set to  0.000000
2/21/2011	10:40:33 AM	BCl3 MFC set to  0.000000
2/21/2011	10:40:33 AM	PHl3 MFC set to  0.000000
2/21/2011	10:40:33 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:40:33 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:40:33 AM	Tube furnace set to 0
2/21/2011	10:41:33 AM	Helium valve closed
2/21/2011	10:41:33 AM	H2 valve closed
2/21/2011	10:41:33 AM	BCl3 valve closed
2/21/2011	10:41:33 AM	PH3 valve closed
2/21/2011	10:41:33 AM	SiCl4 pre valve closed
2/21/2011	10:41:33 AM	SiCl4 post valve closed
2/21/2011	10:41:33 AM	Bubbler valve closed
2/21/2011	10:41:33 AM	Main Vac valve opened
2/21/2011	10:41:33 AM	Bypass valve opened
2/21/2011	10:41:33 AM	Helium MFC set to  0.000000
2/21/2011	10:41:33 AM	H2 MFC set to  0.000000
2/21/2011	10:41:33 AM	BCl3 MFC set to  0.000000
2/21/2011	10:41:33 AM	PHl3 MFC set to  0.000000
2/21/2011	10:41:33 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:41:33 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:41:34 AM	Tube furnace set to 0
2/21/2011	10:42:34 AM	H2 valve closed
2/21/2011	10:42:34 AM	BCl3 valve closed
2/21/2011	10:42:34 AM	PH3 valve closed
2/21/2011	10:42:34 AM	SiCl4 pre valve closed
2/21/2011	10:42:34 AM	SiCl4 post valve closed
2/21/2011	10:42:34 AM	Bubbler valve closed
2/21/2011	10:42:34 AM	Helium valve opened
2/21/2011	10:42:34 AM	Main Vac valve opened
2/21/2011	10:42:34 AM	Bypass valve opened
2/21/2011	10:42:34 AM	Helium MFC set to  100.000000
2/21/2011	10:42:34 AM	H2 MFC set to  0.000000
2/21/2011	10:42:34 AM	BCl3 MFC set to  0.000000
2/21/2011	10:42:34 AM	PHl3 MFC set to  0.000000
2/21/2011	10:42:34 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:42:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:42:34 AM	Tube furnace set to 0
2/21/2011	10:43:34 AM	Helium valve closed
2/21/2011	10:43:34 AM	H2 valve closed
2/21/2011	10:43:34 AM	BCl3 valve closed
2/21/2011	10:43:34 AM	PH3 valve closed
2/21/2011	10:43:34 AM	SiCl4 pre valve closed
2/21/2011	10:43:34 AM	SiCl4 post valve closed
2/21/2011	10:43:34 AM	Bubbler valve closed
2/21/2011	10:43:34 AM	Main Vac valve opened
2/21/2011	10:43:34 AM	Bypass valve opened
2/21/2011	10:43:34 AM	Helium MFC set to  0.000000
2/21/2011	10:43:34 AM	H2 MFC set to  0.000000
2/21/2011	10:43:34 AM	BCl3 MFC set to  0.000000
2/21/2011	10:43:34 AM	PHl3 MFC set to  0.000000
2/21/2011	10:43:34 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:43:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:43:34 AM	Tube furnace set to 0
2/21/2011	10:44:34 AM	H2 valve closed
2/21/2011	10:44:34 AM	BCl3 valve closed
2/21/2011	10:44:34 AM	PH3 valve closed
2/21/2011	10:44:34 AM	SiCl4 pre valve closed
2/21/2011	10:44:34 AM	SiCl4 post valve closed
2/21/2011	10:44:34 AM	Bubbler valve closed
2/21/2011	10:44:34 AM	Helium valve opened
2/21/2011	10:44:34 AM	Main Vac valve opened
2/21/2011	10:44:34 AM	Bypass valve opened
2/21/2011	10:44:34 AM	Helium MFC set to  100.000000
2/21/2011	10:44:34 AM	H2 MFC set to  0.000000
2/21/2011	10:44:34 AM	BCl3 MFC set to  0.000000
2/21/2011	10:44:34 AM	PHl3 MFC set to  0.000000
2/21/2011	10:44:34 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:44:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:44:34 AM	Tube furnace set to 0
2/21/2011	10:45:34 AM	Helium valve closed
2/21/2011	10:45:34 AM	H2 valve closed
2/21/2011	10:45:34 AM	BCl3 valve closed
2/21/2011	10:45:34 AM	PH3 valve closed
2/21/2011	10:45:34 AM	SiCl4 pre valve closed
2/21/2011	10:45:34 AM	SiCl4 post valve closed
2/21/2011	10:45:34 AM	Bubbler valve closed
2/21/2011	10:45:34 AM	Main Vac valve opened
2/21/2011	10:45:34 AM	Bypass valve opened
2/21/2011	10:45:34 AM	Helium MFC set to  0.000000
2/21/2011	10:45:34 AM	H2 MFC set to  0.000000
2/21/2011	10:45:34 AM	BCl3 MFC set to  0.000000
2/21/2011	10:45:34 AM	PHl3 MFC set to  0.000000
2/21/2011	10:45:34 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:45:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:45:34 AM	Tube furnace set to 0
2/21/2011	10:46:34 AM	H2 valve closed
2/21/2011	10:46:34 AM	BCl3 valve closed
2/21/2011	10:46:34 AM	PH3 valve closed
2/21/2011	10:46:34 AM	SiCl4 pre valve closed
2/21/2011	10:46:34 AM	SiCl4 post valve closed
2/21/2011	10:46:34 AM	Bubbler valve closed
2/21/2011	10:46:34 AM	Helium valve opened
2/21/2011	10:46:34 AM	Main Vac valve opened
2/21/2011	10:46:34 AM	Bypass valve opened
2/21/2011	10:46:34 AM	Helium MFC set to  100.000000
2/21/2011	10:46:34 AM	H2 MFC set to  0.000000
2/21/2011	10:46:34 AM	BCl3 MFC set to  0.000000
2/21/2011	10:46:34 AM	PHl3 MFC set to  0.000000
2/21/2011	10:46:34 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:46:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:46:35 AM	Tube furnace set to 0
2/21/2011	10:47:35 AM	Helium valve closed
2/21/2011	10:47:35 AM	H2 valve closed
2/21/2011	10:47:35 AM	BCl3 valve closed
2/21/2011	10:47:35 AM	PH3 valve closed
2/21/2011	10:47:35 AM	SiCl4 pre valve closed
2/21/2011	10:47:35 AM	SiCl4 post valve closed
2/21/2011	10:47:35 AM	Bubbler valve closed
2/21/2011	10:47:35 AM	Main Vac valve opened
2/21/2011	10:47:35 AM	Bypass valve opened
2/21/2011	10:47:35 AM	Helium MFC set to  0.000000
2/21/2011	10:47:35 AM	H2 MFC set to  0.000000
2/21/2011	10:47:35 AM	BCl3 MFC set to  0.000000
2/21/2011	10:47:35 AM	PHl3 MFC set to  0.000000
2/21/2011	10:47:35 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:47:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:47:35 AM	Tube furnace set to 0
2/21/2011	10:48:35 AM	H2 valve closed
2/21/2011	10:48:35 AM	BCl3 valve closed
2/21/2011	10:48:35 AM	PH3 valve closed
2/21/2011	10:48:35 AM	SiCl4 pre valve closed
2/21/2011	10:48:35 AM	SiCl4 post valve closed
2/21/2011	10:48:35 AM	Bubbler valve closed
2/21/2011	10:48:35 AM	Helium valve opened
2/21/2011	10:48:35 AM	Main Vac valve opened
2/21/2011	10:48:35 AM	Bypass valve opened
2/21/2011	10:48:35 AM	Helium MFC set to  100.000000
2/21/2011	10:48:35 AM	H2 MFC set to  0.000000
2/21/2011	10:48:35 AM	BCl3 MFC set to  0.000000
2/21/2011	10:48:35 AM	PHl3 MFC set to  0.000000
2/21/2011	10:48:35 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:48:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:48:35 AM	Tube furnace set to 0
2/21/2011	10:49:35 AM	Helium valve closed
2/21/2011	10:49:35 AM	H2 valve closed
2/21/2011	10:49:35 AM	BCl3 valve closed
2/21/2011	10:49:35 AM	PH3 valve closed
2/21/2011	10:49:35 AM	SiCl4 pre valve closed
2/21/2011	10:49:35 AM	SiCl4 post valve closed
2/21/2011	10:49:35 AM	Bubbler valve closed
2/21/2011	10:49:35 AM	Main Vac valve opened
2/21/2011	10:49:35 AM	Bypass valve opened
2/21/2011	10:49:35 AM	Helium MFC set to  0.000000
2/21/2011	10:49:35 AM	H2 MFC set to  0.000000
2/21/2011	10:49:35 AM	BCl3 MFC set to  0.000000
2/21/2011	10:49:35 AM	PHl3 MFC set to  0.000000
2/21/2011	10:49:35 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:49:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:49:35 AM	Tube furnace set to 0
2/21/2011	10:50:35 AM	H2 valve closed
2/21/2011	10:50:35 AM	BCl3 valve closed
2/21/2011	10:50:35 AM	PH3 valve closed
2/21/2011	10:50:35 AM	SiCl4 pre valve closed
2/21/2011	10:50:35 AM	SiCl4 post valve closed
2/21/2011	10:50:35 AM	Bubbler valve closed
2/21/2011	10:50:35 AM	Helium valve opened
2/21/2011	10:50:35 AM	Main Vac valve opened
2/21/2011	10:50:35 AM	Bypass valve opened
2/21/2011	10:50:35 AM	Helium MFC set to  100.000000
2/21/2011	10:50:35 AM	H2 MFC set to  0.000000
2/21/2011	10:50:35 AM	BCl3 MFC set to  0.000000
2/21/2011	10:50:35 AM	PHl3 MFC set to  0.000000
2/21/2011	10:50:35 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:50:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:50:35 AM	Tube furnace set to 0
2/21/2011	10:51:35 AM	Helium valve closed
2/21/2011	10:51:35 AM	H2 valve closed
2/21/2011	10:51:35 AM	BCl3 valve closed
2/21/2011	10:51:35 AM	PH3 valve closed
2/21/2011	10:51:35 AM	SiCl4 pre valve closed
2/21/2011	10:51:35 AM	SiCl4 post valve closed
2/21/2011	10:51:35 AM	Bubbler valve closed
2/21/2011	10:51:35 AM	Main Vac valve opened
2/21/2011	10:51:35 AM	Bypass valve opened
2/21/2011	10:51:35 AM	Helium MFC set to  0.000000
2/21/2011	10:51:35 AM	H2 MFC set to  0.000000
2/21/2011	10:51:35 AM	BCl3 MFC set to  0.000000
2/21/2011	10:51:35 AM	PHl3 MFC set to  0.000000
2/21/2011	10:51:35 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:51:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:51:36 AM	Tube furnace set to 0
2/21/2011	10:52:36 AM	H2 valve closed
2/21/2011	10:52:36 AM	BCl3 valve closed
2/21/2011	10:52:36 AM	PH3 valve closed
2/21/2011	10:52:36 AM	SiCl4 pre valve closed
2/21/2011	10:52:36 AM	SiCl4 post valve closed
2/21/2011	10:52:36 AM	Bubbler valve closed
2/21/2011	10:52:36 AM	Helium valve opened
2/21/2011	10:52:36 AM	Main Vac valve opened
2/21/2011	10:52:36 AM	Bypass valve opened
2/21/2011	10:52:36 AM	Helium MFC set to  100.000000
2/21/2011	10:52:36 AM	H2 MFC set to  0.000000
2/21/2011	10:52:36 AM	BCl3 MFC set to  0.000000
2/21/2011	10:52:36 AM	PHl3 MFC set to  0.000000
2/21/2011	10:52:36 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:52:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:52:36 AM	Tube furnace set to 0
2/21/2011	10:53:36 AM	Helium valve closed
2/21/2011	10:53:36 AM	H2 valve closed
2/21/2011	10:53:36 AM	BCl3 valve closed
2/21/2011	10:53:36 AM	PH3 valve closed
2/21/2011	10:53:36 AM	SiCl4 pre valve closed
2/21/2011	10:53:36 AM	SiCl4 post valve closed
2/21/2011	10:53:36 AM	Bubbler valve closed
2/21/2011	10:53:36 AM	Main Vac valve opened
2/21/2011	10:53:36 AM	Bypass valve opened
2/21/2011	10:53:36 AM	Helium MFC set to  0.000000
2/21/2011	10:53:36 AM	H2 MFC set to  0.000000
2/21/2011	10:53:36 AM	BCl3 MFC set to  0.000000
2/21/2011	10:53:36 AM	PHl3 MFC set to  0.000000
2/21/2011	10:53:36 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:53:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:53:36 AM	Tube furnace set to 0
2/21/2011	10:54:36 AM	H2 valve closed
2/21/2011	10:54:36 AM	BCl3 valve closed
2/21/2011	10:54:36 AM	PH3 valve closed
2/21/2011	10:54:36 AM	SiCl4 pre valve closed
2/21/2011	10:54:36 AM	SiCl4 post valve closed
2/21/2011	10:54:36 AM	Bubbler valve closed
2/21/2011	10:54:36 AM	Helium valve opened
2/21/2011	10:54:36 AM	Main Vac valve opened
2/21/2011	10:54:36 AM	Bypass valve opened
2/21/2011	10:54:36 AM	Helium MFC set to  100.000000
2/21/2011	10:54:36 AM	H2 MFC set to  0.000000
2/21/2011	10:54:36 AM	BCl3 MFC set to  0.000000
2/21/2011	10:54:36 AM	PHl3 MFC set to  0.000000
2/21/2011	10:54:36 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:54:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:54:36 AM	Tube furnace set to 0
2/21/2011	10:55:36 AM	Helium valve closed
2/21/2011	10:55:36 AM	H2 valve closed
2/21/2011	10:55:36 AM	BCl3 valve closed
2/21/2011	10:55:36 AM	PH3 valve closed
2/21/2011	10:55:36 AM	SiCl4 pre valve closed
2/21/2011	10:55:36 AM	SiCl4 post valve closed
2/21/2011	10:55:36 AM	Bubbler valve closed
2/21/2011	10:55:36 AM	Main Vac valve opened
2/21/2011	10:55:36 AM	Bypass valve opened
2/21/2011	10:55:36 AM	Helium MFC set to  0.000000
2/21/2011	10:55:36 AM	H2 MFC set to  0.000000
2/21/2011	10:55:36 AM	BCl3 MFC set to  0.000000
2/21/2011	10:55:36 AM	PHl3 MFC set to  0.000000
2/21/2011	10:55:36 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:55:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:55:36 AM	Tube furnace set to 0
2/21/2011	10:55:37 AM	Run finished at 10:55 AM
2/21/2011	10:55:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	10:58:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	10:58:44 AM	Recipe started at 10:58 AM
2/21/2011	10:58:44 AM	Helium valve closed
2/21/2011	10:58:44 AM	H2 valve closed
2/21/2011	10:58:44 AM	BCl3 valve closed
2/21/2011	10:58:44 AM	PH3 valve closed
2/21/2011	10:58:44 AM	SiCl4 pre valve closed
2/21/2011	10:58:44 AM	SiCl4 post valve closed
2/21/2011	10:58:44 AM	Main Vac valve closed
2/21/2011	10:58:44 AM	Bubbler valve closed
2/21/2011	10:58:44 AM	Bypass valve opened
2/21/2011	10:58:44 AM	Helium MFC set to  0.000000
2/21/2011	10:58:44 AM	H2 MFC set to  0.000000
2/21/2011	10:58:44 AM	BCl3 MFC set to  0.000000
2/21/2011	10:58:44 AM	PHl3 MFC set to  0.000000
2/21/2011	10:58:44 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:58:44 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:58:45 AM	Tube furnace set to 0
2/21/2011	10:58:45 AM	Helium valve closed
2/21/2011	10:58:45 AM	H2 valve closed
2/21/2011	10:58:45 AM	BCl3 valve closed
2/21/2011	10:58:45 AM	PH3 valve closed
2/21/2011	10:58:45 AM	SiCl4 pre valve closed
2/21/2011	10:58:45 AM	SiCl4 post valve closed
2/21/2011	10:58:45 AM	Bubbler valve closed
2/21/2011	10:58:45 AM	Main Vac valve opened
2/21/2011	10:58:45 AM	Bypass valve opened
2/21/2011	10:58:45 AM	Helium MFC set to  0.000000
2/21/2011	10:58:45 AM	H2 MFC set to  0.000000
2/21/2011	10:58:45 AM	BCl3 MFC set to  0.000000
2/21/2011	10:58:45 AM	PHl3 MFC set to  0.000000
2/21/2011	10:58:45 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:58:45 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:58:45 AM	Tube furnace set to 0
2/21/2011	10:59:45 AM	H2 valve closed
2/21/2011	10:59:45 AM	BCl3 valve closed
2/21/2011	10:59:45 AM	PH3 valve closed
2/21/2011	10:59:45 AM	SiCl4 pre valve closed
2/21/2011	10:59:45 AM	SiCl4 post valve closed
2/21/2011	10:59:45 AM	Bubbler valve closed
2/21/2011	10:59:45 AM	Helium valve opened
2/21/2011	10:59:45 AM	Main Vac valve opened
2/21/2011	10:59:45 AM	Bypass valve opened
2/21/2011	10:59:45 AM	Helium MFC set to  100.000000
2/21/2011	10:59:45 AM	H2 MFC set to  0.000000
2/21/2011	10:59:45 AM	BCl3 MFC set to  0.000000
2/21/2011	10:59:45 AM	PHl3 MFC set to  0.000000
2/21/2011	10:59:45 AM	SiCl4 MFC set to  0.000000
2/21/2011	10:59:45 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	10:59:45 AM	Tube furnace set to 0
2/21/2011	11:00:05 AM	Run aborted at 11:00 AM
2/21/2011	11:00:05 AM	Helium valve closed
2/21/2011	11:00:05 AM	H2 valve closed
2/21/2011	11:00:05 AM	BCl3 valve closed
2/21/2011	11:00:05 AM	PH3 valve closed
2/21/2011	11:00:05 AM	SiCl4 pre valve closed
2/21/2011	11:00:05 AM	SiCl4 post valve closed
2/21/2011	11:00:05 AM	Bypass valve closed
2/21/2011	11:00:05 AM	Main Vac valve closed
2/21/2011	11:00:05 AM	Bubbler valve closed
2/21/2011	11:00:05 AM	Helium MFC set to  0.000000
2/21/2011	11:00:05 AM	H2 MFC set to  0.000000
2/21/2011	11:00:05 AM	BCl3 MFC set to  0.000000
2/21/2011	11:00:05 AM	PHl3 MFC set to  0.000000
2/21/2011	11:00:05 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:00:06 AM	Tube furnace set to 0
2/21/2011	11:00:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	11:00:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	11:00:19 AM	Recipe started at 11:00 AM
2/21/2011	11:00:19 AM	Helium valve closed
2/21/2011	11:00:19 AM	H2 valve closed
2/21/2011	11:00:19 AM	BCl3 valve closed
2/21/2011	11:00:19 AM	PH3 valve closed
2/21/2011	11:00:19 AM	SiCl4 pre valve closed
2/21/2011	11:00:19 AM	SiCl4 post valve closed
2/21/2011	11:00:19 AM	Main Vac valve closed
2/21/2011	11:00:19 AM	Bubbler valve closed
2/21/2011	11:00:19 AM	Bypass valve opened
2/21/2011	11:00:19 AM	Helium MFC set to  0.000000
2/21/2011	11:00:19 AM	H2 MFC set to  0.000000
2/21/2011	11:00:19 AM	BCl3 MFC set to  0.000000
2/21/2011	11:00:19 AM	PHl3 MFC set to  0.000000
2/21/2011	11:00:19 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:00:19 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:00:19 AM	Tube furnace set to 0
2/21/2011	11:00:19 AM	Helium valve closed
2/21/2011	11:00:19 AM	H2 valve closed
2/21/2011	11:00:19 AM	BCl3 valve closed
2/21/2011	11:00:19 AM	PH3 valve closed
2/21/2011	11:00:19 AM	SiCl4 pre valve closed
2/21/2011	11:00:19 AM	SiCl4 post valve closed
2/21/2011	11:00:19 AM	Bubbler valve closed
2/21/2011	11:00:19 AM	Main Vac valve opened
2/21/2011	11:00:19 AM	Bypass valve opened
2/21/2011	11:00:19 AM	Helium MFC set to  0.000000
2/21/2011	11:00:19 AM	H2 MFC set to  0.000000
2/21/2011	11:00:19 AM	BCl3 MFC set to  0.000000
2/21/2011	11:00:19 AM	PHl3 MFC set to  0.000000
2/21/2011	11:00:19 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:00:19 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:00:19 AM	Tube furnace set to 0
2/21/2011	11:00:19 AM	Run finished at 11:00 AM
2/21/2011	11:00:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	11:01:08 AM	Bypass valve closed
2/21/2011	11:01:08 AM	Main Vac valve closed
2/21/2011	11:01:32 AM	Main Vac valve opened
2/21/2011	11:01:32 AM	Bypass valve opened
2/21/2011	11:01:59 AM	Main Vac valve closed
2/21/2011	11:02:00 AM	Bypass valve closed
2/21/2011	11:02:27 AM	Bypass valve opened
2/21/2011	11:02:27 AM	Main Vac valve opened
2/21/2011	11:03:16 AM	Main Vac valve closed
2/21/2011	11:03:17 AM	Bypass valve closed
2/21/2011	11:03:21 AM	Bypass valve opened
2/21/2011	11:03:21 AM	Main Vac valve opened
2/21/2011	11:05:11 AM	Main Vac valve closed
2/21/2011	11:05:12 AM	Bypass valve closed
2/21/2011	11:05:20 AM	Bypass valve opened
2/21/2011	11:05:20 AM	Main Vac valve opened
2/21/2011	11:08:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	11:08:19 AM	Recipe started at 11:08 AM
2/21/2011	11:08:19 AM	H2 valve closed
2/21/2011	11:08:19 AM	BCl3 valve closed
2/21/2011	11:08:19 AM	PH3 valve closed
2/21/2011	11:08:19 AM	SiCl4 pre valve closed
2/21/2011	11:08:19 AM	SiCl4 post valve closed
2/21/2011	11:08:19 AM	Main Vac valve closed
2/21/2011	11:08:19 AM	Bypass valve closed
2/21/2011	11:08:19 AM	Bubbler valve closed
2/21/2011	11:08:19 AM	Helium valve opened
2/21/2011	11:08:19 AM	Helium MFC set to  500.000000
2/21/2011	11:08:19 AM	H2 MFC set to  0.000000
2/21/2011	11:08:19 AM	BCl3 MFC set to  0.000000
2/21/2011	11:08:19 AM	PHl3 MFC set to  0.000000
2/21/2011	11:08:19 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:08:19 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:08:19 AM	Tube furnace set to 0
2/21/2011	11:09:35 AM	Helium valve closed
2/21/2011	11:09:35 AM	H2 valve closed
2/21/2011	11:09:35 AM	BCl3 valve closed
2/21/2011	11:09:35 AM	PH3 valve closed
2/21/2011	11:09:35 AM	SiCl4 pre valve closed
2/21/2011	11:09:35 AM	SiCl4 post valve closed
2/21/2011	11:09:35 AM	Main Vac valve closed
2/21/2011	11:09:35 AM	Bypass valve closed
2/21/2011	11:09:35 AM	Bubbler valve closed
2/21/2011	11:09:35 AM	Helium MFC set to  0.000000
2/21/2011	11:09:35 AM	H2 MFC set to  0.000000
2/21/2011	11:09:35 AM	BCl3 MFC set to  0.000000
2/21/2011	11:09:35 AM	PHl3 MFC set to  0.000000
2/21/2011	11:09:35 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:09:35 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:09:35 AM	Tube furnace set to 0
2/21/2011	11:09:36 AM	Run finished at 11:09 AM
2/21/2011	11:09:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	11:20:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	11:20:42 AM	Recipe started at 11:20 AM
2/21/2011	11:20:43 AM	Helium valve closed
2/21/2011	11:20:43 AM	H2 valve closed
2/21/2011	11:20:43 AM	BCl3 valve closed
2/21/2011	11:20:43 AM	PH3 valve closed
2/21/2011	11:20:43 AM	SiCl4 pre valve closed
2/21/2011	11:20:43 AM	SiCl4 post valve closed
2/21/2011	11:20:43 AM	Main Vac valve closed
2/21/2011	11:20:43 AM	Bubbler valve closed
2/21/2011	11:20:43 AM	Bypass valve opened
2/21/2011	11:20:43 AM	Helium MFC set to  0.000000
2/21/2011	11:20:43 AM	H2 MFC set to  0.000000
2/21/2011	11:20:43 AM	BCl3 MFC set to  0.000000
2/21/2011	11:20:43 AM	PHl3 MFC set to  0.000000
2/21/2011	11:20:43 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:20:43 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:20:43 AM	Tube furnace set to 0
2/21/2011	11:21:13 AM	Helium valve closed
2/21/2011	11:21:13 AM	H2 valve closed
2/21/2011	11:21:13 AM	BCl3 valve closed
2/21/2011	11:21:13 AM	PH3 valve closed
2/21/2011	11:21:13 AM	SiCl4 pre valve closed
2/21/2011	11:21:13 AM	SiCl4 post valve closed
2/21/2011	11:21:13 AM	Bubbler valve closed
2/21/2011	11:21:13 AM	Main Vac valve opened
2/21/2011	11:21:13 AM	Bypass valve opened
2/21/2011	11:21:13 AM	Helium MFC set to  0.000000
2/21/2011	11:21:13 AM	H2 MFC set to  0.000000
2/21/2011	11:21:13 AM	BCl3 MFC set to  0.000000
2/21/2011	11:21:13 AM	PHl3 MFC set to  0.000000
2/21/2011	11:21:13 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:21:13 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:21:14 AM	Tube furnace set to 0
2/21/2011	11:21:14 AM	Run finished at 11:21 AM
2/21/2011	11:21:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	11:21:32 AM	Bypass valve closed
2/21/2011	11:21:32 AM	Main Vac valve closed
2/21/2011	11:21:41 AM	Bypass valve opened
2/21/2011	11:21:41 AM	Main Vac valve opened
2/21/2011	11:21:48 AM	Helium MFC set to  500.000000
2/21/2011	11:21:50 AM	Helium valve opened
2/21/2011	11:21:55 AM	Helium valve closed
2/21/2011	11:22:05 AM	Helium valve opened
2/21/2011	11:22:17 AM	Helium valve closed
2/21/2011	11:22:39 AM	Helium valve opened
2/21/2011	11:22:47 AM	Helium valve closed
2/21/2011	11:23:37 AM	Bypass valve closed
2/21/2011	11:23:38 AM	Main Vac valve closed
2/21/2011	11:23:47 AM	Main Vac valve opened
2/21/2011	11:23:48 AM	Bypass valve opened
2/21/2011	11:23:53 AM	Bypass valve closed
2/21/2011	11:23:54 AM	Main Vac valve closed
2/21/2011	11:23:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	11:23:57 AM	Recipe started at 11:23 AM
2/21/2011	11:23:57 AM	H2 valve closed
2/21/2011	11:23:57 AM	BCl3 valve closed
2/21/2011	11:23:57 AM	PH3 valve closed
2/21/2011	11:23:57 AM	SiCl4 pre valve closed
2/21/2011	11:23:57 AM	SiCl4 post valve closed
2/21/2011	11:23:57 AM	Main Vac valve closed
2/21/2011	11:23:57 AM	Bypass valve closed
2/21/2011	11:23:57 AM	Bubbler valve closed
2/21/2011	11:23:57 AM	Helium valve opened
2/21/2011	11:23:57 AM	Helium MFC set to  500.000000
2/21/2011	11:23:57 AM	H2 MFC set to  0.000000
2/21/2011	11:23:57 AM	BCl3 MFC set to  0.000000
2/21/2011	11:23:57 AM	PHl3 MFC set to  0.000000
2/21/2011	11:23:57 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:23:57 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:23:57 AM	Tube furnace set to 0
2/21/2011	11:25:15 AM	Helium valve closed
2/21/2011	11:25:15 AM	H2 valve closed
2/21/2011	11:25:15 AM	BCl3 valve closed
2/21/2011	11:25:15 AM	PH3 valve closed
2/21/2011	11:25:15 AM	SiCl4 pre valve closed
2/21/2011	11:25:15 AM	SiCl4 post valve closed
2/21/2011	11:25:15 AM	Main Vac valve closed
2/21/2011	11:25:15 AM	Bypass valve closed
2/21/2011	11:25:15 AM	Bubbler valve closed
2/21/2011	11:25:15 AM	Helium MFC set to  0.000000
2/21/2011	11:25:15 AM	H2 MFC set to  0.000000
2/21/2011	11:25:15 AM	BCl3 MFC set to  0.000000
2/21/2011	11:25:15 AM	PHl3 MFC set to  0.000000
2/21/2011	11:25:15 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:25:15 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:25:15 AM	Tube furnace set to 0
2/21/2011	11:25:16 AM	Run finished at 11:25 AM
2/21/2011	11:25:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	11:25:18 AM	SiCl4 post valve opened
2/21/2011	11:25:18 AM	SiCl4 post valve closed
2/21/2011	11:25:20 AM	SiCl4 post valve opened
2/21/2011	11:25:20 AM	SiCl4 post valve closed
2/21/2011	11:25:29 AM	Helium MFC set to  500.000000
2/21/2011	11:25:30 AM	Helium valve opened
2/21/2011	11:25:34 AM	Helium valve closed
2/21/2011	11:25:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	11:25:36 AM	Recipe started at 11:25 AM
2/21/2011	11:25:36 AM	H2 valve closed
2/21/2011	11:25:36 AM	BCl3 valve closed
2/21/2011	11:25:36 AM	PH3 valve closed
2/21/2011	11:25:36 AM	SiCl4 pre valve closed
2/21/2011	11:25:36 AM	SiCl4 post valve closed
2/21/2011	11:25:36 AM	Main Vac valve closed
2/21/2011	11:25:36 AM	Bypass valve closed
2/21/2011	11:25:36 AM	Bubbler valve closed
2/21/2011	11:25:36 AM	Helium valve opened
2/21/2011	11:25:36 AM	Helium MFC set to  500.000000
2/21/2011	11:25:36 AM	H2 MFC set to  0.000000
2/21/2011	11:25:36 AM	BCl3 MFC set to  0.000000
2/21/2011	11:25:36 AM	PHl3 MFC set to  0.000000
2/21/2011	11:25:36 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:25:36 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:25:36 AM	Tube furnace set to 0
2/21/2011	11:25:37 AM	Helium valve closed
2/21/2011	11:25:37 AM	H2 valve closed
2/21/2011	11:25:37 AM	BCl3 valve closed
2/21/2011	11:25:37 AM	PH3 valve closed
2/21/2011	11:25:37 AM	SiCl4 pre valve closed
2/21/2011	11:25:37 AM	SiCl4 post valve closed
2/21/2011	11:25:37 AM	Main Vac valve closed
2/21/2011	11:25:37 AM	Bypass valve closed
2/21/2011	11:25:37 AM	Bubbler valve closed
2/21/2011	11:25:37 AM	Helium MFC set to  0.000000
2/21/2011	11:25:37 AM	H2 MFC set to  0.000000
2/21/2011	11:25:37 AM	BCl3 MFC set to  0.000000
2/21/2011	11:25:37 AM	PHl3 MFC set to  0.000000
2/21/2011	11:25:37 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:25:37 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:25:37 AM	Tube furnace set to 0
2/21/2011	11:25:38 AM	Run finished at 11:25 AM
2/21/2011	11:25:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	11:25:40 AM	SiCl4 post valve opened
2/21/2011	11:25:40 AM	SiCl4 post valve closed
2/21/2011	11:25:45 AM	SiCl4 post valve opened
2/21/2011	11:25:46 AM	SiCl4 post valve closed
2/21/2011	11:25:51 AM	Helium MFC set to  500.000000
2/21/2011	11:26:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	11:26:01 AM	Recipe started at 11:26 AM
2/21/2011	11:26:01 AM	H2 valve closed
2/21/2011	11:26:01 AM	BCl3 valve closed
2/21/2011	11:26:01 AM	PH3 valve closed
2/21/2011	11:26:01 AM	SiCl4 pre valve closed
2/21/2011	11:26:01 AM	SiCl4 post valve closed
2/21/2011	11:26:01 AM	Main Vac valve closed
2/21/2011	11:26:01 AM	Bypass valve closed
2/21/2011	11:26:01 AM	Bubbler valve closed
2/21/2011	11:26:01 AM	Helium valve opened
2/21/2011	11:26:01 AM	Helium MFC set to  500.000000
2/21/2011	11:26:01 AM	H2 MFC set to  0.000000
2/21/2011	11:26:01 AM	BCl3 MFC set to  0.000000
2/21/2011	11:26:01 AM	PHl3 MFC set to  0.000000
2/21/2011	11:26:01 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:26:01 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:26:01 AM	Tube furnace set to 0
2/21/2011	11:26:04 AM	Helium valve closed
2/21/2011	11:26:04 AM	H2 valve closed
2/21/2011	11:26:04 AM	BCl3 valve closed
2/21/2011	11:26:04 AM	PH3 valve closed
2/21/2011	11:26:04 AM	SiCl4 pre valve closed
2/21/2011	11:26:04 AM	SiCl4 post valve closed
2/21/2011	11:26:04 AM	Main Vac valve closed
2/21/2011	11:26:04 AM	Bypass valve closed
2/21/2011	11:26:04 AM	Bubbler valve closed
2/21/2011	11:26:04 AM	Helium MFC set to  0.000000
2/21/2011	11:26:04 AM	H2 MFC set to  0.000000
2/21/2011	11:26:04 AM	BCl3 MFC set to  0.000000
2/21/2011	11:26:04 AM	PHl3 MFC set to  0.000000
2/21/2011	11:26:04 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:26:04 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:26:04 AM	Tube furnace set to 0
2/21/2011	11:26:04 AM	Run finished at 11:26 AM
2/21/2011	11:26:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	11:26:05 AM	SiCl4 post valve opened
2/21/2011	11:26:07 AM	SiCl4 post valve closed
2/21/2011	11:26:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	11:26:34 AM	Recipe started at 11:26 AM
2/21/2011	11:26:34 AM	Helium valve closed
2/21/2011	11:26:34 AM	H2 valve closed
2/21/2011	11:26:34 AM	BCl3 valve closed
2/21/2011	11:26:34 AM	PH3 valve closed
2/21/2011	11:26:34 AM	SiCl4 pre valve closed
2/21/2011	11:26:34 AM	SiCl4 post valve closed
2/21/2011	11:26:34 AM	Main Vac valve closed
2/21/2011	11:26:34 AM	Bubbler valve closed
2/21/2011	11:26:34 AM	Bypass valve opened
2/21/2011	11:26:34 AM	Helium MFC set to  0.000000
2/21/2011	11:26:34 AM	H2 MFC set to  0.000000
2/21/2011	11:26:34 AM	BCl3 MFC set to  0.000000
2/21/2011	11:26:34 AM	PHl3 MFC set to  0.000000
2/21/2011	11:26:34 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:26:34 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:26:34 AM	Tube furnace set to 0
2/21/2011	11:26:56 AM	Helium valve closed
2/21/2011	11:26:56 AM	H2 valve closed
2/21/2011	11:26:56 AM	BCl3 valve closed
2/21/2011	11:26:56 AM	PH3 valve closed
2/21/2011	11:26:56 AM	SiCl4 pre valve closed
2/21/2011	11:26:56 AM	SiCl4 post valve closed
2/21/2011	11:26:56 AM	Bubbler valve closed
2/21/2011	11:26:56 AM	Main Vac valve opened
2/21/2011	11:26:56 AM	Bypass valve opened
2/21/2011	11:26:56 AM	Helium MFC set to  0.000000
2/21/2011	11:26:56 AM	H2 MFC set to  0.000000
2/21/2011	11:26:56 AM	BCl3 MFC set to  0.000000
2/21/2011	11:26:56 AM	PHl3 MFC set to  0.000000
2/21/2011	11:26:56 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:26:56 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:26:56 AM	Tube furnace set to 0
2/21/2011	11:26:57 AM	Run finished at 11:26 AM
2/21/2011	11:26:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	11:27:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	11:28:04 AM	Recipe started at 11:27 AM
2/21/2011	11:28:04 AM	Helium valve closed
2/21/2011	11:28:04 AM	H2 valve closed
2/21/2011	11:28:04 AM	BCl3 valve closed
2/21/2011	11:28:04 AM	PH3 valve closed
2/21/2011	11:28:04 AM	SiCl4 pre valve closed
2/21/2011	11:28:04 AM	SiCl4 post valve closed
2/21/2011	11:28:04 AM	Main Vac valve closed
2/21/2011	11:28:04 AM	Bubbler valve closed
2/21/2011	11:28:04 AM	Bypass valve opened
2/21/2011	11:28:04 AM	Helium MFC set to  0.000000
2/21/2011	11:28:04 AM	H2 MFC set to  0.000000
2/21/2011	11:28:04 AM	BCl3 MFC set to  0.000000
2/21/2011	11:28:04 AM	PHl3 MFC set to  0.000000
2/21/2011	11:28:04 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:28:04 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:28:04 AM	Tube furnace set to 0
2/21/2011	11:28:05 AM	Helium valve closed
2/21/2011	11:28:05 AM	H2 valve closed
2/21/2011	11:28:05 AM	BCl3 valve closed
2/21/2011	11:28:05 AM	PH3 valve closed
2/21/2011	11:28:05 AM	SiCl4 pre valve closed
2/21/2011	11:28:05 AM	SiCl4 post valve closed
2/21/2011	11:28:05 AM	Bubbler valve closed
2/21/2011	11:28:05 AM	Main Vac valve opened
2/21/2011	11:28:05 AM	Bypass valve opened
2/21/2011	11:28:05 AM	Helium MFC set to  0.000000
2/21/2011	11:28:05 AM	H2 MFC set to  0.000000
2/21/2011	11:28:05 AM	BCl3 MFC set to  0.000000
2/21/2011	11:28:05 AM	PHl3 MFC set to  0.000000
2/21/2011	11:28:05 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:28:05 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:28:05 AM	Tube furnace set to 0
2/21/2011	11:29:05 AM	H2 valve closed
2/21/2011	11:29:05 AM	BCl3 valve closed
2/21/2011	11:29:05 AM	PH3 valve closed
2/21/2011	11:29:05 AM	SiCl4 pre valve closed
2/21/2011	11:29:05 AM	SiCl4 post valve closed
2/21/2011	11:29:05 AM	Bubbler valve closed
2/21/2011	11:29:05 AM	Helium valve opened
2/21/2011	11:29:05 AM	Main Vac valve opened
2/21/2011	11:29:05 AM	Bypass valve opened
2/21/2011	11:29:05 AM	Helium MFC set to  100.000000
2/21/2011	11:29:05 AM	H2 MFC set to  0.000000
2/21/2011	11:29:05 AM	BCl3 MFC set to  0.000000
2/21/2011	11:29:05 AM	PHl3 MFC set to  0.000000
2/21/2011	11:29:05 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:29:05 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:29:05 AM	Tube furnace set to 0
2/21/2011	11:30:05 AM	Helium valve closed
2/21/2011	11:30:05 AM	H2 valve closed
2/21/2011	11:30:05 AM	BCl3 valve closed
2/21/2011	11:30:05 AM	PH3 valve closed
2/21/2011	11:30:05 AM	SiCl4 pre valve closed
2/21/2011	11:30:05 AM	SiCl4 post valve closed
2/21/2011	11:30:05 AM	Bubbler valve closed
2/21/2011	11:30:05 AM	Main Vac valve opened
2/21/2011	11:30:05 AM	Bypass valve opened
2/21/2011	11:30:05 AM	Helium MFC set to  0.000000
2/21/2011	11:30:05 AM	H2 MFC set to  0.000000
2/21/2011	11:30:05 AM	BCl3 MFC set to  0.000000
2/21/2011	11:30:05 AM	PHl3 MFC set to  0.000000
2/21/2011	11:30:05 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:30:05 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:30:05 AM	Tube furnace set to 0
2/21/2011	11:31:05 AM	H2 valve closed
2/21/2011	11:31:05 AM	BCl3 valve closed
2/21/2011	11:31:05 AM	PH3 valve closed
2/21/2011	11:31:05 AM	SiCl4 pre valve closed
2/21/2011	11:31:05 AM	SiCl4 post valve closed
2/21/2011	11:31:05 AM	Bubbler valve closed
2/21/2011	11:31:05 AM	Helium valve opened
2/21/2011	11:31:05 AM	Main Vac valve opened
2/21/2011	11:31:05 AM	Bypass valve opened
2/21/2011	11:31:05 AM	Helium MFC set to  100.000000
2/21/2011	11:31:05 AM	H2 MFC set to  0.000000
2/21/2011	11:31:05 AM	BCl3 MFC set to  0.000000
2/21/2011	11:31:05 AM	PHl3 MFC set to  0.000000
2/21/2011	11:31:05 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:31:05 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:31:05 AM	Tube furnace set to 0
2/21/2011	11:32:05 AM	Helium valve closed
2/21/2011	11:32:05 AM	H2 valve closed
2/21/2011	11:32:05 AM	BCl3 valve closed
2/21/2011	11:32:05 AM	PH3 valve closed
2/21/2011	11:32:05 AM	SiCl4 pre valve closed
2/21/2011	11:32:05 AM	SiCl4 post valve closed
2/21/2011	11:32:05 AM	Bubbler valve closed
2/21/2011	11:32:05 AM	Main Vac valve opened
2/21/2011	11:32:05 AM	Bypass valve opened
2/21/2011	11:32:05 AM	Helium MFC set to  0.000000
2/21/2011	11:32:05 AM	H2 MFC set to  0.000000
2/21/2011	11:32:05 AM	BCl3 MFC set to  0.000000
2/21/2011	11:32:05 AM	PHl3 MFC set to  0.000000
2/21/2011	11:32:05 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:32:05 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:32:06 AM	Tube furnace set to 0
2/21/2011	11:33:06 AM	H2 valve closed
2/21/2011	11:33:06 AM	BCl3 valve closed
2/21/2011	11:33:06 AM	PH3 valve closed
2/21/2011	11:33:06 AM	SiCl4 pre valve closed
2/21/2011	11:33:06 AM	SiCl4 post valve closed
2/21/2011	11:33:06 AM	Bubbler valve closed
2/21/2011	11:33:06 AM	Helium valve opened
2/21/2011	11:33:06 AM	Main Vac valve opened
2/21/2011	11:33:06 AM	Bypass valve opened
2/21/2011	11:33:06 AM	Helium MFC set to  100.000000
2/21/2011	11:33:06 AM	H2 MFC set to  0.000000
2/21/2011	11:33:06 AM	BCl3 MFC set to  0.000000
2/21/2011	11:33:06 AM	PHl3 MFC set to  0.000000
2/21/2011	11:33:06 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:33:06 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:33:06 AM	Tube furnace set to 0
2/21/2011	11:34:06 AM	Helium valve closed
2/21/2011	11:34:06 AM	H2 valve closed
2/21/2011	11:34:06 AM	BCl3 valve closed
2/21/2011	11:34:06 AM	PH3 valve closed
2/21/2011	11:34:06 AM	SiCl4 pre valve closed
2/21/2011	11:34:06 AM	SiCl4 post valve closed
2/21/2011	11:34:06 AM	Bubbler valve closed
2/21/2011	11:34:06 AM	Main Vac valve opened
2/21/2011	11:34:06 AM	Bypass valve opened
2/21/2011	11:34:06 AM	Helium MFC set to  0.000000
2/21/2011	11:34:06 AM	H2 MFC set to  0.000000
2/21/2011	11:34:06 AM	BCl3 MFC set to  0.000000
2/21/2011	11:34:06 AM	PHl3 MFC set to  0.000000
2/21/2011	11:34:06 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:34:06 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:34:06 AM	Tube furnace set to 0
2/21/2011	11:35:06 AM	H2 valve closed
2/21/2011	11:35:06 AM	BCl3 valve closed
2/21/2011	11:35:06 AM	PH3 valve closed
2/21/2011	11:35:06 AM	SiCl4 pre valve closed
2/21/2011	11:35:06 AM	SiCl4 post valve closed
2/21/2011	11:35:06 AM	Bubbler valve closed
2/21/2011	11:35:06 AM	Helium valve opened
2/21/2011	11:35:06 AM	Main Vac valve opened
2/21/2011	11:35:06 AM	Bypass valve opened
2/21/2011	11:35:06 AM	Helium MFC set to  100.000000
2/21/2011	11:35:06 AM	H2 MFC set to  0.000000
2/21/2011	11:35:06 AM	BCl3 MFC set to  0.000000
2/21/2011	11:35:06 AM	PHl3 MFC set to  0.000000
2/21/2011	11:35:06 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:35:06 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:35:06 AM	Tube furnace set to 0
2/21/2011	11:36:06 AM	Helium valve closed
2/21/2011	11:36:06 AM	H2 valve closed
2/21/2011	11:36:06 AM	BCl3 valve closed
2/21/2011	11:36:06 AM	PH3 valve closed
2/21/2011	11:36:06 AM	SiCl4 pre valve closed
2/21/2011	11:36:06 AM	SiCl4 post valve closed
2/21/2011	11:36:06 AM	Bubbler valve closed
2/21/2011	11:36:06 AM	Main Vac valve opened
2/21/2011	11:36:06 AM	Bypass valve opened
2/21/2011	11:36:06 AM	Helium MFC set to  0.000000
2/21/2011	11:36:06 AM	H2 MFC set to  0.000000
2/21/2011	11:36:06 AM	BCl3 MFC set to  0.000000
2/21/2011	11:36:06 AM	PHl3 MFC set to  0.000000
2/21/2011	11:36:06 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:36:06 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:36:06 AM	Tube furnace set to 0
2/21/2011	11:37:06 AM	H2 valve closed
2/21/2011	11:37:06 AM	BCl3 valve closed
2/21/2011	11:37:06 AM	PH3 valve closed
2/21/2011	11:37:06 AM	SiCl4 pre valve closed
2/21/2011	11:37:06 AM	SiCl4 post valve closed
2/21/2011	11:37:06 AM	Bubbler valve closed
2/21/2011	11:37:06 AM	Helium valve opened
2/21/2011	11:37:06 AM	Main Vac valve opened
2/21/2011	11:37:06 AM	Bypass valve opened
2/21/2011	11:37:06 AM	Helium MFC set to  100.000000
2/21/2011	11:37:06 AM	H2 MFC set to  0.000000
2/21/2011	11:37:06 AM	BCl3 MFC set to  0.000000
2/21/2011	11:37:06 AM	PHl3 MFC set to  0.000000
2/21/2011	11:37:06 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:37:06 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:37:07 AM	Tube furnace set to 0
2/21/2011	11:38:07 AM	Helium valve closed
2/21/2011	11:38:07 AM	H2 valve closed
2/21/2011	11:38:07 AM	BCl3 valve closed
2/21/2011	11:38:07 AM	PH3 valve closed
2/21/2011	11:38:07 AM	SiCl4 pre valve closed
2/21/2011	11:38:07 AM	SiCl4 post valve closed
2/21/2011	11:38:07 AM	Bubbler valve closed
2/21/2011	11:38:07 AM	Main Vac valve opened
2/21/2011	11:38:07 AM	Bypass valve opened
2/21/2011	11:38:07 AM	Helium MFC set to  0.000000
2/21/2011	11:38:07 AM	H2 MFC set to  0.000000
2/21/2011	11:38:07 AM	BCl3 MFC set to  0.000000
2/21/2011	11:38:07 AM	PHl3 MFC set to  0.000000
2/21/2011	11:38:07 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:38:07 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:38:07 AM	Tube furnace set to 0
2/21/2011	11:39:07 AM	H2 valve closed
2/21/2011	11:39:07 AM	BCl3 valve closed
2/21/2011	11:39:07 AM	PH3 valve closed
2/21/2011	11:39:07 AM	SiCl4 pre valve closed
2/21/2011	11:39:07 AM	SiCl4 post valve closed
2/21/2011	11:39:07 AM	Bubbler valve closed
2/21/2011	11:39:07 AM	Helium valve opened
2/21/2011	11:39:07 AM	Main Vac valve opened
2/21/2011	11:39:07 AM	Bypass valve opened
2/21/2011	11:39:07 AM	Helium MFC set to  100.000000
2/21/2011	11:39:07 AM	H2 MFC set to  0.000000
2/21/2011	11:39:07 AM	BCl3 MFC set to  0.000000
2/21/2011	11:39:07 AM	PHl3 MFC set to  0.000000
2/21/2011	11:39:07 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:39:07 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:39:07 AM	Tube furnace set to 0
2/21/2011	11:40:07 AM	Helium valve closed
2/21/2011	11:40:07 AM	H2 valve closed
2/21/2011	11:40:07 AM	BCl3 valve closed
2/21/2011	11:40:07 AM	PH3 valve closed
2/21/2011	11:40:07 AM	SiCl4 pre valve closed
2/21/2011	11:40:07 AM	SiCl4 post valve closed
2/21/2011	11:40:07 AM	Bubbler valve closed
2/21/2011	11:40:07 AM	Main Vac valve opened
2/21/2011	11:40:07 AM	Bypass valve opened
2/21/2011	11:40:07 AM	Helium MFC set to  0.000000
2/21/2011	11:40:07 AM	H2 MFC set to  0.000000
2/21/2011	11:40:07 AM	BCl3 MFC set to  0.000000
2/21/2011	11:40:07 AM	PHl3 MFC set to  0.000000
2/21/2011	11:40:07 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:40:07 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:40:07 AM	Tube furnace set to 0
2/21/2011	11:41:07 AM	H2 valve closed
2/21/2011	11:41:07 AM	BCl3 valve closed
2/21/2011	11:41:07 AM	PH3 valve closed
2/21/2011	11:41:07 AM	SiCl4 pre valve closed
2/21/2011	11:41:07 AM	SiCl4 post valve closed
2/21/2011	11:41:07 AM	Bubbler valve closed
2/21/2011	11:41:07 AM	Helium valve opened
2/21/2011	11:41:07 AM	Main Vac valve opened
2/21/2011	11:41:07 AM	Bypass valve opened
2/21/2011	11:41:07 AM	Helium MFC set to  100.000000
2/21/2011	11:41:07 AM	H2 MFC set to  0.000000
2/21/2011	11:41:07 AM	BCl3 MFC set to  0.000000
2/21/2011	11:41:07 AM	PHl3 MFC set to  0.000000
2/21/2011	11:41:07 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:41:07 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:41:07 AM	Tube furnace set to 0
2/21/2011	11:42:07 AM	Helium valve closed
2/21/2011	11:42:07 AM	H2 valve closed
2/21/2011	11:42:07 AM	BCl3 valve closed
2/21/2011	11:42:07 AM	PH3 valve closed
2/21/2011	11:42:07 AM	SiCl4 pre valve closed
2/21/2011	11:42:07 AM	SiCl4 post valve closed
2/21/2011	11:42:07 AM	Bubbler valve closed
2/21/2011	11:42:07 AM	Main Vac valve opened
2/21/2011	11:42:07 AM	Bypass valve opened
2/21/2011	11:42:07 AM	Helium MFC set to  0.000000
2/21/2011	11:42:07 AM	H2 MFC set to  0.000000
2/21/2011	11:42:07 AM	BCl3 MFC set to  0.000000
2/21/2011	11:42:07 AM	PHl3 MFC set to  0.000000
2/21/2011	11:42:07 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:42:07 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:42:08 AM	Tube furnace set to 0
2/21/2011	11:43:08 AM	H2 valve closed
2/21/2011	11:43:08 AM	BCl3 valve closed
2/21/2011	11:43:08 AM	PH3 valve closed
2/21/2011	11:43:08 AM	SiCl4 pre valve closed
2/21/2011	11:43:08 AM	SiCl4 post valve closed
2/21/2011	11:43:08 AM	Bubbler valve closed
2/21/2011	11:43:08 AM	Helium valve opened
2/21/2011	11:43:08 AM	Main Vac valve opened
2/21/2011	11:43:08 AM	Bypass valve opened
2/21/2011	11:43:08 AM	Helium MFC set to  100.000000
2/21/2011	11:43:08 AM	H2 MFC set to  0.000000
2/21/2011	11:43:08 AM	BCl3 MFC set to  0.000000
2/21/2011	11:43:08 AM	PHl3 MFC set to  0.000000
2/21/2011	11:43:08 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:43:08 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:43:08 AM	Tube furnace set to 0
2/21/2011	11:44:08 AM	Helium valve closed
2/21/2011	11:44:08 AM	H2 valve closed
2/21/2011	11:44:08 AM	BCl3 valve closed
2/21/2011	11:44:08 AM	PH3 valve closed
2/21/2011	11:44:08 AM	SiCl4 pre valve closed
2/21/2011	11:44:08 AM	SiCl4 post valve closed
2/21/2011	11:44:08 AM	Bubbler valve closed
2/21/2011	11:44:08 AM	Main Vac valve opened
2/21/2011	11:44:08 AM	Bypass valve opened
2/21/2011	11:44:08 AM	Helium MFC set to  0.000000
2/21/2011	11:44:08 AM	H2 MFC set to  0.000000
2/21/2011	11:44:08 AM	BCl3 MFC set to  0.000000
2/21/2011	11:44:08 AM	PHl3 MFC set to  0.000000
2/21/2011	11:44:08 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:44:08 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:44:08 AM	Tube furnace set to 0
2/21/2011	11:45:08 AM	H2 valve closed
2/21/2011	11:45:08 AM	BCl3 valve closed
2/21/2011	11:45:08 AM	PH3 valve closed
2/21/2011	11:45:08 AM	SiCl4 pre valve closed
2/21/2011	11:45:08 AM	SiCl4 post valve closed
2/21/2011	11:45:08 AM	Bubbler valve closed
2/21/2011	11:45:08 AM	Helium valve opened
2/21/2011	11:45:08 AM	Main Vac valve opened
2/21/2011	11:45:08 AM	Bypass valve opened
2/21/2011	11:45:08 AM	Helium MFC set to  100.000000
2/21/2011	11:45:08 AM	H2 MFC set to  0.000000
2/21/2011	11:45:08 AM	BCl3 MFC set to  0.000000
2/21/2011	11:45:08 AM	PHl3 MFC set to  0.000000
2/21/2011	11:45:08 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:45:08 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:45:08 AM	Tube furnace set to 0
2/21/2011	11:46:08 AM	Helium valve closed
2/21/2011	11:46:08 AM	H2 valve closed
2/21/2011	11:46:08 AM	BCl3 valve closed
2/21/2011	11:46:08 AM	PH3 valve closed
2/21/2011	11:46:08 AM	SiCl4 pre valve closed
2/21/2011	11:46:08 AM	SiCl4 post valve closed
2/21/2011	11:46:08 AM	Bubbler valve closed
2/21/2011	11:46:08 AM	Main Vac valve opened
2/21/2011	11:46:08 AM	Bypass valve opened
2/21/2011	11:46:08 AM	Helium MFC set to  0.000000
2/21/2011	11:46:08 AM	H2 MFC set to  0.000000
2/21/2011	11:46:08 AM	BCl3 MFC set to  0.000000
2/21/2011	11:46:08 AM	PHl3 MFC set to  0.000000
2/21/2011	11:46:08 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:46:08 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:46:08 AM	Tube furnace set to 0
2/21/2011	11:47:08 AM	H2 valve closed
2/21/2011	11:47:08 AM	BCl3 valve closed
2/21/2011	11:47:08 AM	PH3 valve closed
2/21/2011	11:47:08 AM	SiCl4 pre valve closed
2/21/2011	11:47:08 AM	SiCl4 post valve closed
2/21/2011	11:47:08 AM	Bubbler valve closed
2/21/2011	11:47:08 AM	Helium valve opened
2/21/2011	11:47:08 AM	Main Vac valve opened
2/21/2011	11:47:08 AM	Bypass valve opened
2/21/2011	11:47:08 AM	Helium MFC set to  100.000000
2/21/2011	11:47:08 AM	H2 MFC set to  0.000000
2/21/2011	11:47:08 AM	BCl3 MFC set to  0.000000
2/21/2011	11:47:08 AM	PHl3 MFC set to  0.000000
2/21/2011	11:47:08 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:47:08 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:47:09 AM	Tube furnace set to 0
2/21/2011	11:48:09 AM	Helium valve closed
2/21/2011	11:48:09 AM	H2 valve closed
2/21/2011	11:48:09 AM	BCl3 valve closed
2/21/2011	11:48:09 AM	PH3 valve closed
2/21/2011	11:48:09 AM	SiCl4 pre valve closed
2/21/2011	11:48:09 AM	SiCl4 post valve closed
2/21/2011	11:48:09 AM	Bubbler valve closed
2/21/2011	11:48:09 AM	Main Vac valve opened
2/21/2011	11:48:09 AM	Bypass valve opened
2/21/2011	11:48:09 AM	Helium MFC set to  0.000000
2/21/2011	11:48:09 AM	H2 MFC set to  0.000000
2/21/2011	11:48:09 AM	BCl3 MFC set to  0.000000
2/21/2011	11:48:09 AM	PHl3 MFC set to  0.000000
2/21/2011	11:48:09 AM	SiCl4 MFC set to  0.000000
2/21/2011	11:48:09 AM	Bypass solenoid MFC set to  0.000000
2/21/2011	11:48:09 AM	Tube furnace set to 0
2/21/2011	11:48:10 AM	Run finished at 11:48 AM
2/21/2011	11:48:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	11:53:17 AM	Bypass valve closed
2/21/2011	11:53:18 AM	Main Vac valve closed
2/21/2011	11:53:22 AM	Main Vac valve opened
2/21/2011	11:53:23 AM	Bypass valve opened
2/21/2011	12:06:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	12:06:43 PM	Recipe started at 12:06 PM
2/21/2011	12:06:43 PM	H2 valve closed
2/21/2011	12:06:43 PM	BCl3 valve closed
2/21/2011	12:06:43 PM	PH3 valve closed
2/21/2011	12:06:43 PM	SiCl4 pre valve closed
2/21/2011	12:06:43 PM	SiCl4 post valve closed
2/21/2011	12:06:43 PM	Main Vac valve closed
2/21/2011	12:06:43 PM	Bypass valve closed
2/21/2011	12:06:43 PM	Bubbler valve closed
2/21/2011	12:06:43 PM	Helium valve opened
2/21/2011	12:06:43 PM	Helium MFC set to  500.000000
2/21/2011	12:06:43 PM	H2 MFC set to  0.000000
2/21/2011	12:06:43 PM	BCl3 MFC set to  0.000000
2/21/2011	12:06:43 PM	PHl3 MFC set to  0.000000
2/21/2011	12:06:43 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:06:43 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:06:43 PM	Tube furnace set to 0
2/21/2011	12:08:00 PM	Helium valve closed
2/21/2011	12:08:00 PM	H2 valve closed
2/21/2011	12:08:00 PM	BCl3 valve closed
2/21/2011	12:08:00 PM	PH3 valve closed
2/21/2011	12:08:00 PM	SiCl4 pre valve closed
2/21/2011	12:08:00 PM	SiCl4 post valve closed
2/21/2011	12:08:00 PM	Main Vac valve closed
2/21/2011	12:08:00 PM	Bypass valve closed
2/21/2011	12:08:00 PM	Bubbler valve closed
2/21/2011	12:08:00 PM	Helium MFC set to  0.000000
2/21/2011	12:08:00 PM	H2 MFC set to  0.000000
2/21/2011	12:08:00 PM	BCl3 MFC set to  0.000000
2/21/2011	12:08:00 PM	PHl3 MFC set to  0.000000
2/21/2011	12:08:00 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:08:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:08:00 PM	Tube furnace set to 0
2/21/2011	12:08:00 PM	Run finished at 12:08 PM
2/21/2011	12:08:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	12:08:03 PM	SiCl4 post valve opened
2/21/2011	12:08:04 PM	SiCl4 post valve closed
2/21/2011	12:08:05 PM	SiCl4 post valve opened
2/21/2011	12:08:06 PM	SiCl4 post valve closed
2/21/2011	12:12:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	12:12:01 PM	Recipe started at 12:12 PM
2/21/2011	12:12:01 PM	Helium valve closed
2/21/2011	12:12:01 PM	H2 valve closed
2/21/2011	12:12:01 PM	BCl3 valve closed
2/21/2011	12:12:01 PM	PH3 valve closed
2/21/2011	12:12:01 PM	SiCl4 pre valve closed
2/21/2011	12:12:01 PM	SiCl4 post valve closed
2/21/2011	12:12:01 PM	Main Vac valve closed
2/21/2011	12:12:01 PM	Bubbler valve closed
2/21/2011	12:12:01 PM	Bypass valve opened
2/21/2011	12:12:01 PM	Helium MFC set to  0.000000
2/21/2011	12:12:01 PM	H2 MFC set to  0.000000
2/21/2011	12:12:01 PM	BCl3 MFC set to  0.000000
2/21/2011	12:12:01 PM	PHl3 MFC set to  0.000000
2/21/2011	12:12:01 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:12:01 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:12:01 PM	Tube furnace set to 0
2/21/2011	12:12:31 PM	Helium valve closed
2/21/2011	12:12:31 PM	H2 valve closed
2/21/2011	12:12:31 PM	BCl3 valve closed
2/21/2011	12:12:31 PM	PH3 valve closed
2/21/2011	12:12:31 PM	SiCl4 pre valve closed
2/21/2011	12:12:31 PM	SiCl4 post valve closed
2/21/2011	12:12:31 PM	Bubbler valve closed
2/21/2011	12:12:31 PM	Main Vac valve opened
2/21/2011	12:12:31 PM	Bypass valve opened
2/21/2011	12:12:31 PM	Helium MFC set to  0.000000
2/21/2011	12:12:31 PM	H2 MFC set to  0.000000
2/21/2011	12:12:31 PM	BCl3 MFC set to  0.000000
2/21/2011	12:12:31 PM	PHl3 MFC set to  0.000000
2/21/2011	12:12:31 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:12:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:12:31 PM	Tube furnace set to 0
2/21/2011	12:12:31 PM	Run finished at 12:12 PM
2/21/2011	12:12:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	12:12:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	12:12:58 PM	Recipe started at 12:12 PM
2/21/2011	12:12:58 PM	Helium valve closed
2/21/2011	12:12:58 PM	H2 valve closed
2/21/2011	12:12:58 PM	BCl3 valve closed
2/21/2011	12:12:58 PM	PH3 valve closed
2/21/2011	12:12:58 PM	SiCl4 pre valve closed
2/21/2011	12:12:58 PM	SiCl4 post valve closed
2/21/2011	12:12:58 PM	Main Vac valve closed
2/21/2011	12:12:58 PM	Bubbler valve closed
2/21/2011	12:12:58 PM	Bypass valve opened
2/21/2011	12:12:58 PM	Helium MFC set to  0.000000
2/21/2011	12:12:58 PM	H2 MFC set to  0.000000
2/21/2011	12:12:58 PM	BCl3 MFC set to  0.000000
2/21/2011	12:12:58 PM	PHl3 MFC set to  0.000000
2/21/2011	12:12:58 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:12:58 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:12:58 PM	Tube furnace set to 0
2/21/2011	12:12:58 PM	Helium valve closed
2/21/2011	12:12:58 PM	H2 valve closed
2/21/2011	12:12:58 PM	BCl3 valve closed
2/21/2011	12:12:58 PM	PH3 valve closed
2/21/2011	12:12:58 PM	SiCl4 pre valve closed
2/21/2011	12:12:58 PM	SiCl4 post valve closed
2/21/2011	12:12:58 PM	Bubbler valve closed
2/21/2011	12:12:58 PM	Main Vac valve opened
2/21/2011	12:12:58 PM	Bypass valve opened
2/21/2011	12:12:58 PM	Helium MFC set to  0.000000
2/21/2011	12:12:58 PM	H2 MFC set to  0.000000
2/21/2011	12:12:58 PM	BCl3 MFC set to  0.000000
2/21/2011	12:12:58 PM	PHl3 MFC set to  0.000000
2/21/2011	12:12:58 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:12:58 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:12:58 PM	Tube furnace set to 0
2/21/2011	12:13:58 PM	H2 valve closed
2/21/2011	12:13:58 PM	BCl3 valve closed
2/21/2011	12:13:58 PM	PH3 valve closed
2/21/2011	12:13:58 PM	SiCl4 pre valve closed
2/21/2011	12:13:58 PM	SiCl4 post valve closed
2/21/2011	12:13:58 PM	Bubbler valve closed
2/21/2011	12:13:58 PM	Helium valve opened
2/21/2011	12:13:58 PM	Main Vac valve opened
2/21/2011	12:13:58 PM	Bypass valve opened
2/21/2011	12:13:58 PM	Helium MFC set to  100.000000
2/21/2011	12:13:58 PM	H2 MFC set to  0.000000
2/21/2011	12:13:58 PM	BCl3 MFC set to  0.000000
2/21/2011	12:13:58 PM	PHl3 MFC set to  0.000000
2/21/2011	12:13:58 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:13:58 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:13:59 PM	Tube furnace set to 0
2/21/2011	12:14:59 PM	Helium valve closed
2/21/2011	12:14:59 PM	H2 valve closed
2/21/2011	12:14:59 PM	BCl3 valve closed
2/21/2011	12:14:59 PM	PH3 valve closed
2/21/2011	12:14:59 PM	SiCl4 pre valve closed
2/21/2011	12:14:59 PM	SiCl4 post valve closed
2/21/2011	12:14:59 PM	Bubbler valve closed
2/21/2011	12:14:59 PM	Main Vac valve opened
2/21/2011	12:14:59 PM	Bypass valve opened
2/21/2011	12:14:59 PM	Helium MFC set to  0.000000
2/21/2011	12:14:59 PM	H2 MFC set to  0.000000
2/21/2011	12:14:59 PM	BCl3 MFC set to  0.000000
2/21/2011	12:14:59 PM	PHl3 MFC set to  0.000000
2/21/2011	12:14:59 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:14:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:14:59 PM	Tube furnace set to 0
2/21/2011	12:15:59 PM	H2 valve closed
2/21/2011	12:15:59 PM	BCl3 valve closed
2/21/2011	12:15:59 PM	PH3 valve closed
2/21/2011	12:15:59 PM	SiCl4 pre valve closed
2/21/2011	12:15:59 PM	SiCl4 post valve closed
2/21/2011	12:15:59 PM	Bubbler valve closed
2/21/2011	12:15:59 PM	Helium valve opened
2/21/2011	12:15:59 PM	Main Vac valve opened
2/21/2011	12:15:59 PM	Bypass valve opened
2/21/2011	12:15:59 PM	Helium MFC set to  100.000000
2/21/2011	12:15:59 PM	H2 MFC set to  0.000000
2/21/2011	12:15:59 PM	BCl3 MFC set to  0.000000
2/21/2011	12:15:59 PM	PHl3 MFC set to  0.000000
2/21/2011	12:15:59 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:15:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:15:59 PM	Tube furnace set to 0
2/21/2011	12:16:59 PM	Helium valve closed
2/21/2011	12:16:59 PM	H2 valve closed
2/21/2011	12:16:59 PM	BCl3 valve closed
2/21/2011	12:16:59 PM	PH3 valve closed
2/21/2011	12:16:59 PM	SiCl4 pre valve closed
2/21/2011	12:16:59 PM	SiCl4 post valve closed
2/21/2011	12:16:59 PM	Bubbler valve closed
2/21/2011	12:16:59 PM	Main Vac valve opened
2/21/2011	12:16:59 PM	Bypass valve opened
2/21/2011	12:16:59 PM	Helium MFC set to  0.000000
2/21/2011	12:16:59 PM	H2 MFC set to  0.000000
2/21/2011	12:16:59 PM	BCl3 MFC set to  0.000000
2/21/2011	12:16:59 PM	PHl3 MFC set to  0.000000
2/21/2011	12:16:59 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:16:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:16:59 PM	Tube furnace set to 0
2/21/2011	12:17:59 PM	H2 valve closed
2/21/2011	12:17:59 PM	BCl3 valve closed
2/21/2011	12:17:59 PM	PH3 valve closed
2/21/2011	12:17:59 PM	SiCl4 pre valve closed
2/21/2011	12:17:59 PM	SiCl4 post valve closed
2/21/2011	12:17:59 PM	Bubbler valve closed
2/21/2011	12:17:59 PM	Helium valve opened
2/21/2011	12:17:59 PM	Main Vac valve opened
2/21/2011	12:17:59 PM	Bypass valve opened
2/21/2011	12:17:59 PM	Helium MFC set to  100.000000
2/21/2011	12:17:59 PM	H2 MFC set to  0.000000
2/21/2011	12:17:59 PM	BCl3 MFC set to  0.000000
2/21/2011	12:17:59 PM	PHl3 MFC set to  0.000000
2/21/2011	12:17:59 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:17:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:17:59 PM	Tube furnace set to 0
2/21/2011	12:18:59 PM	Helium valve closed
2/21/2011	12:18:59 PM	H2 valve closed
2/21/2011	12:18:59 PM	BCl3 valve closed
2/21/2011	12:18:59 PM	PH3 valve closed
2/21/2011	12:18:59 PM	SiCl4 pre valve closed
2/21/2011	12:18:59 PM	SiCl4 post valve closed
2/21/2011	12:18:59 PM	Bubbler valve closed
2/21/2011	12:18:59 PM	Main Vac valve opened
2/21/2011	12:18:59 PM	Bypass valve opened
2/21/2011	12:18:59 PM	Helium MFC set to  0.000000
2/21/2011	12:18:59 PM	H2 MFC set to  0.000000
2/21/2011	12:18:59 PM	BCl3 MFC set to  0.000000
2/21/2011	12:18:59 PM	PHl3 MFC set to  0.000000
2/21/2011	12:18:59 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:18:59 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:19:00 PM	Tube furnace set to 0
2/21/2011	12:20:00 PM	H2 valve closed
2/21/2011	12:20:00 PM	BCl3 valve closed
2/21/2011	12:20:00 PM	PH3 valve closed
2/21/2011	12:20:00 PM	SiCl4 pre valve closed
2/21/2011	12:20:00 PM	SiCl4 post valve closed
2/21/2011	12:20:00 PM	Bubbler valve closed
2/21/2011	12:20:00 PM	Helium valve opened
2/21/2011	12:20:00 PM	Main Vac valve opened
2/21/2011	12:20:00 PM	Bypass valve opened
2/21/2011	12:20:00 PM	Helium MFC set to  100.000000
2/21/2011	12:20:00 PM	H2 MFC set to  0.000000
2/21/2011	12:20:00 PM	BCl3 MFC set to  0.000000
2/21/2011	12:20:00 PM	PHl3 MFC set to  0.000000
2/21/2011	12:20:00 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:20:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:20:00 PM	Tube furnace set to 0
2/21/2011	12:21:00 PM	Helium valve closed
2/21/2011	12:21:00 PM	H2 valve closed
2/21/2011	12:21:00 PM	BCl3 valve closed
2/21/2011	12:21:00 PM	PH3 valve closed
2/21/2011	12:21:00 PM	SiCl4 pre valve closed
2/21/2011	12:21:00 PM	SiCl4 post valve closed
2/21/2011	12:21:00 PM	Bubbler valve closed
2/21/2011	12:21:00 PM	Main Vac valve opened
2/21/2011	12:21:00 PM	Bypass valve opened
2/21/2011	12:21:00 PM	Helium MFC set to  0.000000
2/21/2011	12:21:00 PM	H2 MFC set to  0.000000
2/21/2011	12:21:00 PM	BCl3 MFC set to  0.000000
2/21/2011	12:21:00 PM	PHl3 MFC set to  0.000000
2/21/2011	12:21:00 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:21:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:21:00 PM	Tube furnace set to 0
2/21/2011	12:22:00 PM	H2 valve closed
2/21/2011	12:22:00 PM	BCl3 valve closed
2/21/2011	12:22:00 PM	PH3 valve closed
2/21/2011	12:22:00 PM	SiCl4 pre valve closed
2/21/2011	12:22:00 PM	SiCl4 post valve closed
2/21/2011	12:22:00 PM	Bubbler valve closed
2/21/2011	12:22:00 PM	Helium valve opened
2/21/2011	12:22:00 PM	Main Vac valve opened
2/21/2011	12:22:00 PM	Bypass valve opened
2/21/2011	12:22:00 PM	Helium MFC set to  100.000000
2/21/2011	12:22:00 PM	H2 MFC set to  0.000000
2/21/2011	12:22:00 PM	BCl3 MFC set to  0.000000
2/21/2011	12:22:00 PM	PHl3 MFC set to  0.000000
2/21/2011	12:22:00 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:22:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:22:00 PM	Tube furnace set to 0
2/21/2011	12:23:00 PM	Helium valve closed
2/21/2011	12:23:00 PM	H2 valve closed
2/21/2011	12:23:00 PM	BCl3 valve closed
2/21/2011	12:23:00 PM	PH3 valve closed
2/21/2011	12:23:00 PM	SiCl4 pre valve closed
2/21/2011	12:23:00 PM	SiCl4 post valve closed
2/21/2011	12:23:00 PM	Bubbler valve closed
2/21/2011	12:23:00 PM	Main Vac valve opened
2/21/2011	12:23:00 PM	Bypass valve opened
2/21/2011	12:23:00 PM	Helium MFC set to  0.000000
2/21/2011	12:23:00 PM	H2 MFC set to  0.000000
2/21/2011	12:23:00 PM	BCl3 MFC set to  0.000000
2/21/2011	12:23:00 PM	PHl3 MFC set to  0.000000
2/21/2011	12:23:00 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:23:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:23:00 PM	Tube furnace set to 0
2/21/2011	12:24:00 PM	H2 valve closed
2/21/2011	12:24:00 PM	BCl3 valve closed
2/21/2011	12:24:00 PM	PH3 valve closed
2/21/2011	12:24:00 PM	SiCl4 pre valve closed
2/21/2011	12:24:00 PM	SiCl4 post valve closed
2/21/2011	12:24:00 PM	Bubbler valve closed
2/21/2011	12:24:00 PM	Helium valve opened
2/21/2011	12:24:00 PM	Main Vac valve opened
2/21/2011	12:24:00 PM	Bypass valve opened
2/21/2011	12:24:00 PM	Helium MFC set to  100.000000
2/21/2011	12:24:00 PM	H2 MFC set to  0.000000
2/21/2011	12:24:00 PM	BCl3 MFC set to  0.000000
2/21/2011	12:24:00 PM	PHl3 MFC set to  0.000000
2/21/2011	12:24:00 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:24:00 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:24:01 PM	Tube furnace set to 0
2/21/2011	12:25:01 PM	Helium valve closed
2/21/2011	12:25:01 PM	H2 valve closed
2/21/2011	12:25:01 PM	BCl3 valve closed
2/21/2011	12:25:01 PM	PH3 valve closed
2/21/2011	12:25:01 PM	SiCl4 pre valve closed
2/21/2011	12:25:01 PM	SiCl4 post valve closed
2/21/2011	12:25:01 PM	Bubbler valve closed
2/21/2011	12:25:01 PM	Main Vac valve opened
2/21/2011	12:25:01 PM	Bypass valve opened
2/21/2011	12:25:01 PM	Helium MFC set to  0.000000
2/21/2011	12:25:01 PM	H2 MFC set to  0.000000
2/21/2011	12:25:01 PM	BCl3 MFC set to  0.000000
2/21/2011	12:25:01 PM	PHl3 MFC set to  0.000000
2/21/2011	12:25:01 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:25:01 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:25:01 PM	Tube furnace set to 0
2/21/2011	12:26:01 PM	H2 valve closed
2/21/2011	12:26:01 PM	BCl3 valve closed
2/21/2011	12:26:01 PM	PH3 valve closed
2/21/2011	12:26:01 PM	SiCl4 pre valve closed
2/21/2011	12:26:01 PM	SiCl4 post valve closed
2/21/2011	12:26:01 PM	Bubbler valve closed
2/21/2011	12:26:01 PM	Helium valve opened
2/21/2011	12:26:01 PM	Main Vac valve opened
2/21/2011	12:26:01 PM	Bypass valve opened
2/21/2011	12:26:01 PM	Helium MFC set to  100.000000
2/21/2011	12:26:01 PM	H2 MFC set to  0.000000
2/21/2011	12:26:01 PM	BCl3 MFC set to  0.000000
2/21/2011	12:26:01 PM	PHl3 MFC set to  0.000000
2/21/2011	12:26:01 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:26:01 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:26:01 PM	Tube furnace set to 0
2/21/2011	12:27:01 PM	Helium valve closed
2/21/2011	12:27:01 PM	H2 valve closed
2/21/2011	12:27:01 PM	BCl3 valve closed
2/21/2011	12:27:01 PM	PH3 valve closed
2/21/2011	12:27:01 PM	SiCl4 pre valve closed
2/21/2011	12:27:01 PM	SiCl4 post valve closed
2/21/2011	12:27:01 PM	Bubbler valve closed
2/21/2011	12:27:01 PM	Main Vac valve opened
2/21/2011	12:27:01 PM	Bypass valve opened
2/21/2011	12:27:01 PM	Helium MFC set to  0.000000
2/21/2011	12:27:01 PM	H2 MFC set to  0.000000
2/21/2011	12:27:01 PM	BCl3 MFC set to  0.000000
2/21/2011	12:27:01 PM	PHl3 MFC set to  0.000000
2/21/2011	12:27:01 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:27:01 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:27:01 PM	Tube furnace set to 0
2/21/2011	12:28:01 PM	H2 valve closed
2/21/2011	12:28:01 PM	BCl3 valve closed
2/21/2011	12:28:01 PM	PH3 valve closed
2/21/2011	12:28:01 PM	SiCl4 pre valve closed
2/21/2011	12:28:01 PM	SiCl4 post valve closed
2/21/2011	12:28:01 PM	Bubbler valve closed
2/21/2011	12:28:01 PM	Helium valve opened
2/21/2011	12:28:01 PM	Main Vac valve opened
2/21/2011	12:28:01 PM	Bypass valve opened
2/21/2011	12:28:01 PM	Helium MFC set to  100.000000
2/21/2011	12:28:01 PM	H2 MFC set to  0.000000
2/21/2011	12:28:01 PM	BCl3 MFC set to  0.000000
2/21/2011	12:28:01 PM	PHl3 MFC set to  0.000000
2/21/2011	12:28:01 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:28:01 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:28:01 PM	Tube furnace set to 0
2/21/2011	12:29:01 PM	Helium valve closed
2/21/2011	12:29:01 PM	H2 valve closed
2/21/2011	12:29:01 PM	BCl3 valve closed
2/21/2011	12:29:01 PM	PH3 valve closed
2/21/2011	12:29:01 PM	SiCl4 pre valve closed
2/21/2011	12:29:01 PM	SiCl4 post valve closed
2/21/2011	12:29:01 PM	Bubbler valve closed
2/21/2011	12:29:01 PM	Main Vac valve opened
2/21/2011	12:29:01 PM	Bypass valve opened
2/21/2011	12:29:01 PM	Helium MFC set to  0.000000
2/21/2011	12:29:01 PM	H2 MFC set to  0.000000
2/21/2011	12:29:01 PM	BCl3 MFC set to  0.000000
2/21/2011	12:29:01 PM	PHl3 MFC set to  0.000000
2/21/2011	12:29:01 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:29:01 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:29:01 PM	Tube furnace set to 0
2/21/2011	12:30:02 PM	H2 valve closed
2/21/2011	12:30:02 PM	BCl3 valve closed
2/21/2011	12:30:02 PM	PH3 valve closed
2/21/2011	12:30:02 PM	SiCl4 pre valve closed
2/21/2011	12:30:02 PM	SiCl4 post valve closed
2/21/2011	12:30:02 PM	Bubbler valve closed
2/21/2011	12:30:02 PM	Helium valve opened
2/21/2011	12:30:02 PM	Main Vac valve opened
2/21/2011	12:30:02 PM	Bypass valve opened
2/21/2011	12:30:02 PM	Helium MFC set to  100.000000
2/21/2011	12:30:02 PM	H2 MFC set to  0.000000
2/21/2011	12:30:02 PM	BCl3 MFC set to  0.000000
2/21/2011	12:30:02 PM	PHl3 MFC set to  0.000000
2/21/2011	12:30:02 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:30:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:30:02 PM	Tube furnace set to 0
2/21/2011	12:31:02 PM	Helium valve closed
2/21/2011	12:31:02 PM	H2 valve closed
2/21/2011	12:31:02 PM	BCl3 valve closed
2/21/2011	12:31:02 PM	PH3 valve closed
2/21/2011	12:31:02 PM	SiCl4 pre valve closed
2/21/2011	12:31:02 PM	SiCl4 post valve closed
2/21/2011	12:31:02 PM	Bubbler valve closed
2/21/2011	12:31:02 PM	Main Vac valve opened
2/21/2011	12:31:02 PM	Bypass valve opened
2/21/2011	12:31:02 PM	Helium MFC set to  0.000000
2/21/2011	12:31:02 PM	H2 MFC set to  0.000000
2/21/2011	12:31:02 PM	BCl3 MFC set to  0.000000
2/21/2011	12:31:02 PM	PHl3 MFC set to  0.000000
2/21/2011	12:31:02 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:31:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:31:02 PM	Tube furnace set to 0
2/21/2011	12:32:02 PM	H2 valve closed
2/21/2011	12:32:02 PM	BCl3 valve closed
2/21/2011	12:32:02 PM	PH3 valve closed
2/21/2011	12:32:02 PM	SiCl4 pre valve closed
2/21/2011	12:32:02 PM	SiCl4 post valve closed
2/21/2011	12:32:02 PM	Bubbler valve closed
2/21/2011	12:32:02 PM	Helium valve opened
2/21/2011	12:32:02 PM	Main Vac valve opened
2/21/2011	12:32:02 PM	Bypass valve opened
2/21/2011	12:32:02 PM	Helium MFC set to  100.000000
2/21/2011	12:32:02 PM	H2 MFC set to  0.000000
2/21/2011	12:32:02 PM	BCl3 MFC set to  0.000000
2/21/2011	12:32:02 PM	PHl3 MFC set to  0.000000
2/21/2011	12:32:02 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:32:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:32:02 PM	Tube furnace set to 0
2/21/2011	12:33:02 PM	Helium valve closed
2/21/2011	12:33:02 PM	H2 valve closed
2/21/2011	12:33:02 PM	BCl3 valve closed
2/21/2011	12:33:02 PM	PH3 valve closed
2/21/2011	12:33:02 PM	SiCl4 pre valve closed
2/21/2011	12:33:02 PM	SiCl4 post valve closed
2/21/2011	12:33:02 PM	Bubbler valve closed
2/21/2011	12:33:02 PM	Main Vac valve opened
2/21/2011	12:33:02 PM	Bypass valve opened
2/21/2011	12:33:02 PM	Helium MFC set to  0.000000
2/21/2011	12:33:02 PM	H2 MFC set to  0.000000
2/21/2011	12:33:02 PM	BCl3 MFC set to  0.000000
2/21/2011	12:33:02 PM	PHl3 MFC set to  0.000000
2/21/2011	12:33:02 PM	SiCl4 MFC set to  0.000000
2/21/2011	12:33:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	12:33:02 PM	Tube furnace set to 0
2/21/2011	12:33:03 PM	Run finished at 12:33 PM
2/21/2011	12:33:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	1:24:38 PM	Bypass valve closed
2/21/2011	1:24:38 PM	Main Vac valve closed
2/21/2011	1:24:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	1:25:02 PM	Recipe started at 1:24 PM
2/21/2011	1:25:02 PM	Helium valve closed
2/21/2011	1:25:02 PM	H2 valve closed
2/21/2011	1:25:02 PM	BCl3 valve closed
2/21/2011	1:25:02 PM	PH3 valve closed
2/21/2011	1:25:02 PM	SiCl4 pre valve closed
2/21/2011	1:25:02 PM	SiCl4 post valve closed
2/21/2011	1:25:02 PM	Main Vac valve closed
2/21/2011	1:25:02 PM	Bubbler valve closed
2/21/2011	1:25:02 PM	Bypass valve opened
2/21/2011	1:25:02 PM	Helium MFC set to  0.000000
2/21/2011	1:25:02 PM	H2 MFC set to  0.000000
2/21/2011	1:25:02 PM	BCl3 MFC set to  0.000000
2/21/2011	1:25:02 PM	PHl3 MFC set to  0.000000
2/21/2011	1:25:02 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:25:02 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:25:02 PM	Tube furnace set to 0
2/21/2011	1:25:03 PM	Helium valve closed
2/21/2011	1:25:03 PM	H2 valve closed
2/21/2011	1:25:03 PM	BCl3 valve closed
2/21/2011	1:25:03 PM	PH3 valve closed
2/21/2011	1:25:03 PM	SiCl4 pre valve closed
2/21/2011	1:25:03 PM	SiCl4 post valve closed
2/21/2011	1:25:03 PM	Bubbler valve closed
2/21/2011	1:25:03 PM	Main Vac valve opened
2/21/2011	1:25:03 PM	Bypass valve opened
2/21/2011	1:25:03 PM	Helium MFC set to  0.000000
2/21/2011	1:25:03 PM	H2 MFC set to  0.000000
2/21/2011	1:25:03 PM	BCl3 MFC set to  0.000000
2/21/2011	1:25:03 PM	PHl3 MFC set to  0.000000
2/21/2011	1:25:03 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:25:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:25:03 PM	Tube furnace set to 0
2/21/2011	1:26:03 PM	H2 valve closed
2/21/2011	1:26:03 PM	BCl3 valve closed
2/21/2011	1:26:03 PM	PH3 valve closed
2/21/2011	1:26:03 PM	SiCl4 pre valve closed
2/21/2011	1:26:03 PM	SiCl4 post valve closed
2/21/2011	1:26:03 PM	Bubbler valve closed
2/21/2011	1:26:03 PM	Helium valve opened
2/21/2011	1:26:03 PM	Main Vac valve opened
2/21/2011	1:26:03 PM	Bypass valve opened
2/21/2011	1:26:03 PM	Helium MFC set to  100.000000
2/21/2011	1:26:03 PM	H2 MFC set to  0.000000
2/21/2011	1:26:03 PM	BCl3 MFC set to  0.000000
2/21/2011	1:26:03 PM	PHl3 MFC set to  0.000000
2/21/2011	1:26:03 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:26:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:26:03 PM	Tube furnace set to 0
2/21/2011	1:27:03 PM	Helium valve closed
2/21/2011	1:27:03 PM	H2 valve closed
2/21/2011	1:27:03 PM	BCl3 valve closed
2/21/2011	1:27:03 PM	PH3 valve closed
2/21/2011	1:27:03 PM	SiCl4 pre valve closed
2/21/2011	1:27:03 PM	SiCl4 post valve closed
2/21/2011	1:27:03 PM	Bubbler valve closed
2/21/2011	1:27:03 PM	Main Vac valve opened
2/21/2011	1:27:03 PM	Bypass valve opened
2/21/2011	1:27:03 PM	Helium MFC set to  0.000000
2/21/2011	1:27:03 PM	H2 MFC set to  0.000000
2/21/2011	1:27:03 PM	BCl3 MFC set to  0.000000
2/21/2011	1:27:03 PM	PHl3 MFC set to  0.000000
2/21/2011	1:27:03 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:27:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:27:03 PM	Tube furnace set to 0
2/21/2011	1:28:03 PM	H2 valve closed
2/21/2011	1:28:03 PM	BCl3 valve closed
2/21/2011	1:28:03 PM	PH3 valve closed
2/21/2011	1:28:03 PM	SiCl4 pre valve closed
2/21/2011	1:28:03 PM	SiCl4 post valve closed
2/21/2011	1:28:03 PM	Bubbler valve closed
2/21/2011	1:28:03 PM	Helium valve opened
2/21/2011	1:28:03 PM	Main Vac valve opened
2/21/2011	1:28:03 PM	Bypass valve opened
2/21/2011	1:28:03 PM	Helium MFC set to  100.000000
2/21/2011	1:28:03 PM	H2 MFC set to  0.000000
2/21/2011	1:28:03 PM	BCl3 MFC set to  0.000000
2/21/2011	1:28:03 PM	PHl3 MFC set to  0.000000
2/21/2011	1:28:03 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:28:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:28:03 PM	Tube furnace set to 0
2/21/2011	1:29:03 PM	Helium valve closed
2/21/2011	1:29:03 PM	H2 valve closed
2/21/2011	1:29:03 PM	BCl3 valve closed
2/21/2011	1:29:03 PM	PH3 valve closed
2/21/2011	1:29:03 PM	SiCl4 pre valve closed
2/21/2011	1:29:03 PM	SiCl4 post valve closed
2/21/2011	1:29:03 PM	Bubbler valve closed
2/21/2011	1:29:03 PM	Main Vac valve opened
2/21/2011	1:29:03 PM	Bypass valve opened
2/21/2011	1:29:03 PM	Helium MFC set to  0.000000
2/21/2011	1:29:03 PM	H2 MFC set to  0.000000
2/21/2011	1:29:03 PM	BCl3 MFC set to  0.000000
2/21/2011	1:29:03 PM	PHl3 MFC set to  0.000000
2/21/2011	1:29:03 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:29:03 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:29:04 PM	Tube furnace set to 0
2/21/2011	1:30:04 PM	H2 valve closed
2/21/2011	1:30:04 PM	BCl3 valve closed
2/21/2011	1:30:04 PM	PH3 valve closed
2/21/2011	1:30:04 PM	SiCl4 pre valve closed
2/21/2011	1:30:04 PM	SiCl4 post valve closed
2/21/2011	1:30:04 PM	Bubbler valve closed
2/21/2011	1:30:04 PM	Helium valve opened
2/21/2011	1:30:04 PM	Main Vac valve opened
2/21/2011	1:30:04 PM	Bypass valve opened
2/21/2011	1:30:04 PM	Helium MFC set to  100.000000
2/21/2011	1:30:04 PM	H2 MFC set to  0.000000
2/21/2011	1:30:04 PM	BCl3 MFC set to  0.000000
2/21/2011	1:30:04 PM	PHl3 MFC set to  0.000000
2/21/2011	1:30:04 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:30:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:30:04 PM	Tube furnace set to 0
2/21/2011	1:31:04 PM	Helium valve closed
2/21/2011	1:31:04 PM	H2 valve closed
2/21/2011	1:31:04 PM	BCl3 valve closed
2/21/2011	1:31:04 PM	PH3 valve closed
2/21/2011	1:31:04 PM	SiCl4 pre valve closed
2/21/2011	1:31:04 PM	SiCl4 post valve closed
2/21/2011	1:31:04 PM	Bubbler valve closed
2/21/2011	1:31:04 PM	Main Vac valve opened
2/21/2011	1:31:04 PM	Bypass valve opened
2/21/2011	1:31:04 PM	Helium MFC set to  0.000000
2/21/2011	1:31:04 PM	H2 MFC set to  0.000000
2/21/2011	1:31:04 PM	BCl3 MFC set to  0.000000
2/21/2011	1:31:04 PM	PHl3 MFC set to  0.000000
2/21/2011	1:31:04 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:31:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:31:04 PM	Tube furnace set to 0
2/21/2011	1:32:04 PM	H2 valve closed
2/21/2011	1:32:04 PM	BCl3 valve closed
2/21/2011	1:32:04 PM	PH3 valve closed
2/21/2011	1:32:04 PM	SiCl4 pre valve closed
2/21/2011	1:32:04 PM	SiCl4 post valve closed
2/21/2011	1:32:04 PM	Bubbler valve closed
2/21/2011	1:32:04 PM	Helium valve opened
2/21/2011	1:32:04 PM	Main Vac valve opened
2/21/2011	1:32:04 PM	Bypass valve opened
2/21/2011	1:32:04 PM	Helium MFC set to  100.000000
2/21/2011	1:32:04 PM	H2 MFC set to  0.000000
2/21/2011	1:32:04 PM	BCl3 MFC set to  0.000000
2/21/2011	1:32:04 PM	PHl3 MFC set to  0.000000
2/21/2011	1:32:04 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:32:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:32:04 PM	Tube furnace set to 0
2/21/2011	1:33:04 PM	Helium valve closed
2/21/2011	1:33:04 PM	H2 valve closed
2/21/2011	1:33:04 PM	BCl3 valve closed
2/21/2011	1:33:04 PM	PH3 valve closed
2/21/2011	1:33:04 PM	SiCl4 pre valve closed
2/21/2011	1:33:04 PM	SiCl4 post valve closed
2/21/2011	1:33:04 PM	Bubbler valve closed
2/21/2011	1:33:04 PM	Main Vac valve opened
2/21/2011	1:33:04 PM	Bypass valve opened
2/21/2011	1:33:04 PM	Helium MFC set to  0.000000
2/21/2011	1:33:04 PM	H2 MFC set to  0.000000
2/21/2011	1:33:04 PM	BCl3 MFC set to  0.000000
2/21/2011	1:33:04 PM	PHl3 MFC set to  0.000000
2/21/2011	1:33:04 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:33:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:33:04 PM	Tube furnace set to 0
2/21/2011	1:34:04 PM	H2 valve closed
2/21/2011	1:34:04 PM	BCl3 valve closed
2/21/2011	1:34:04 PM	PH3 valve closed
2/21/2011	1:34:04 PM	SiCl4 pre valve closed
2/21/2011	1:34:04 PM	SiCl4 post valve closed
2/21/2011	1:34:04 PM	Bubbler valve closed
2/21/2011	1:34:04 PM	Helium valve opened
2/21/2011	1:34:04 PM	Main Vac valve opened
2/21/2011	1:34:04 PM	Bypass valve opened
2/21/2011	1:34:04 PM	Helium MFC set to  100.000000
2/21/2011	1:34:04 PM	H2 MFC set to  0.000000
2/21/2011	1:34:04 PM	BCl3 MFC set to  0.000000
2/21/2011	1:34:04 PM	PHl3 MFC set to  0.000000
2/21/2011	1:34:04 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:34:04 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:34:04 PM	Tube furnace set to 0
2/21/2011	1:35:05 PM	Helium valve closed
2/21/2011	1:35:05 PM	H2 valve closed
2/21/2011	1:35:05 PM	BCl3 valve closed
2/21/2011	1:35:05 PM	PH3 valve closed
2/21/2011	1:35:05 PM	SiCl4 pre valve closed
2/21/2011	1:35:05 PM	SiCl4 post valve closed
2/21/2011	1:35:05 PM	Bubbler valve closed
2/21/2011	1:35:05 PM	Main Vac valve opened
2/21/2011	1:35:05 PM	Bypass valve opened
2/21/2011	1:35:05 PM	Helium MFC set to  0.000000
2/21/2011	1:35:05 PM	H2 MFC set to  0.000000
2/21/2011	1:35:05 PM	BCl3 MFC set to  0.000000
2/21/2011	1:35:05 PM	PHl3 MFC set to  0.000000
2/21/2011	1:35:05 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:35:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:35:05 PM	Tube furnace set to 0
2/21/2011	1:36:05 PM	H2 valve closed
2/21/2011	1:36:05 PM	BCl3 valve closed
2/21/2011	1:36:05 PM	PH3 valve closed
2/21/2011	1:36:05 PM	SiCl4 pre valve closed
2/21/2011	1:36:05 PM	SiCl4 post valve closed
2/21/2011	1:36:05 PM	Bubbler valve closed
2/21/2011	1:36:05 PM	Helium valve opened
2/21/2011	1:36:05 PM	Main Vac valve opened
2/21/2011	1:36:05 PM	Bypass valve opened
2/21/2011	1:36:05 PM	Helium MFC set to  100.000000
2/21/2011	1:36:05 PM	H2 MFC set to  0.000000
2/21/2011	1:36:05 PM	BCl3 MFC set to  0.000000
2/21/2011	1:36:05 PM	PHl3 MFC set to  0.000000
2/21/2011	1:36:05 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:36:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:36:05 PM	Tube furnace set to 0
2/21/2011	1:37:05 PM	Helium valve closed
2/21/2011	1:37:05 PM	H2 valve closed
2/21/2011	1:37:05 PM	BCl3 valve closed
2/21/2011	1:37:05 PM	PH3 valve closed
2/21/2011	1:37:05 PM	SiCl4 pre valve closed
2/21/2011	1:37:05 PM	SiCl4 post valve closed
2/21/2011	1:37:05 PM	Bubbler valve closed
2/21/2011	1:37:05 PM	Main Vac valve opened
2/21/2011	1:37:05 PM	Bypass valve opened
2/21/2011	1:37:05 PM	Helium MFC set to  0.000000
2/21/2011	1:37:05 PM	H2 MFC set to  0.000000
2/21/2011	1:37:05 PM	BCl3 MFC set to  0.000000
2/21/2011	1:37:05 PM	PHl3 MFC set to  0.000000
2/21/2011	1:37:05 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:37:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:37:05 PM	Tube furnace set to 0
2/21/2011	1:38:05 PM	H2 valve closed
2/21/2011	1:38:05 PM	BCl3 valve closed
2/21/2011	1:38:05 PM	PH3 valve closed
2/21/2011	1:38:05 PM	SiCl4 pre valve closed
2/21/2011	1:38:05 PM	SiCl4 post valve closed
2/21/2011	1:38:05 PM	Bubbler valve closed
2/21/2011	1:38:05 PM	Helium valve opened
2/21/2011	1:38:05 PM	Main Vac valve opened
2/21/2011	1:38:05 PM	Bypass valve opened
2/21/2011	1:38:05 PM	Helium MFC set to  100.000000
2/21/2011	1:38:05 PM	H2 MFC set to  0.000000
2/21/2011	1:38:05 PM	BCl3 MFC set to  0.000000
2/21/2011	1:38:05 PM	PHl3 MFC set to  0.000000
2/21/2011	1:38:05 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:38:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:38:05 PM	Tube furnace set to 0
2/21/2011	1:39:05 PM	Helium valve closed
2/21/2011	1:39:05 PM	H2 valve closed
2/21/2011	1:39:05 PM	BCl3 valve closed
2/21/2011	1:39:05 PM	PH3 valve closed
2/21/2011	1:39:05 PM	SiCl4 pre valve closed
2/21/2011	1:39:05 PM	SiCl4 post valve closed
2/21/2011	1:39:05 PM	Bubbler valve closed
2/21/2011	1:39:05 PM	Main Vac valve opened
2/21/2011	1:39:05 PM	Bypass valve opened
2/21/2011	1:39:05 PM	Helium MFC set to  0.000000
2/21/2011	1:39:05 PM	H2 MFC set to  0.000000
2/21/2011	1:39:05 PM	BCl3 MFC set to  0.000000
2/21/2011	1:39:05 PM	PHl3 MFC set to  0.000000
2/21/2011	1:39:05 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:39:05 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:39:06 PM	Tube furnace set to 0
2/21/2011	1:40:06 PM	H2 valve closed
2/21/2011	1:40:06 PM	BCl3 valve closed
2/21/2011	1:40:06 PM	PH3 valve closed
2/21/2011	1:40:06 PM	SiCl4 pre valve closed
2/21/2011	1:40:06 PM	SiCl4 post valve closed
2/21/2011	1:40:06 PM	Bubbler valve closed
2/21/2011	1:40:06 PM	Helium valve opened
2/21/2011	1:40:06 PM	Main Vac valve opened
2/21/2011	1:40:06 PM	Bypass valve opened
2/21/2011	1:40:06 PM	Helium MFC set to  100.000000
2/21/2011	1:40:06 PM	H2 MFC set to  0.000000
2/21/2011	1:40:06 PM	BCl3 MFC set to  0.000000
2/21/2011	1:40:06 PM	PHl3 MFC set to  0.000000
2/21/2011	1:40:06 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:40:06 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:40:06 PM	Tube furnace set to 0
2/21/2011	1:41:06 PM	Helium valve closed
2/21/2011	1:41:06 PM	H2 valve closed
2/21/2011	1:41:06 PM	BCl3 valve closed
2/21/2011	1:41:06 PM	PH3 valve closed
2/21/2011	1:41:06 PM	SiCl4 pre valve closed
2/21/2011	1:41:06 PM	SiCl4 post valve closed
2/21/2011	1:41:06 PM	Bubbler valve closed
2/21/2011	1:41:06 PM	Main Vac valve opened
2/21/2011	1:41:06 PM	Bypass valve opened
2/21/2011	1:41:06 PM	Helium MFC set to  0.000000
2/21/2011	1:41:06 PM	H2 MFC set to  0.000000
2/21/2011	1:41:06 PM	BCl3 MFC set to  0.000000
2/21/2011	1:41:06 PM	PHl3 MFC set to  0.000000
2/21/2011	1:41:06 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:41:06 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:41:06 PM	Tube furnace set to 0
2/21/2011	1:42:06 PM	H2 valve closed
2/21/2011	1:42:06 PM	BCl3 valve closed
2/21/2011	1:42:06 PM	PH3 valve closed
2/21/2011	1:42:06 PM	SiCl4 pre valve closed
2/21/2011	1:42:06 PM	SiCl4 post valve closed
2/21/2011	1:42:06 PM	Bubbler valve closed
2/21/2011	1:42:06 PM	Helium valve opened
2/21/2011	1:42:06 PM	Main Vac valve opened
2/21/2011	1:42:06 PM	Bypass valve opened
2/21/2011	1:42:06 PM	Helium MFC set to  100.000000
2/21/2011	1:42:06 PM	H2 MFC set to  0.000000
2/21/2011	1:42:06 PM	BCl3 MFC set to  0.000000
2/21/2011	1:42:06 PM	PHl3 MFC set to  0.000000
2/21/2011	1:42:06 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:42:06 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:42:06 PM	Tube furnace set to 0
2/21/2011	1:43:06 PM	Helium valve closed
2/21/2011	1:43:06 PM	H2 valve closed
2/21/2011	1:43:06 PM	BCl3 valve closed
2/21/2011	1:43:06 PM	PH3 valve closed
2/21/2011	1:43:06 PM	SiCl4 pre valve closed
2/21/2011	1:43:06 PM	SiCl4 post valve closed
2/21/2011	1:43:06 PM	Bubbler valve closed
2/21/2011	1:43:06 PM	Main Vac valve opened
2/21/2011	1:43:06 PM	Bypass valve opened
2/21/2011	1:43:06 PM	Helium MFC set to  0.000000
2/21/2011	1:43:06 PM	H2 MFC set to  0.000000
2/21/2011	1:43:06 PM	BCl3 MFC set to  0.000000
2/21/2011	1:43:06 PM	PHl3 MFC set to  0.000000
2/21/2011	1:43:06 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:43:06 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:43:06 PM	Tube furnace set to 0
2/21/2011	1:44:06 PM	H2 valve closed
2/21/2011	1:44:06 PM	BCl3 valve closed
2/21/2011	1:44:06 PM	PH3 valve closed
2/21/2011	1:44:06 PM	SiCl4 pre valve closed
2/21/2011	1:44:06 PM	SiCl4 post valve closed
2/21/2011	1:44:06 PM	Bubbler valve closed
2/21/2011	1:44:06 PM	Helium valve opened
2/21/2011	1:44:06 PM	Main Vac valve opened
2/21/2011	1:44:06 PM	Bypass valve opened
2/21/2011	1:44:06 PM	Helium MFC set to  100.000000
2/21/2011	1:44:06 PM	H2 MFC set to  0.000000
2/21/2011	1:44:06 PM	BCl3 MFC set to  0.000000
2/21/2011	1:44:06 PM	PHl3 MFC set to  0.000000
2/21/2011	1:44:06 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:44:06 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:44:06 PM	Tube furnace set to 0
2/21/2011	1:45:07 PM	Helium valve closed
2/21/2011	1:45:07 PM	H2 valve closed
2/21/2011	1:45:07 PM	BCl3 valve closed
2/21/2011	1:45:07 PM	PH3 valve closed
2/21/2011	1:45:07 PM	SiCl4 pre valve closed
2/21/2011	1:45:07 PM	SiCl4 post valve closed
2/21/2011	1:45:07 PM	Bubbler valve closed
2/21/2011	1:45:07 PM	Main Vac valve opened
2/21/2011	1:45:07 PM	Bypass valve opened
2/21/2011	1:45:07 PM	Helium MFC set to  0.000000
2/21/2011	1:45:07 PM	H2 MFC set to  0.000000
2/21/2011	1:45:07 PM	BCl3 MFC set to  0.000000
2/21/2011	1:45:07 PM	PHl3 MFC set to  0.000000
2/21/2011	1:45:07 PM	SiCl4 MFC set to  0.000000
2/21/2011	1:45:07 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	1:45:07 PM	Tube furnace set to 0
2/21/2011	1:45:08 PM	Run finished at 1:45 PM
2/21/2011	1:45:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	1:58:33 PM	Bypass valve closed
2/21/2011	1:58:36 PM	Main Vac valve closed
2/21/2011	1:59:37 PM	Main Vac valve opened
2/21/2011	1:59:38 PM	Bypass valve opened
2/21/2011	2:02:04 PM	Bypass valve closed
2/21/2011	2:02:08 PM	Main Vac valve closed
2/21/2011	2:02:20 PM	Main Vac valve opened
2/21/2011	2:02:20 PM	Bypass valve opened
2/21/2011	2:05:42 PM	SiCl4 post valve opened
2/21/2011	2:05:43 PM	SiCl4 post valve closed
2/21/2011	2:05:48 PM	SiCl4 post valve opened
2/21/2011	2:05:53 PM	SiCl4 post valve closed
2/21/2011	2:06:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	2:06:10 PM	Recipe started at 2:06 PM
2/21/2011	2:06:10 PM	H2 valve closed
2/21/2011	2:06:10 PM	BCl3 valve closed
2/21/2011	2:06:10 PM	PH3 valve closed
2/21/2011	2:06:10 PM	SiCl4 pre valve closed
2/21/2011	2:06:10 PM	SiCl4 post valve closed
2/21/2011	2:06:10 PM	Main Vac valve closed
2/21/2011	2:06:10 PM	Bypass valve closed
2/21/2011	2:06:10 PM	Bubbler valve closed
2/21/2011	2:06:10 PM	Helium valve opened
2/21/2011	2:06:10 PM	Helium MFC set to  500.000000
2/21/2011	2:06:10 PM	H2 MFC set to  0.000000
2/21/2011	2:06:10 PM	BCl3 MFC set to  0.000000
2/21/2011	2:06:10 PM	PHl3 MFC set to  0.000000
2/21/2011	2:06:10 PM	SiCl4 MFC set to  0.000000
2/21/2011	2:06:10 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	2:06:10 PM	Tube furnace set to 0
2/21/2011	2:07:29 PM	Helium valve closed
2/21/2011	2:07:29 PM	H2 valve closed
2/21/2011	2:07:29 PM	BCl3 valve closed
2/21/2011	2:07:29 PM	PH3 valve closed
2/21/2011	2:07:29 PM	SiCl4 pre valve closed
2/21/2011	2:07:29 PM	SiCl4 post valve closed
2/21/2011	2:07:29 PM	Main Vac valve closed
2/21/2011	2:07:29 PM	Bypass valve closed
2/21/2011	2:07:29 PM	Bubbler valve closed
2/21/2011	2:07:29 PM	Helium MFC set to  0.000000
2/21/2011	2:07:29 PM	H2 MFC set to  0.000000
2/21/2011	2:07:29 PM	BCl3 MFC set to  0.000000
2/21/2011	2:07:29 PM	PHl3 MFC set to  0.000000
2/21/2011	2:07:29 PM	SiCl4 MFC set to  0.000000
2/21/2011	2:07:29 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	2:07:30 PM	Tube furnace set to 0
2/21/2011	2:07:30 PM	Run finished at 2:07 PM
2/21/2011	2:07:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	2:07:43 PM	SiCl4 post valve opened
2/21/2011	2:07:44 PM	SiCl4 post valve closed
2/21/2011	2:07:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	2:07:48 PM	Recipe started at 2:07 PM
2/21/2011	2:07:48 PM	Helium valve closed
2/21/2011	2:07:48 PM	H2 valve closed
2/21/2011	2:07:48 PM	BCl3 valve closed
2/21/2011	2:07:48 PM	PH3 valve closed
2/21/2011	2:07:48 PM	SiCl4 pre valve closed
2/21/2011	2:07:48 PM	SiCl4 post valve closed
2/21/2011	2:07:48 PM	Main Vac valve closed
2/21/2011	2:07:48 PM	Bubbler valve closed
2/21/2011	2:07:48 PM	Bypass valve opened
2/21/2011	2:07:48 PM	Helium MFC set to  0.000000
2/21/2011	2:07:48 PM	H2 MFC set to  0.000000
2/21/2011	2:07:48 PM	BCl3 MFC set to  0.000000
2/21/2011	2:07:48 PM	PHl3 MFC set to  0.000000
2/21/2011	2:07:48 PM	SiCl4 MFC set to  0.000000
2/21/2011	2:07:48 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	2:07:48 PM	Tube furnace set to 0
2/21/2011	2:08:10 PM	Helium valve closed
2/21/2011	2:08:10 PM	H2 valve closed
2/21/2011	2:08:10 PM	BCl3 valve closed
2/21/2011	2:08:10 PM	PH3 valve closed
2/21/2011	2:08:10 PM	SiCl4 pre valve closed
2/21/2011	2:08:10 PM	SiCl4 post valve closed
2/21/2011	2:08:10 PM	Bubbler valve closed
2/21/2011	2:08:10 PM	Main Vac valve opened
2/21/2011	2:08:10 PM	Bypass valve opened
2/21/2011	2:08:10 PM	Helium MFC set to  0.000000
2/21/2011	2:08:10 PM	H2 MFC set to  0.000000
2/21/2011	2:08:10 PM	BCl3 MFC set to  0.000000
2/21/2011	2:08:10 PM	PHl3 MFC set to  0.000000
2/21/2011	2:08:10 PM	SiCl4 MFC set to  0.000000
2/21/2011	2:08:10 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	2:08:10 PM	Tube furnace set to 0
2/21/2011	2:08:11 PM	Run finished at 2:08 PM
2/21/2011	2:08:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	2:18:35 PM	Recipe started at 2:18 PM
2/21/2011	2:18:35 PM	Helium valve closed
2/21/2011	2:18:35 PM	BCl3 valve closed
2/21/2011	2:18:35 PM	PH3 valve closed
2/21/2011	2:18:35 PM	SiCl4 pre valve closed
2/21/2011	2:18:35 PM	SiCl4 post valve closed
2/21/2011	2:18:35 PM	Main Vac valve closed
2/21/2011	2:18:35 PM	Bypass valve closed
2/21/2011	2:18:35 PM	Bubbler valve closed
2/21/2011	2:18:35 PM	H2 valve opened
2/21/2011	2:18:35 PM	Helium MFC set to  0.000000
2/21/2011	2:18:35 PM	H2 MFC set to  500.000000
2/21/2011	2:18:35 PM	BCl3 MFC set to  0.000000
2/21/2011	2:18:35 PM	PHl3 MFC set to  0.000000
2/21/2011	2:18:35 PM	SiCl4 MFC set to  0.000000
2/21/2011	2:18:35 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	2:18:35 PM	Tube furnace set to 0
2/21/2011	2:19:52 PM	Helium valve closed
2/21/2011	2:19:52 PM	BCl3 valve closed
2/21/2011	2:19:52 PM	PH3 valve closed
2/21/2011	2:19:52 PM	SiCl4 pre valve closed
2/21/2011	2:19:52 PM	SiCl4 post valve closed
2/21/2011	2:19:52 PM	Main Vac valve closed
2/21/2011	2:19:52 PM	Bypass valve closed
2/21/2011	2:19:52 PM	H2 valve opened
2/21/2011	2:19:52 PM	Bubbler valve opened
2/21/2011	2:19:52 PM	Helium MFC set to  0.000000
2/21/2011	2:19:52 PM	H2 MFC set to  500.000000
2/21/2011	2:19:52 PM	BCl3 MFC set to  0.000000
2/21/2011	2:19:52 PM	PHl3 MFC set to  0.000000
2/21/2011	2:19:52 PM	SiCl4 MFC set to  0.000000
2/21/2011	2:19:52 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	2:19:52 PM	Tube furnace set to 1000
2/21/2011	2:20:55 PM	Helium valve closed
2/21/2011	2:20:55 PM	H2 valve closed
2/21/2011	2:20:55 PM	BCl3 valve closed
2/21/2011	2:20:55 PM	PH3 valve closed
2/21/2011	2:20:55 PM	SiCl4 pre valve closed
2/21/2011	2:20:55 PM	SiCl4 post valve closed
2/21/2011	2:20:56 PM	Main Vac valve closed
2/21/2011	2:20:56 PM	Bubbler valve closed
2/21/2011	2:20:56 PM	Bypass valve closed
2/21/2011	2:20:56 PM	Helium MFC set to  0.000000
2/21/2011	2:20:56 PM	H2 MFC set to  0.000000
2/21/2011	2:20:56 PM	BCl3 MFC set to  0.000000
2/21/2011	2:20:56 PM	PHl3 MFC set to  0.000000
2/21/2011	2:20:56 PM	SiCl4 MFC set to  0.000000
2/21/2011	2:20:56 PM	Bypass solenoid MFC set to  760.000000
2/21/2011	2:20:56 PM	Tube furnace set to 0
2/21/2011	2:20:56 PM	Baratron reads 739.276665 Torr and NaOH valve is open.  Emergency exit.
2/21/2011	2:21:38 PM	Run aborted at 2:21 PM
2/21/2011	2:21:52 PM	Recipe started at 2:21 PM
2/21/2011	2:21:52 PM	Helium valve closed
2/21/2011	2:21:52 PM	BCl3 valve closed
2/21/2011	2:21:52 PM	PH3 valve closed
2/21/2011	2:21:52 PM	SiCl4 pre valve closed
2/21/2011	2:21:52 PM	SiCl4 post valve closed
2/21/2011	2:21:52 PM	Main Vac valve closed
2/21/2011	2:21:52 PM	Bypass valve closed
2/21/2011	2:21:52 PM	Bubbler valve closed
2/21/2011	2:21:52 PM	H2 valve opened
2/21/2011	2:21:52 PM	Helium MFC set to  0.000000
2/21/2011	2:21:52 PM	H2 MFC set to  500.000000
2/21/2011	2:21:52 PM	BCl3 MFC set to  0.000000
2/21/2011	2:21:52 PM	PHl3 MFC set to  0.000000
2/21/2011	2:21:52 PM	SiCl4 MFC set to  0.000000
2/21/2011	2:21:52 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	2:21:52 PM	Tube furnace set to 0
2/21/2011	2:21:55 PM	Helium valve closed
2/21/2011	2:21:55 PM	BCl3 valve closed
2/21/2011	2:21:55 PM	PH3 valve closed
2/21/2011	2:21:55 PM	SiCl4 pre valve closed
2/21/2011	2:21:55 PM	SiCl4 post valve closed
2/21/2011	2:21:55 PM	Main Vac valve closed
2/21/2011	2:21:55 PM	Bypass valve closed
2/21/2011	2:21:55 PM	H2 valve opened
2/21/2011	2:21:55 PM	Bubbler valve opened
2/21/2011	2:21:55 PM	Helium MFC set to  0.000000
2/21/2011	2:21:55 PM	H2 MFC set to  500.000000
2/21/2011	2:21:55 PM	BCl3 MFC set to  0.000000
2/21/2011	2:21:55 PM	PHl3 MFC set to  0.000000
2/21/2011	2:21:55 PM	SiCl4 MFC set to  0.000000
2/21/2011	2:21:55 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	2:21:55 PM	Tube furnace set to 1000
2/21/2011	2:41:55 PM	Helium valve closed
2/21/2011	2:41:55 PM	BCl3 valve closed
2/21/2011	2:41:55 PM	Main Vac valve closed
2/21/2011	2:41:55 PM	Bypass valve closed
2/21/2011	2:41:55 PM	H2 valve opened
2/21/2011	2:41:55 PM	PH3 valve opened
2/21/2011	2:41:55 PM	SiCl4 pre valve opened
2/21/2011	2:41:55 PM	SiCl4 post valve opened
2/21/2011	2:41:55 PM	Bubbler valve opened
2/21/2011	2:41:55 PM	Helium MFC set to  0.000000
2/21/2011	2:41:55 PM	H2 MFC set to  500.000000
2/21/2011	2:41:55 PM	BCl3 MFC set to  0.000000
2/21/2011	2:41:55 PM	PHl3 MFC set to  1.000000
2/21/2011	2:41:55 PM	SiCl4 MFC set to  50.000000
2/21/2011	2:41:55 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	2:41:55 PM	Tube furnace set to 1000
2/21/2011	2:58:55 PM	H2 valve closed
2/21/2011	2:58:55 PM	BCl3 valve closed
2/21/2011	2:58:55 PM	PH3 valve closed
2/21/2011	2:58:55 PM	SiCl4 pre valve closed
2/21/2011	2:58:55 PM	SiCl4 post valve closed
2/21/2011	2:58:55 PM	Main Vac valve closed
2/21/2011	2:58:55 PM	Bypass valve closed
2/21/2011	2:58:55 PM	Helium valve opened
2/21/2011	2:58:55 PM	Bubbler valve opened
2/21/2011	2:58:55 PM	Helium MFC set to  500.000000
2/21/2011	2:58:55 PM	H2 MFC set to  0.000000
2/21/2011	2:58:55 PM	BCl3 MFC set to  0.000000
2/21/2011	2:58:55 PM	PHl3 MFC set to  0.000000
2/21/2011	2:58:55 PM	SiCl4 MFC set to  0.000000
2/21/2011	2:58:55 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	2:58:55 PM	Tube furnace set to 0
2/21/2011	3:18:55 PM	Helium valve closed
2/21/2011	3:18:55 PM	H2 valve closed
2/21/2011	3:18:55 PM	BCl3 valve closed
2/21/2011	3:18:55 PM	PH3 valve closed
2/21/2011	3:18:55 PM	SiCl4 pre valve closed
2/21/2011	3:18:55 PM	SiCl4 post valve closed
2/21/2011	3:18:55 PM	Main Vac valve closed
2/21/2011	3:18:55 PM	Bypass valve closed
2/21/2011	3:18:55 PM	Bubbler valve closed
2/21/2011	3:18:55 PM	Helium MFC set to  0.000000
2/21/2011	3:18:55 PM	H2 MFC set to  0.000000
2/21/2011	3:18:55 PM	BCl3 MFC set to  0.000000
2/21/2011	3:18:55 PM	PHl3 MFC set to  0.000000
2/21/2011	3:18:55 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:18:55 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:18:55 PM	Tube furnace set to 0
2/21/2011	3:18:56 PM	Run finished at 3:18 PM
2/21/2011	3:27:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	3:27:41 PM	Recipe started at 3:27 PM
2/21/2011	3:27:41 PM	H2 valve closed
2/21/2011	3:27:41 PM	BCl3 valve closed
2/21/2011	3:27:41 PM	PH3 valve closed
2/21/2011	3:27:41 PM	SiCl4 pre valve closed
2/21/2011	3:27:41 PM	SiCl4 post valve closed
2/21/2011	3:27:41 PM	Main Vac valve closed
2/21/2011	3:27:41 PM	Bypass valve closed
2/21/2011	3:27:41 PM	Bubbler valve closed
2/21/2011	3:27:41 PM	Helium valve opened
2/21/2011	3:27:41 PM	Helium MFC set to  500.000000
2/21/2011	3:27:41 PM	H2 MFC set to  0.000000
2/21/2011	3:27:41 PM	BCl3 MFC set to  0.000000
2/21/2011	3:27:41 PM	PHl3 MFC set to  0.000000
2/21/2011	3:27:41 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:27:41 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:27:42 PM	Tube furnace set to 0
2/21/2011	3:27:46 PM	Helium valve closed
2/21/2011	3:27:46 PM	H2 valve closed
2/21/2011	3:27:46 PM	BCl3 valve closed
2/21/2011	3:27:46 PM	PH3 valve closed
2/21/2011	3:27:46 PM	SiCl4 pre valve closed
2/21/2011	3:27:46 PM	SiCl4 post valve closed
2/21/2011	3:27:46 PM	Main Vac valve closed
2/21/2011	3:27:46 PM	Bypass valve closed
2/21/2011	3:27:46 PM	Bubbler valve closed
2/21/2011	3:27:46 PM	Helium MFC set to  0.000000
2/21/2011	3:27:46 PM	H2 MFC set to  0.000000
2/21/2011	3:27:46 PM	BCl3 MFC set to  0.000000
2/21/2011	3:27:46 PM	PHl3 MFC set to  0.000000
2/21/2011	3:27:46 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:27:46 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:27:47 PM	Tube furnace set to 0
2/21/2011	3:27:47 PM	Run finished at 3:27 PM
2/21/2011	3:27:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/21/2011	3:33:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	3:33:40 PM	Recipe started at 3:33 PM
2/21/2011	3:33:40 PM	Helium valve closed
2/21/2011	3:33:40 PM	H2 valve closed
2/21/2011	3:33:40 PM	BCl3 valve closed
2/21/2011	3:33:40 PM	PH3 valve closed
2/21/2011	3:33:40 PM	SiCl4 pre valve closed
2/21/2011	3:33:40 PM	SiCl4 post valve closed
2/21/2011	3:33:40 PM	Main Vac valve closed
2/21/2011	3:33:40 PM	Bubbler valve closed
2/21/2011	3:33:40 PM	Bypass valve opened
2/21/2011	3:33:40 PM	Helium MFC set to  0.000000
2/21/2011	3:33:40 PM	H2 MFC set to  0.000000
2/21/2011	3:33:40 PM	BCl3 MFC set to  0.000000
2/21/2011	3:33:40 PM	PHl3 MFC set to  0.000000
2/21/2011	3:33:40 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:33:40 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:33:40 PM	Tube furnace set to 0
2/21/2011	3:34:11 PM	Helium valve closed
2/21/2011	3:34:11 PM	H2 valve closed
2/21/2011	3:34:11 PM	BCl3 valve closed
2/21/2011	3:34:11 PM	PH3 valve closed
2/21/2011	3:34:11 PM	SiCl4 pre valve closed
2/21/2011	3:34:11 PM	SiCl4 post valve closed
2/21/2011	3:34:11 PM	Bubbler valve closed
2/21/2011	3:34:11 PM	Main Vac valve opened
2/21/2011	3:34:11 PM	Bypass valve opened
2/21/2011	3:34:11 PM	Helium MFC set to  0.000000
2/21/2011	3:34:11 PM	H2 MFC set to  0.000000
2/21/2011	3:34:11 PM	BCl3 MFC set to  0.000000
2/21/2011	3:34:11 PM	PHl3 MFC set to  0.000000
2/21/2011	3:34:11 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:34:11 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:34:11 PM	Tube furnace set to 0
2/21/2011	3:34:11 PM	Run finished at 3:34 PM
2/21/2011	3:34:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	3:34:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	3:34:28 PM	Recipe started at 3:34 PM
2/21/2011	3:34:28 PM	Helium valve closed
2/21/2011	3:34:28 PM	H2 valve closed
2/21/2011	3:34:28 PM	BCl3 valve closed
2/21/2011	3:34:28 PM	PH3 valve closed
2/21/2011	3:34:28 PM	SiCl4 pre valve closed
2/21/2011	3:34:28 PM	SiCl4 post valve closed
2/21/2011	3:34:28 PM	Main Vac valve closed
2/21/2011	3:34:28 PM	Bubbler valve closed
2/21/2011	3:34:28 PM	Bypass valve opened
2/21/2011	3:34:28 PM	Helium MFC set to  0.000000
2/21/2011	3:34:28 PM	H2 MFC set to  0.000000
2/21/2011	3:34:28 PM	BCl3 MFC set to  0.000000
2/21/2011	3:34:28 PM	PHl3 MFC set to  0.000000
2/21/2011	3:34:28 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:34:28 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:34:28 PM	Tube furnace set to 0
2/21/2011	3:34:28 PM	Helium valve closed
2/21/2011	3:34:28 PM	H2 valve closed
2/21/2011	3:34:28 PM	BCl3 valve closed
2/21/2011	3:34:28 PM	PH3 valve closed
2/21/2011	3:34:28 PM	SiCl4 pre valve closed
2/21/2011	3:34:28 PM	SiCl4 post valve closed
2/21/2011	3:34:28 PM	Bubbler valve closed
2/21/2011	3:34:28 PM	Main Vac valve opened
2/21/2011	3:34:28 PM	Bypass valve opened
2/21/2011	3:34:28 PM	Helium MFC set to  0.000000
2/21/2011	3:34:28 PM	H2 MFC set to  0.000000
2/21/2011	3:34:28 PM	BCl3 MFC set to  0.000000
2/21/2011	3:34:28 PM	PHl3 MFC set to  0.000000
2/21/2011	3:34:28 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:34:28 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:34:28 PM	Tube furnace set to 0
2/21/2011	3:35:28 PM	H2 valve closed
2/21/2011	3:35:28 PM	BCl3 valve closed
2/21/2011	3:35:28 PM	PH3 valve closed
2/21/2011	3:35:28 PM	SiCl4 pre valve closed
2/21/2011	3:35:28 PM	SiCl4 post valve closed
2/21/2011	3:35:28 PM	Bubbler valve closed
2/21/2011	3:35:28 PM	Helium valve opened
2/21/2011	3:35:28 PM	Main Vac valve opened
2/21/2011	3:35:28 PM	Bypass valve opened
2/21/2011	3:35:28 PM	Helium MFC set to  100.000000
2/21/2011	3:35:28 PM	H2 MFC set to  0.000000
2/21/2011	3:35:28 PM	BCl3 MFC set to  0.000000
2/21/2011	3:35:28 PM	PHl3 MFC set to  0.000000
2/21/2011	3:35:28 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:35:28 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:35:28 PM	Tube furnace set to 0
2/21/2011	3:36:28 PM	Helium valve closed
2/21/2011	3:36:28 PM	H2 valve closed
2/21/2011	3:36:28 PM	BCl3 valve closed
2/21/2011	3:36:28 PM	PH3 valve closed
2/21/2011	3:36:28 PM	SiCl4 pre valve closed
2/21/2011	3:36:28 PM	SiCl4 post valve closed
2/21/2011	3:36:28 PM	Bubbler valve closed
2/21/2011	3:36:28 PM	Main Vac valve opened
2/21/2011	3:36:28 PM	Bypass valve opened
2/21/2011	3:36:28 PM	Helium MFC set to  0.000000
2/21/2011	3:36:28 PM	H2 MFC set to  0.000000
2/21/2011	3:36:28 PM	BCl3 MFC set to  0.000000
2/21/2011	3:36:28 PM	PHl3 MFC set to  0.000000
2/21/2011	3:36:28 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:36:28 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:36:29 PM	Tube furnace set to 0
2/21/2011	3:37:29 PM	H2 valve closed
2/21/2011	3:37:29 PM	BCl3 valve closed
2/21/2011	3:37:29 PM	PH3 valve closed
2/21/2011	3:37:29 PM	SiCl4 pre valve closed
2/21/2011	3:37:29 PM	SiCl4 post valve closed
2/21/2011	3:37:29 PM	Bubbler valve closed
2/21/2011	3:37:29 PM	Helium valve opened
2/21/2011	3:37:29 PM	Main Vac valve opened
2/21/2011	3:37:29 PM	Bypass valve opened
2/21/2011	3:37:29 PM	Helium MFC set to  100.000000
2/21/2011	3:37:29 PM	H2 MFC set to  0.000000
2/21/2011	3:37:29 PM	BCl3 MFC set to  0.000000
2/21/2011	3:37:29 PM	PHl3 MFC set to  0.000000
2/21/2011	3:37:29 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:37:29 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:37:29 PM	Tube furnace set to 0
2/21/2011	3:38:29 PM	Helium valve closed
2/21/2011	3:38:29 PM	H2 valve closed
2/21/2011	3:38:29 PM	BCl3 valve closed
2/21/2011	3:38:29 PM	PH3 valve closed
2/21/2011	3:38:29 PM	SiCl4 pre valve closed
2/21/2011	3:38:29 PM	SiCl4 post valve closed
2/21/2011	3:38:29 PM	Bubbler valve closed
2/21/2011	3:38:29 PM	Main Vac valve opened
2/21/2011	3:38:29 PM	Bypass valve opened
2/21/2011	3:38:29 PM	Helium MFC set to  0.000000
2/21/2011	3:38:29 PM	H2 MFC set to  0.000000
2/21/2011	3:38:29 PM	BCl3 MFC set to  0.000000
2/21/2011	3:38:29 PM	PHl3 MFC set to  0.000000
2/21/2011	3:38:29 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:38:29 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:38:29 PM	Tube furnace set to 0
2/21/2011	3:39:29 PM	H2 valve closed
2/21/2011	3:39:29 PM	BCl3 valve closed
2/21/2011	3:39:29 PM	PH3 valve closed
2/21/2011	3:39:29 PM	SiCl4 pre valve closed
2/21/2011	3:39:29 PM	SiCl4 post valve closed
2/21/2011	3:39:29 PM	Bubbler valve closed
2/21/2011	3:39:29 PM	Helium valve opened
2/21/2011	3:39:29 PM	Main Vac valve opened
2/21/2011	3:39:29 PM	Bypass valve opened
2/21/2011	3:39:29 PM	Helium MFC set to  100.000000
2/21/2011	3:39:29 PM	H2 MFC set to  0.000000
2/21/2011	3:39:29 PM	BCl3 MFC set to  0.000000
2/21/2011	3:39:29 PM	PHl3 MFC set to  0.000000
2/21/2011	3:39:29 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:39:29 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:39:29 PM	Tube furnace set to 0
2/21/2011	3:40:29 PM	Helium valve closed
2/21/2011	3:40:29 PM	H2 valve closed
2/21/2011	3:40:29 PM	BCl3 valve closed
2/21/2011	3:40:29 PM	PH3 valve closed
2/21/2011	3:40:29 PM	SiCl4 pre valve closed
2/21/2011	3:40:29 PM	SiCl4 post valve closed
2/21/2011	3:40:29 PM	Bubbler valve closed
2/21/2011	3:40:29 PM	Main Vac valve opened
2/21/2011	3:40:29 PM	Bypass valve opened
2/21/2011	3:40:29 PM	Helium MFC set to  0.000000
2/21/2011	3:40:29 PM	H2 MFC set to  0.000000
2/21/2011	3:40:29 PM	BCl3 MFC set to  0.000000
2/21/2011	3:40:29 PM	PHl3 MFC set to  0.000000
2/21/2011	3:40:29 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:40:29 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:40:29 PM	Tube furnace set to 0
2/21/2011	3:41:29 PM	H2 valve closed
2/21/2011	3:41:29 PM	BCl3 valve closed
2/21/2011	3:41:29 PM	PH3 valve closed
2/21/2011	3:41:29 PM	SiCl4 pre valve closed
2/21/2011	3:41:29 PM	SiCl4 post valve closed
2/21/2011	3:41:29 PM	Bubbler valve closed
2/21/2011	3:41:29 PM	Helium valve opened
2/21/2011	3:41:29 PM	Main Vac valve opened
2/21/2011	3:41:29 PM	Bypass valve opened
2/21/2011	3:41:29 PM	Helium MFC set to  100.000000
2/21/2011	3:41:29 PM	H2 MFC set to  0.000000
2/21/2011	3:41:29 PM	BCl3 MFC set to  0.000000
2/21/2011	3:41:29 PM	PHl3 MFC set to  0.000000
2/21/2011	3:41:29 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:41:29 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:41:30 PM	Tube furnace set to 0
2/21/2011	3:42:30 PM	Helium valve closed
2/21/2011	3:42:30 PM	H2 valve closed
2/21/2011	3:42:30 PM	BCl3 valve closed
2/21/2011	3:42:30 PM	PH3 valve closed
2/21/2011	3:42:30 PM	SiCl4 pre valve closed
2/21/2011	3:42:30 PM	SiCl4 post valve closed
2/21/2011	3:42:30 PM	Bubbler valve closed
2/21/2011	3:42:30 PM	Main Vac valve opened
2/21/2011	3:42:30 PM	Bypass valve opened
2/21/2011	3:42:30 PM	Helium MFC set to  0.000000
2/21/2011	3:42:30 PM	H2 MFC set to  0.000000
2/21/2011	3:42:30 PM	BCl3 MFC set to  0.000000
2/21/2011	3:42:30 PM	PHl3 MFC set to  0.000000
2/21/2011	3:42:30 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:42:30 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:42:30 PM	Tube furnace set to 0
2/21/2011	3:43:30 PM	H2 valve closed
2/21/2011	3:43:30 PM	BCl3 valve closed
2/21/2011	3:43:30 PM	PH3 valve closed
2/21/2011	3:43:30 PM	SiCl4 pre valve closed
2/21/2011	3:43:30 PM	SiCl4 post valve closed
2/21/2011	3:43:30 PM	Bubbler valve closed
2/21/2011	3:43:30 PM	Helium valve opened
2/21/2011	3:43:30 PM	Main Vac valve opened
2/21/2011	3:43:30 PM	Bypass valve opened
2/21/2011	3:43:30 PM	Helium MFC set to  100.000000
2/21/2011	3:43:30 PM	H2 MFC set to  0.000000
2/21/2011	3:43:30 PM	BCl3 MFC set to  0.000000
2/21/2011	3:43:30 PM	PHl3 MFC set to  0.000000
2/21/2011	3:43:30 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:43:30 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:43:30 PM	Tube furnace set to 0
2/21/2011	3:44:30 PM	Helium valve closed
2/21/2011	3:44:30 PM	H2 valve closed
2/21/2011	3:44:30 PM	BCl3 valve closed
2/21/2011	3:44:30 PM	PH3 valve closed
2/21/2011	3:44:30 PM	SiCl4 pre valve closed
2/21/2011	3:44:30 PM	SiCl4 post valve closed
2/21/2011	3:44:30 PM	Bubbler valve closed
2/21/2011	3:44:30 PM	Main Vac valve opened
2/21/2011	3:44:30 PM	Bypass valve opened
2/21/2011	3:44:30 PM	Helium MFC set to  0.000000
2/21/2011	3:44:30 PM	H2 MFC set to  0.000000
2/21/2011	3:44:30 PM	BCl3 MFC set to  0.000000
2/21/2011	3:44:30 PM	PHl3 MFC set to  0.000000
2/21/2011	3:44:30 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:44:30 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:44:30 PM	Tube furnace set to 0
2/21/2011	3:45:30 PM	H2 valve closed
2/21/2011	3:45:30 PM	BCl3 valve closed
2/21/2011	3:45:30 PM	PH3 valve closed
2/21/2011	3:45:30 PM	SiCl4 pre valve closed
2/21/2011	3:45:30 PM	SiCl4 post valve closed
2/21/2011	3:45:30 PM	Bubbler valve closed
2/21/2011	3:45:30 PM	Helium valve opened
2/21/2011	3:45:30 PM	Main Vac valve opened
2/21/2011	3:45:30 PM	Bypass valve opened
2/21/2011	3:45:30 PM	Helium MFC set to  100.000000
2/21/2011	3:45:30 PM	H2 MFC set to  0.000000
2/21/2011	3:45:30 PM	BCl3 MFC set to  0.000000
2/21/2011	3:45:30 PM	PHl3 MFC set to  0.000000
2/21/2011	3:45:30 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:45:30 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:45:30 PM	Tube furnace set to 0
2/21/2011	3:46:30 PM	Helium valve closed
2/21/2011	3:46:30 PM	H2 valve closed
2/21/2011	3:46:30 PM	BCl3 valve closed
2/21/2011	3:46:30 PM	PH3 valve closed
2/21/2011	3:46:30 PM	SiCl4 pre valve closed
2/21/2011	3:46:30 PM	SiCl4 post valve closed
2/21/2011	3:46:30 PM	Bubbler valve closed
2/21/2011	3:46:30 PM	Main Vac valve opened
2/21/2011	3:46:30 PM	Bypass valve opened
2/21/2011	3:46:30 PM	Helium MFC set to  0.000000
2/21/2011	3:46:30 PM	H2 MFC set to  0.000000
2/21/2011	3:46:30 PM	BCl3 MFC set to  0.000000
2/21/2011	3:46:30 PM	PHl3 MFC set to  0.000000
2/21/2011	3:46:30 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:46:30 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:46:31 PM	Tube furnace set to 0
2/21/2011	3:47:31 PM	H2 valve closed
2/21/2011	3:47:31 PM	BCl3 valve closed
2/21/2011	3:47:31 PM	PH3 valve closed
2/21/2011	3:47:31 PM	SiCl4 pre valve closed
2/21/2011	3:47:31 PM	SiCl4 post valve closed
2/21/2011	3:47:31 PM	Bubbler valve closed
2/21/2011	3:47:31 PM	Helium valve opened
2/21/2011	3:47:31 PM	Main Vac valve opened
2/21/2011	3:47:31 PM	Bypass valve opened
2/21/2011	3:47:31 PM	Helium MFC set to  100.000000
2/21/2011	3:47:31 PM	H2 MFC set to  0.000000
2/21/2011	3:47:31 PM	BCl3 MFC set to  0.000000
2/21/2011	3:47:31 PM	PHl3 MFC set to  0.000000
2/21/2011	3:47:31 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:47:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:47:31 PM	Tube furnace set to 0
2/21/2011	3:48:31 PM	Helium valve closed
2/21/2011	3:48:31 PM	H2 valve closed
2/21/2011	3:48:31 PM	BCl3 valve closed
2/21/2011	3:48:31 PM	PH3 valve closed
2/21/2011	3:48:31 PM	SiCl4 pre valve closed
2/21/2011	3:48:31 PM	SiCl4 post valve closed
2/21/2011	3:48:31 PM	Bubbler valve closed
2/21/2011	3:48:31 PM	Main Vac valve opened
2/21/2011	3:48:31 PM	Bypass valve opened
2/21/2011	3:48:31 PM	Helium MFC set to  0.000000
2/21/2011	3:48:31 PM	H2 MFC set to  0.000000
2/21/2011	3:48:31 PM	BCl3 MFC set to  0.000000
2/21/2011	3:48:31 PM	PHl3 MFC set to  0.000000
2/21/2011	3:48:31 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:48:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:48:31 PM	Tube furnace set to 0
2/21/2011	3:49:31 PM	H2 valve closed
2/21/2011	3:49:31 PM	BCl3 valve closed
2/21/2011	3:49:31 PM	PH3 valve closed
2/21/2011	3:49:31 PM	SiCl4 pre valve closed
2/21/2011	3:49:31 PM	SiCl4 post valve closed
2/21/2011	3:49:31 PM	Bubbler valve closed
2/21/2011	3:49:31 PM	Helium valve opened
2/21/2011	3:49:31 PM	Main Vac valve opened
2/21/2011	3:49:31 PM	Bypass valve opened
2/21/2011	3:49:31 PM	Helium MFC set to  100.000000
2/21/2011	3:49:31 PM	H2 MFC set to  0.000000
2/21/2011	3:49:31 PM	BCl3 MFC set to  0.000000
2/21/2011	3:49:31 PM	PHl3 MFC set to  0.000000
2/21/2011	3:49:31 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:49:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:49:31 PM	Tube furnace set to 0
2/21/2011	3:50:31 PM	Helium valve closed
2/21/2011	3:50:31 PM	H2 valve closed
2/21/2011	3:50:31 PM	BCl3 valve closed
2/21/2011	3:50:31 PM	PH3 valve closed
2/21/2011	3:50:31 PM	SiCl4 pre valve closed
2/21/2011	3:50:31 PM	SiCl4 post valve closed
2/21/2011	3:50:31 PM	Bubbler valve closed
2/21/2011	3:50:31 PM	Main Vac valve opened
2/21/2011	3:50:31 PM	Bypass valve opened
2/21/2011	3:50:31 PM	Helium MFC set to  0.000000
2/21/2011	3:50:31 PM	H2 MFC set to  0.000000
2/21/2011	3:50:31 PM	BCl3 MFC set to  0.000000
2/21/2011	3:50:31 PM	PHl3 MFC set to  0.000000
2/21/2011	3:50:31 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:50:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:50:31 PM	Tube furnace set to 0
2/21/2011	3:51:31 PM	H2 valve closed
2/21/2011	3:51:31 PM	BCl3 valve closed
2/21/2011	3:51:31 PM	PH3 valve closed
2/21/2011	3:51:31 PM	SiCl4 pre valve closed
2/21/2011	3:51:31 PM	SiCl4 post valve closed
2/21/2011	3:51:31 PM	Bubbler valve closed
2/21/2011	3:51:31 PM	Helium valve opened
2/21/2011	3:51:31 PM	Main Vac valve opened
2/21/2011	3:51:31 PM	Bypass valve opened
2/21/2011	3:51:31 PM	Helium MFC set to  100.000000
2/21/2011	3:51:31 PM	H2 MFC set to  0.000000
2/21/2011	3:51:31 PM	BCl3 MFC set to  0.000000
2/21/2011	3:51:31 PM	PHl3 MFC set to  0.000000
2/21/2011	3:51:31 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:51:31 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:51:32 PM	Tube furnace set to 0
2/21/2011	3:52:32 PM	Helium valve closed
2/21/2011	3:52:32 PM	H2 valve closed
2/21/2011	3:52:32 PM	BCl3 valve closed
2/21/2011	3:52:32 PM	PH3 valve closed
2/21/2011	3:52:32 PM	SiCl4 pre valve closed
2/21/2011	3:52:32 PM	SiCl4 post valve closed
2/21/2011	3:52:32 PM	Bubbler valve closed
2/21/2011	3:52:32 PM	Main Vac valve opened
2/21/2011	3:52:32 PM	Bypass valve opened
2/21/2011	3:52:32 PM	Helium MFC set to  0.000000
2/21/2011	3:52:32 PM	H2 MFC set to  0.000000
2/21/2011	3:52:32 PM	BCl3 MFC set to  0.000000
2/21/2011	3:52:32 PM	PHl3 MFC set to  0.000000
2/21/2011	3:52:32 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:52:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:52:32 PM	Tube furnace set to 0
2/21/2011	3:53:32 PM	H2 valve closed
2/21/2011	3:53:32 PM	BCl3 valve closed
2/21/2011	3:53:32 PM	PH3 valve closed
2/21/2011	3:53:32 PM	SiCl4 pre valve closed
2/21/2011	3:53:32 PM	SiCl4 post valve closed
2/21/2011	3:53:32 PM	Bubbler valve closed
2/21/2011	3:53:32 PM	Helium valve opened
2/21/2011	3:53:32 PM	Main Vac valve opened
2/21/2011	3:53:32 PM	Bypass valve opened
2/21/2011	3:53:32 PM	Helium MFC set to  100.000000
2/21/2011	3:53:32 PM	H2 MFC set to  0.000000
2/21/2011	3:53:32 PM	BCl3 MFC set to  0.000000
2/21/2011	3:53:32 PM	PHl3 MFC set to  0.000000
2/21/2011	3:53:32 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:53:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:53:32 PM	Tube furnace set to 0
2/21/2011	3:54:32 PM	Helium valve closed
2/21/2011	3:54:32 PM	H2 valve closed
2/21/2011	3:54:32 PM	BCl3 valve closed
2/21/2011	3:54:32 PM	PH3 valve closed
2/21/2011	3:54:32 PM	SiCl4 pre valve closed
2/21/2011	3:54:32 PM	SiCl4 post valve closed
2/21/2011	3:54:32 PM	Bubbler valve closed
2/21/2011	3:54:32 PM	Main Vac valve opened
2/21/2011	3:54:32 PM	Bypass valve opened
2/21/2011	3:54:32 PM	Helium MFC set to  0.000000
2/21/2011	3:54:32 PM	H2 MFC set to  0.000000
2/21/2011	3:54:32 PM	BCl3 MFC set to  0.000000
2/21/2011	3:54:32 PM	PHl3 MFC set to  0.000000
2/21/2011	3:54:32 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:54:32 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:54:32 PM	Tube furnace set to 0
2/21/2011	3:54:33 PM	Run finished at 3:54 PM
2/21/2011	3:54:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	3:55:11 PM	Bypass valve closed
2/21/2011	3:55:12 PM	Main Vac valve closed
2/21/2011	3:55:25 PM	Bypass valve opened
2/21/2011	3:55:25 PM	Main Vac valve opened
2/21/2011	3:57:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	3:57:15 PM	Recipe started at 3:57 PM
2/21/2011	3:57:15 PM	Helium valve closed
2/21/2011	3:57:15 PM	H2 valve closed
2/21/2011	3:57:15 PM	BCl3 valve closed
2/21/2011	3:57:15 PM	PH3 valve closed
2/21/2011	3:57:15 PM	SiCl4 pre valve closed
2/21/2011	3:57:15 PM	SiCl4 post valve closed
2/21/2011	3:57:15 PM	Main Vac valve closed
2/21/2011	3:57:15 PM	Bubbler valve closed
2/21/2011	3:57:15 PM	Bypass valve opened
2/21/2011	3:57:15 PM	Helium MFC set to  0.000000
2/21/2011	3:57:15 PM	H2 MFC set to  0.000000
2/21/2011	3:57:15 PM	BCl3 MFC set to  0.000000
2/21/2011	3:57:15 PM	PHl3 MFC set to  0.000000
2/21/2011	3:57:15 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:57:15 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:57:15 PM	Tube furnace set to 0
2/21/2011	3:57:15 PM	Helium valve closed
2/21/2011	3:57:15 PM	H2 valve closed
2/21/2011	3:57:15 PM	BCl3 valve closed
2/21/2011	3:57:15 PM	PH3 valve closed
2/21/2011	3:57:15 PM	SiCl4 pre valve closed
2/21/2011	3:57:15 PM	SiCl4 post valve closed
2/21/2011	3:57:15 PM	Bubbler valve closed
2/21/2011	3:57:15 PM	Main Vac valve opened
2/21/2011	3:57:15 PM	Bypass valve opened
2/21/2011	3:57:15 PM	Helium MFC set to  0.000000
2/21/2011	3:57:15 PM	H2 MFC set to  0.000000
2/21/2011	3:57:15 PM	BCl3 MFC set to  0.000000
2/21/2011	3:57:15 PM	PHl3 MFC set to  0.000000
2/21/2011	3:57:15 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:57:15 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:57:15 PM	Tube furnace set to 0
2/21/2011	3:58:15 PM	H2 valve closed
2/21/2011	3:58:15 PM	BCl3 valve closed
2/21/2011	3:58:15 PM	PH3 valve closed
2/21/2011	3:58:15 PM	SiCl4 pre valve closed
2/21/2011	3:58:15 PM	SiCl4 post valve closed
2/21/2011	3:58:15 PM	Bubbler valve closed
2/21/2011	3:58:15 PM	Helium valve opened
2/21/2011	3:58:15 PM	Main Vac valve opened
2/21/2011	3:58:15 PM	Bypass valve opened
2/21/2011	3:58:15 PM	Helium MFC set to  100.000000
2/21/2011	3:58:15 PM	H2 MFC set to  0.000000
2/21/2011	3:58:15 PM	BCl3 MFC set to  0.000000
2/21/2011	3:58:15 PM	PHl3 MFC set to  0.000000
2/21/2011	3:58:15 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:58:15 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:58:16 PM	Tube furnace set to 0
2/21/2011	3:59:16 PM	Helium valve closed
2/21/2011	3:59:16 PM	H2 valve closed
2/21/2011	3:59:16 PM	BCl3 valve closed
2/21/2011	3:59:16 PM	PH3 valve closed
2/21/2011	3:59:16 PM	SiCl4 pre valve closed
2/21/2011	3:59:16 PM	SiCl4 post valve closed
2/21/2011	3:59:16 PM	Bubbler valve closed
2/21/2011	3:59:16 PM	Main Vac valve opened
2/21/2011	3:59:16 PM	Bypass valve opened
2/21/2011	3:59:16 PM	Helium MFC set to  0.000000
2/21/2011	3:59:16 PM	H2 MFC set to  0.000000
2/21/2011	3:59:16 PM	BCl3 MFC set to  0.000000
2/21/2011	3:59:16 PM	PHl3 MFC set to  0.000000
2/21/2011	3:59:16 PM	SiCl4 MFC set to  0.000000
2/21/2011	3:59:16 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	3:59:16 PM	Tube furnace set to 0
2/21/2011	4:00:16 PM	H2 valve closed
2/21/2011	4:00:16 PM	BCl3 valve closed
2/21/2011	4:00:16 PM	PH3 valve closed
2/21/2011	4:00:16 PM	SiCl4 pre valve closed
2/21/2011	4:00:16 PM	SiCl4 post valve closed
2/21/2011	4:00:16 PM	Bubbler valve closed
2/21/2011	4:00:16 PM	Helium valve opened
2/21/2011	4:00:16 PM	Main Vac valve opened
2/21/2011	4:00:16 PM	Bypass valve opened
2/21/2011	4:00:16 PM	Helium MFC set to  100.000000
2/21/2011	4:00:16 PM	H2 MFC set to  0.000000
2/21/2011	4:00:16 PM	BCl3 MFC set to  0.000000
2/21/2011	4:00:16 PM	PHl3 MFC set to  0.000000
2/21/2011	4:00:16 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:00:16 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:00:16 PM	Tube furnace set to 0
2/21/2011	4:01:16 PM	Helium valve closed
2/21/2011	4:01:16 PM	H2 valve closed
2/21/2011	4:01:16 PM	BCl3 valve closed
2/21/2011	4:01:16 PM	PH3 valve closed
2/21/2011	4:01:16 PM	SiCl4 pre valve closed
2/21/2011	4:01:16 PM	SiCl4 post valve closed
2/21/2011	4:01:16 PM	Bubbler valve closed
2/21/2011	4:01:16 PM	Main Vac valve opened
2/21/2011	4:01:16 PM	Bypass valve opened
2/21/2011	4:01:16 PM	Helium MFC set to  0.000000
2/21/2011	4:01:16 PM	H2 MFC set to  0.000000
2/21/2011	4:01:16 PM	BCl3 MFC set to  0.000000
2/21/2011	4:01:16 PM	PHl3 MFC set to  0.000000
2/21/2011	4:01:16 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:01:16 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:01:16 PM	Tube furnace set to 0
2/21/2011	4:02:16 PM	H2 valve closed
2/21/2011	4:02:16 PM	BCl3 valve closed
2/21/2011	4:02:16 PM	PH3 valve closed
2/21/2011	4:02:16 PM	SiCl4 pre valve closed
2/21/2011	4:02:16 PM	SiCl4 post valve closed
2/21/2011	4:02:16 PM	Bubbler valve closed
2/21/2011	4:02:16 PM	Helium valve opened
2/21/2011	4:02:16 PM	Main Vac valve opened
2/21/2011	4:02:16 PM	Bypass valve opened
2/21/2011	4:02:16 PM	Helium MFC set to  100.000000
2/21/2011	4:02:16 PM	H2 MFC set to  0.000000
2/21/2011	4:02:16 PM	BCl3 MFC set to  0.000000
2/21/2011	4:02:16 PM	PHl3 MFC set to  0.000000
2/21/2011	4:02:16 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:02:16 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:02:16 PM	Tube furnace set to 0
2/21/2011	4:03:17 PM	Helium valve closed
2/21/2011	4:03:17 PM	H2 valve closed
2/21/2011	4:03:17 PM	BCl3 valve closed
2/21/2011	4:03:17 PM	PH3 valve closed
2/21/2011	4:03:17 PM	SiCl4 pre valve closed
2/21/2011	4:03:17 PM	SiCl4 post valve closed
2/21/2011	4:03:17 PM	Bubbler valve closed
2/21/2011	4:03:17 PM	Main Vac valve opened
2/21/2011	4:03:17 PM	Bypass valve opened
2/21/2011	4:03:17 PM	Helium MFC set to  0.000000
2/21/2011	4:03:17 PM	H2 MFC set to  0.000000
2/21/2011	4:03:17 PM	BCl3 MFC set to  0.000000
2/21/2011	4:03:17 PM	PHl3 MFC set to  0.000000
2/21/2011	4:03:17 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:03:17 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:03:17 PM	Tube furnace set to 0
2/21/2011	4:04:17 PM	H2 valve closed
2/21/2011	4:04:17 PM	BCl3 valve closed
2/21/2011	4:04:17 PM	PH3 valve closed
2/21/2011	4:04:17 PM	SiCl4 pre valve closed
2/21/2011	4:04:17 PM	SiCl4 post valve closed
2/21/2011	4:04:17 PM	Bubbler valve closed
2/21/2011	4:04:17 PM	Helium valve opened
2/21/2011	4:04:17 PM	Main Vac valve opened
2/21/2011	4:04:17 PM	Bypass valve opened
2/21/2011	4:04:17 PM	Helium MFC set to  100.000000
2/21/2011	4:04:17 PM	H2 MFC set to  0.000000
2/21/2011	4:04:17 PM	BCl3 MFC set to  0.000000
2/21/2011	4:04:17 PM	PHl3 MFC set to  0.000000
2/21/2011	4:04:17 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:04:17 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:04:17 PM	Tube furnace set to 0
2/21/2011	4:05:17 PM	Helium valve closed
2/21/2011	4:05:17 PM	H2 valve closed
2/21/2011	4:05:17 PM	BCl3 valve closed
2/21/2011	4:05:17 PM	PH3 valve closed
2/21/2011	4:05:17 PM	SiCl4 pre valve closed
2/21/2011	4:05:17 PM	SiCl4 post valve closed
2/21/2011	4:05:17 PM	Bubbler valve closed
2/21/2011	4:05:17 PM	Main Vac valve opened
2/21/2011	4:05:17 PM	Bypass valve opened
2/21/2011	4:05:17 PM	Helium MFC set to  0.000000
2/21/2011	4:05:17 PM	H2 MFC set to  0.000000
2/21/2011	4:05:17 PM	BCl3 MFC set to  0.000000
2/21/2011	4:05:17 PM	PHl3 MFC set to  0.000000
2/21/2011	4:05:17 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:05:17 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:05:17 PM	Tube furnace set to 0
2/21/2011	4:06:17 PM	H2 valve closed
2/21/2011	4:06:17 PM	BCl3 valve closed
2/21/2011	4:06:17 PM	PH3 valve closed
2/21/2011	4:06:17 PM	SiCl4 pre valve closed
2/21/2011	4:06:17 PM	SiCl4 post valve closed
2/21/2011	4:06:17 PM	Bubbler valve closed
2/21/2011	4:06:17 PM	Helium valve opened
2/21/2011	4:06:17 PM	Main Vac valve opened
2/21/2011	4:06:17 PM	Bypass valve opened
2/21/2011	4:06:17 PM	Helium MFC set to  100.000000
2/21/2011	4:06:17 PM	H2 MFC set to  0.000000
2/21/2011	4:06:17 PM	BCl3 MFC set to  0.000000
2/21/2011	4:06:17 PM	PHl3 MFC set to  0.000000
2/21/2011	4:06:17 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:06:17 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:06:17 PM	Tube furnace set to 0
2/21/2011	4:07:17 PM	Helium valve closed
2/21/2011	4:07:17 PM	H2 valve closed
2/21/2011	4:07:17 PM	BCl3 valve closed
2/21/2011	4:07:17 PM	PH3 valve closed
2/21/2011	4:07:17 PM	SiCl4 pre valve closed
2/21/2011	4:07:17 PM	SiCl4 post valve closed
2/21/2011	4:07:17 PM	Bubbler valve closed
2/21/2011	4:07:17 PM	Main Vac valve opened
2/21/2011	4:07:17 PM	Bypass valve opened
2/21/2011	4:07:17 PM	Helium MFC set to  0.000000
2/21/2011	4:07:17 PM	H2 MFC set to  0.000000
2/21/2011	4:07:17 PM	BCl3 MFC set to  0.000000
2/21/2011	4:07:17 PM	PHl3 MFC set to  0.000000
2/21/2011	4:07:17 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:07:17 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:07:18 PM	Tube furnace set to 0
2/21/2011	4:08:18 PM	H2 valve closed
2/21/2011	4:08:18 PM	BCl3 valve closed
2/21/2011	4:08:18 PM	PH3 valve closed
2/21/2011	4:08:18 PM	SiCl4 pre valve closed
2/21/2011	4:08:18 PM	SiCl4 post valve closed
2/21/2011	4:08:18 PM	Bubbler valve closed
2/21/2011	4:08:18 PM	Helium valve opened
2/21/2011	4:08:18 PM	Main Vac valve opened
2/21/2011	4:08:18 PM	Bypass valve opened
2/21/2011	4:08:18 PM	Helium MFC set to  100.000000
2/21/2011	4:08:18 PM	H2 MFC set to  0.000000
2/21/2011	4:08:18 PM	BCl3 MFC set to  0.000000
2/21/2011	4:08:18 PM	PHl3 MFC set to  0.000000
2/21/2011	4:08:18 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:08:18 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:08:18 PM	Tube furnace set to 0
2/21/2011	4:09:18 PM	Helium valve closed
2/21/2011	4:09:18 PM	H2 valve closed
2/21/2011	4:09:18 PM	BCl3 valve closed
2/21/2011	4:09:18 PM	PH3 valve closed
2/21/2011	4:09:18 PM	SiCl4 pre valve closed
2/21/2011	4:09:18 PM	SiCl4 post valve closed
2/21/2011	4:09:18 PM	Bubbler valve closed
2/21/2011	4:09:18 PM	Main Vac valve opened
2/21/2011	4:09:18 PM	Bypass valve opened
2/21/2011	4:09:18 PM	Helium MFC set to  0.000000
2/21/2011	4:09:18 PM	H2 MFC set to  0.000000
2/21/2011	4:09:18 PM	BCl3 MFC set to  0.000000
2/21/2011	4:09:18 PM	PHl3 MFC set to  0.000000
2/21/2011	4:09:18 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:09:18 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:09:18 PM	Tube furnace set to 0
2/21/2011	4:10:18 PM	H2 valve closed
2/21/2011	4:10:18 PM	BCl3 valve closed
2/21/2011	4:10:18 PM	PH3 valve closed
2/21/2011	4:10:18 PM	SiCl4 pre valve closed
2/21/2011	4:10:18 PM	SiCl4 post valve closed
2/21/2011	4:10:18 PM	Bubbler valve closed
2/21/2011	4:10:18 PM	Helium valve opened
2/21/2011	4:10:18 PM	Main Vac valve opened
2/21/2011	4:10:18 PM	Bypass valve opened
2/21/2011	4:10:18 PM	Helium MFC set to  100.000000
2/21/2011	4:10:18 PM	H2 MFC set to  0.000000
2/21/2011	4:10:18 PM	BCl3 MFC set to  0.000000
2/21/2011	4:10:18 PM	PHl3 MFC set to  0.000000
2/21/2011	4:10:18 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:10:18 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:10:18 PM	Tube furnace set to 0
2/21/2011	4:11:18 PM	Helium valve closed
2/21/2011	4:11:18 PM	H2 valve closed
2/21/2011	4:11:18 PM	BCl3 valve closed
2/21/2011	4:11:18 PM	PH3 valve closed
2/21/2011	4:11:18 PM	SiCl4 pre valve closed
2/21/2011	4:11:18 PM	SiCl4 post valve closed
2/21/2011	4:11:18 PM	Bubbler valve closed
2/21/2011	4:11:18 PM	Main Vac valve opened
2/21/2011	4:11:18 PM	Bypass valve opened
2/21/2011	4:11:18 PM	Helium MFC set to  0.000000
2/21/2011	4:11:18 PM	H2 MFC set to  0.000000
2/21/2011	4:11:18 PM	BCl3 MFC set to  0.000000
2/21/2011	4:11:18 PM	PHl3 MFC set to  0.000000
2/21/2011	4:11:18 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:11:18 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:11:18 PM	Tube furnace set to 0
2/21/2011	4:12:18 PM	H2 valve closed
2/21/2011	4:12:18 PM	BCl3 valve closed
2/21/2011	4:12:18 PM	PH3 valve closed
2/21/2011	4:12:18 PM	SiCl4 pre valve closed
2/21/2011	4:12:18 PM	SiCl4 post valve closed
2/21/2011	4:12:18 PM	Bubbler valve closed
2/21/2011	4:12:18 PM	Helium valve opened
2/21/2011	4:12:18 PM	Main Vac valve opened
2/21/2011	4:12:18 PM	Bypass valve opened
2/21/2011	4:12:18 PM	Helium MFC set to  100.000000
2/21/2011	4:12:18 PM	H2 MFC set to  0.000000
2/21/2011	4:12:18 PM	BCl3 MFC set to  0.000000
2/21/2011	4:12:18 PM	PHl3 MFC set to  0.000000
2/21/2011	4:12:18 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:12:18 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:12:19 PM	Tube furnace set to 0
2/21/2011	4:13:19 PM	Helium valve closed
2/21/2011	4:13:19 PM	H2 valve closed
2/21/2011	4:13:19 PM	BCl3 valve closed
2/21/2011	4:13:19 PM	PH3 valve closed
2/21/2011	4:13:19 PM	SiCl4 pre valve closed
2/21/2011	4:13:19 PM	SiCl4 post valve closed
2/21/2011	4:13:19 PM	Bubbler valve closed
2/21/2011	4:13:19 PM	Main Vac valve opened
2/21/2011	4:13:19 PM	Bypass valve opened
2/21/2011	4:13:19 PM	Helium MFC set to  0.000000
2/21/2011	4:13:19 PM	H2 MFC set to  0.000000
2/21/2011	4:13:19 PM	BCl3 MFC set to  0.000000
2/21/2011	4:13:19 PM	PHl3 MFC set to  0.000000
2/21/2011	4:13:19 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:13:19 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:13:19 PM	Tube furnace set to 0
2/21/2011	4:14:19 PM	H2 valve closed
2/21/2011	4:14:19 PM	BCl3 valve closed
2/21/2011	4:14:19 PM	PH3 valve closed
2/21/2011	4:14:19 PM	SiCl4 pre valve closed
2/21/2011	4:14:19 PM	SiCl4 post valve closed
2/21/2011	4:14:19 PM	Bubbler valve closed
2/21/2011	4:14:19 PM	Helium valve opened
2/21/2011	4:14:19 PM	Main Vac valve opened
2/21/2011	4:14:19 PM	Bypass valve opened
2/21/2011	4:14:19 PM	Helium MFC set to  100.000000
2/21/2011	4:14:19 PM	H2 MFC set to  0.000000
2/21/2011	4:14:19 PM	BCl3 MFC set to  0.000000
2/21/2011	4:14:19 PM	PHl3 MFC set to  0.000000
2/21/2011	4:14:19 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:14:19 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:14:19 PM	Tube furnace set to 0
2/21/2011	4:15:19 PM	Helium valve closed
2/21/2011	4:15:19 PM	H2 valve closed
2/21/2011	4:15:19 PM	BCl3 valve closed
2/21/2011	4:15:19 PM	PH3 valve closed
2/21/2011	4:15:19 PM	SiCl4 pre valve closed
2/21/2011	4:15:19 PM	SiCl4 post valve closed
2/21/2011	4:15:19 PM	Bubbler valve closed
2/21/2011	4:15:19 PM	Main Vac valve opened
2/21/2011	4:15:19 PM	Bypass valve opened
2/21/2011	4:15:19 PM	Helium MFC set to  0.000000
2/21/2011	4:15:19 PM	H2 MFC set to  0.000000
2/21/2011	4:15:19 PM	BCl3 MFC set to  0.000000
2/21/2011	4:15:19 PM	PHl3 MFC set to  0.000000
2/21/2011	4:15:19 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:15:19 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:15:19 PM	Tube furnace set to 0
2/21/2011	4:16:19 PM	H2 valve closed
2/21/2011	4:16:19 PM	BCl3 valve closed
2/21/2011	4:16:19 PM	PH3 valve closed
2/21/2011	4:16:19 PM	SiCl4 pre valve closed
2/21/2011	4:16:19 PM	SiCl4 post valve closed
2/21/2011	4:16:19 PM	Bubbler valve closed
2/21/2011	4:16:19 PM	Helium valve opened
2/21/2011	4:16:19 PM	Main Vac valve opened
2/21/2011	4:16:19 PM	Bypass valve opened
2/21/2011	4:16:19 PM	Helium MFC set to  100.000000
2/21/2011	4:16:19 PM	H2 MFC set to  0.000000
2/21/2011	4:16:19 PM	BCl3 MFC set to  0.000000
2/21/2011	4:16:19 PM	PHl3 MFC set to  0.000000
2/21/2011	4:16:19 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:16:19 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:16:19 PM	Tube furnace set to 0
2/21/2011	4:17:19 PM	Helium valve closed
2/21/2011	4:17:19 PM	H2 valve closed
2/21/2011	4:17:19 PM	BCl3 valve closed
2/21/2011	4:17:19 PM	PH3 valve closed
2/21/2011	4:17:19 PM	SiCl4 pre valve closed
2/21/2011	4:17:19 PM	SiCl4 post valve closed
2/21/2011	4:17:19 PM	Bubbler valve closed
2/21/2011	4:17:19 PM	Main Vac valve opened
2/21/2011	4:17:19 PM	Bypass valve opened
2/21/2011	4:17:19 PM	Helium MFC set to  0.000000
2/21/2011	4:17:19 PM	H2 MFC set to  0.000000
2/21/2011	4:17:19 PM	BCl3 MFC set to  0.000000
2/21/2011	4:17:19 PM	PHl3 MFC set to  0.000000
2/21/2011	4:17:19 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:17:19 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:17:20 PM	Tube furnace set to 0
2/21/2011	4:17:21 PM	Run finished at 4:17 PM
2/21/2011	4:17:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	4:23:00 PM	Bypass valve closed
2/21/2011	4:23:00 PM	Main Vac valve closed
2/21/2011	4:23:13 PM	Bypass valve opened
2/21/2011	4:23:13 PM	Main Vac valve opened
2/21/2011	4:24:58 PM	Recipe started at 4:24 PM
2/21/2011	4:24:58 PM	Helium valve closed
2/21/2011	4:24:58 PM	BCl3 valve closed
2/21/2011	4:24:58 PM	PH3 valve closed
2/21/2011	4:24:58 PM	SiCl4 pre valve closed
2/21/2011	4:24:58 PM	SiCl4 post valve closed
2/21/2011	4:24:58 PM	Main Vac valve closed
2/21/2011	4:24:58 PM	Bypass valve closed
2/21/2011	4:24:58 PM	Bubbler valve closed
2/21/2011	4:24:58 PM	H2 valve opened
2/21/2011	4:24:58 PM	Helium MFC set to  0.000000
2/21/2011	4:24:58 PM	H2 MFC set to  500.000000
2/21/2011	4:24:58 PM	BCl3 MFC set to  0.000000
2/21/2011	4:24:58 PM	PHl3 MFC set to  0.000000
2/21/2011	4:24:58 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:24:58 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:24:58 PM	Tube furnace set to 0
2/21/2011	4:26:16 PM	Helium valve closed
2/21/2011	4:26:16 PM	BCl3 valve closed
2/21/2011	4:26:16 PM	PH3 valve closed
2/21/2011	4:26:16 PM	SiCl4 pre valve closed
2/21/2011	4:26:16 PM	SiCl4 post valve closed
2/21/2011	4:26:16 PM	Main Vac valve closed
2/21/2011	4:26:16 PM	Bypass valve closed
2/21/2011	4:26:16 PM	H2 valve opened
2/21/2011	4:26:16 PM	Bubbler valve opened
2/21/2011	4:26:16 PM	Helium MFC set to  0.000000
2/21/2011	4:26:16 PM	H2 MFC set to  500.000000
2/21/2011	4:26:16 PM	BCl3 MFC set to  0.000000
2/21/2011	4:26:16 PM	PHl3 MFC set to  0.000000
2/21/2011	4:26:16 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:26:16 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:26:16 PM	Tube furnace set to 1000
2/21/2011	4:46:16 PM	Helium valve closed
2/21/2011	4:46:16 PM	BCl3 valve closed
2/21/2011	4:46:16 PM	Main Vac valve closed
2/21/2011	4:46:16 PM	Bypass valve closed
2/21/2011	4:46:16 PM	H2 valve opened
2/21/2011	4:46:16 PM	PH3 valve opened
2/21/2011	4:46:16 PM	SiCl4 pre valve opened
2/21/2011	4:46:16 PM	SiCl4 post valve opened
2/21/2011	4:46:16 PM	Bubbler valve opened
2/21/2011	4:46:16 PM	Helium MFC set to  0.000000
2/21/2011	4:46:16 PM	H2 MFC set to  500.000000
2/21/2011	4:46:16 PM	BCl3 MFC set to  0.000000
2/21/2011	4:46:16 PM	PHl3 MFC set to  1.000000
2/21/2011	4:46:16 PM	SiCl4 MFC set to  50.000000
2/21/2011	4:46:16 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:46:16 PM	Tube furnace set to 1000
2/21/2011	4:58:16 PM	H2 valve closed
2/21/2011	4:58:16 PM	BCl3 valve closed
2/21/2011	4:58:16 PM	PH3 valve closed
2/21/2011	4:58:16 PM	SiCl4 pre valve closed
2/21/2011	4:58:16 PM	SiCl4 post valve closed
2/21/2011	4:58:16 PM	Main Vac valve closed
2/21/2011	4:58:16 PM	Bypass valve closed
2/21/2011	4:58:16 PM	Helium valve opened
2/21/2011	4:58:16 PM	Bubbler valve opened
2/21/2011	4:58:16 PM	Helium MFC set to  500.000000
2/21/2011	4:58:16 PM	H2 MFC set to  0.000000
2/21/2011	4:58:16 PM	BCl3 MFC set to  0.000000
2/21/2011	4:58:16 PM	PHl3 MFC set to  0.000000
2/21/2011	4:58:16 PM	SiCl4 MFC set to  0.000000
2/21/2011	4:58:16 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	4:58:16 PM	Tube furnace set to 0
2/21/2011	5:18:16 PM	Helium valve closed
2/21/2011	5:18:16 PM	H2 valve closed
2/21/2011	5:18:16 PM	BCl3 valve closed
2/21/2011	5:18:16 PM	PH3 valve closed
2/21/2011	5:18:16 PM	SiCl4 pre valve closed
2/21/2011	5:18:16 PM	SiCl4 post valve closed
2/21/2011	5:18:16 PM	Main Vac valve closed
2/21/2011	5:18:16 PM	Bypass valve closed
2/21/2011	5:18:16 PM	Bubbler valve closed
2/21/2011	5:18:16 PM	Helium MFC set to  0.000000
2/21/2011	5:18:16 PM	H2 MFC set to  0.000000
2/21/2011	5:18:16 PM	BCl3 MFC set to  0.000000
2/21/2011	5:18:16 PM	PHl3 MFC set to  0.000000
2/21/2011	5:18:16 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:18:16 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:18:17 PM	Tube furnace set to 0
2/21/2011	5:18:17 PM	Run finished at 5:18 PM
2/21/2011	5:29:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	5:29:50 PM	Recipe started at 5:29 PM
2/21/2011	5:29:50 PM	Helium valve closed
2/21/2011	5:29:50 PM	H2 valve closed
2/21/2011	5:29:50 PM	BCl3 valve closed
2/21/2011	5:29:50 PM	PH3 valve closed
2/21/2011	5:29:50 PM	SiCl4 pre valve closed
2/21/2011	5:29:50 PM	SiCl4 post valve closed
2/21/2011	5:29:50 PM	Main Vac valve closed
2/21/2011	5:29:50 PM	Bubbler valve closed
2/21/2011	5:29:50 PM	Bypass valve opened
2/21/2011	5:29:50 PM	Helium MFC set to  0.000000
2/21/2011	5:29:50 PM	H2 MFC set to  0.000000
2/21/2011	5:29:50 PM	BCl3 MFC set to  0.000000
2/21/2011	5:29:50 PM	PHl3 MFC set to  0.000000
2/21/2011	5:29:50 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:29:50 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:29:51 PM	Tube furnace set to 0
2/21/2011	5:30:22 PM	Helium valve closed
2/21/2011	5:30:22 PM	H2 valve closed
2/21/2011	5:30:22 PM	BCl3 valve closed
2/21/2011	5:30:22 PM	PH3 valve closed
2/21/2011	5:30:22 PM	SiCl4 pre valve closed
2/21/2011	5:30:22 PM	SiCl4 post valve closed
2/21/2011	5:30:22 PM	Bubbler valve closed
2/21/2011	5:30:22 PM	Main Vac valve opened
2/21/2011	5:30:22 PM	Bypass valve opened
2/21/2011	5:30:22 PM	Helium MFC set to  0.000000
2/21/2011	5:30:22 PM	H2 MFC set to  0.000000
2/21/2011	5:30:22 PM	BCl3 MFC set to  0.000000
2/21/2011	5:30:22 PM	PHl3 MFC set to  0.000000
2/21/2011	5:30:22 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:30:22 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:30:22 PM	Tube furnace set to 0
2/21/2011	5:30:22 PM	Run finished at 5:30 PM
2/21/2011	5:30:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/21/2011	5:31:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
2/21/2011	5:32:06 PM	Recipe started at 5:32 PM
2/21/2011	5:32:06 PM	Helium valve closed
2/21/2011	5:32:06 PM	H2 valve closed
2/21/2011	5:32:06 PM	BCl3 valve closed
2/21/2011	5:32:06 PM	PH3 valve closed
2/21/2011	5:32:06 PM	SiCl4 pre valve closed
2/21/2011	5:32:06 PM	SiCl4 post valve closed
2/21/2011	5:32:06 PM	Main Vac valve closed
2/21/2011	5:32:06 PM	Bubbler valve closed
2/21/2011	5:32:06 PM	Bypass valve opened
2/21/2011	5:32:06 PM	Helium MFC set to  0.000000
2/21/2011	5:32:06 PM	H2 MFC set to  0.000000
2/21/2011	5:32:06 PM	BCl3 MFC set to  0.000000
2/21/2011	5:32:06 PM	PHl3 MFC set to  0.000000
2/21/2011	5:32:06 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:32:06 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:32:06 PM	Tube furnace set to 0
2/21/2011	5:32:06 PM	Helium valve closed
2/21/2011	5:32:06 PM	H2 valve closed
2/21/2011	5:32:06 PM	BCl3 valve closed
2/21/2011	5:32:06 PM	PH3 valve closed
2/21/2011	5:32:06 PM	SiCl4 pre valve closed
2/21/2011	5:32:06 PM	SiCl4 post valve closed
2/21/2011	5:32:06 PM	Bubbler valve closed
2/21/2011	5:32:06 PM	Main Vac valve opened
2/21/2011	5:32:06 PM	Bypass valve opened
2/21/2011	5:32:06 PM	Helium MFC set to  0.000000
2/21/2011	5:32:06 PM	H2 MFC set to  0.000000
2/21/2011	5:32:06 PM	BCl3 MFC set to  0.000000
2/21/2011	5:32:06 PM	PHl3 MFC set to  0.000000
2/21/2011	5:32:06 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:32:06 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:32:06 PM	Tube furnace set to 0
2/21/2011	5:33:06 PM	H2 valve closed
2/21/2011	5:33:06 PM	BCl3 valve closed
2/21/2011	5:33:06 PM	PH3 valve closed
2/21/2011	5:33:06 PM	SiCl4 pre valve closed
2/21/2011	5:33:06 PM	SiCl4 post valve closed
2/21/2011	5:33:06 PM	Bubbler valve closed
2/21/2011	5:33:06 PM	Helium valve opened
2/21/2011	5:33:06 PM	Main Vac valve opened
2/21/2011	5:33:06 PM	Bypass valve opened
2/21/2011	5:33:06 PM	Helium MFC set to  100.000000
2/21/2011	5:33:06 PM	H2 MFC set to  0.000000
2/21/2011	5:33:06 PM	BCl3 MFC set to  0.000000
2/21/2011	5:33:06 PM	PHl3 MFC set to  0.000000
2/21/2011	5:33:06 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:33:06 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:33:07 PM	Tube furnace set to 0
2/21/2011	5:34:07 PM	Helium valve closed
2/21/2011	5:34:07 PM	H2 valve closed
2/21/2011	5:34:07 PM	BCl3 valve closed
2/21/2011	5:34:07 PM	PH3 valve closed
2/21/2011	5:34:07 PM	SiCl4 pre valve closed
2/21/2011	5:34:07 PM	SiCl4 post valve closed
2/21/2011	5:34:07 PM	Bubbler valve closed
2/21/2011	5:34:07 PM	Main Vac valve opened
2/21/2011	5:34:07 PM	Bypass valve opened
2/21/2011	5:34:07 PM	Helium MFC set to  0.000000
2/21/2011	5:34:07 PM	H2 MFC set to  0.000000
2/21/2011	5:34:07 PM	BCl3 MFC set to  0.000000
2/21/2011	5:34:07 PM	PHl3 MFC set to  0.000000
2/21/2011	5:34:07 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:34:07 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:34:07 PM	Tube furnace set to 0
2/21/2011	5:35:07 PM	H2 valve closed
2/21/2011	5:35:07 PM	BCl3 valve closed
2/21/2011	5:35:07 PM	PH3 valve closed
2/21/2011	5:35:07 PM	SiCl4 pre valve closed
2/21/2011	5:35:07 PM	SiCl4 post valve closed
2/21/2011	5:35:07 PM	Bubbler valve closed
2/21/2011	5:35:07 PM	Helium valve opened
2/21/2011	5:35:07 PM	Main Vac valve opened
2/21/2011	5:35:07 PM	Bypass valve opened
2/21/2011	5:35:07 PM	Helium MFC set to  100.000000
2/21/2011	5:35:07 PM	H2 MFC set to  0.000000
2/21/2011	5:35:07 PM	BCl3 MFC set to  0.000000
2/21/2011	5:35:07 PM	PHl3 MFC set to  0.000000
2/21/2011	5:35:07 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:35:07 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:35:07 PM	Tube furnace set to 0
2/21/2011	5:36:07 PM	Helium valve closed
2/21/2011	5:36:07 PM	H2 valve closed
2/21/2011	5:36:07 PM	BCl3 valve closed
2/21/2011	5:36:07 PM	PH3 valve closed
2/21/2011	5:36:07 PM	SiCl4 pre valve closed
2/21/2011	5:36:07 PM	SiCl4 post valve closed
2/21/2011	5:36:07 PM	Bubbler valve closed
2/21/2011	5:36:07 PM	Main Vac valve opened
2/21/2011	5:36:07 PM	Bypass valve opened
2/21/2011	5:36:07 PM	Helium MFC set to  0.000000
2/21/2011	5:36:07 PM	H2 MFC set to  0.000000
2/21/2011	5:36:07 PM	BCl3 MFC set to  0.000000
2/21/2011	5:36:07 PM	PHl3 MFC set to  0.000000
2/21/2011	5:36:07 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:36:07 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:36:07 PM	Tube furnace set to 0
2/21/2011	5:37:07 PM	H2 valve closed
2/21/2011	5:37:07 PM	BCl3 valve closed
2/21/2011	5:37:07 PM	PH3 valve closed
2/21/2011	5:37:07 PM	SiCl4 pre valve closed
2/21/2011	5:37:07 PM	SiCl4 post valve closed
2/21/2011	5:37:07 PM	Bubbler valve closed
2/21/2011	5:37:07 PM	Helium valve opened
2/21/2011	5:37:07 PM	Main Vac valve opened
2/21/2011	5:37:07 PM	Bypass valve opened
2/21/2011	5:37:07 PM	Helium MFC set to  100.000000
2/21/2011	5:37:07 PM	H2 MFC set to  0.000000
2/21/2011	5:37:07 PM	BCl3 MFC set to  0.000000
2/21/2011	5:37:07 PM	PHl3 MFC set to  0.000000
2/21/2011	5:37:07 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:37:07 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:37:07 PM	Tube furnace set to 0
2/21/2011	5:38:07 PM	Helium valve closed
2/21/2011	5:38:07 PM	H2 valve closed
2/21/2011	5:38:07 PM	BCl3 valve closed
2/21/2011	5:38:07 PM	PH3 valve closed
2/21/2011	5:38:07 PM	SiCl4 pre valve closed
2/21/2011	5:38:07 PM	SiCl4 post valve closed
2/21/2011	5:38:07 PM	Bubbler valve closed
2/21/2011	5:38:07 PM	Main Vac valve opened
2/21/2011	5:38:07 PM	Bypass valve opened
2/21/2011	5:38:07 PM	Helium MFC set to  0.000000
2/21/2011	5:38:07 PM	H2 MFC set to  0.000000
2/21/2011	5:38:07 PM	BCl3 MFC set to  0.000000
2/21/2011	5:38:07 PM	PHl3 MFC set to  0.000000
2/21/2011	5:38:07 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:38:07 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:38:08 PM	Tube furnace set to 0
2/21/2011	5:39:08 PM	H2 valve closed
2/21/2011	5:39:08 PM	BCl3 valve closed
2/21/2011	5:39:08 PM	PH3 valve closed
2/21/2011	5:39:08 PM	SiCl4 pre valve closed
2/21/2011	5:39:08 PM	SiCl4 post valve closed
2/21/2011	5:39:08 PM	Bubbler valve closed
2/21/2011	5:39:08 PM	Helium valve opened
2/21/2011	5:39:08 PM	Main Vac valve opened
2/21/2011	5:39:08 PM	Bypass valve opened
2/21/2011	5:39:08 PM	Helium MFC set to  100.000000
2/21/2011	5:39:08 PM	H2 MFC set to  0.000000
2/21/2011	5:39:08 PM	BCl3 MFC set to  0.000000
2/21/2011	5:39:08 PM	PHl3 MFC set to  0.000000
2/21/2011	5:39:08 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:39:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:39:08 PM	Tube furnace set to 0
2/21/2011	5:40:08 PM	Helium valve closed
2/21/2011	5:40:08 PM	H2 valve closed
2/21/2011	5:40:08 PM	BCl3 valve closed
2/21/2011	5:40:08 PM	PH3 valve closed
2/21/2011	5:40:08 PM	SiCl4 pre valve closed
2/21/2011	5:40:08 PM	SiCl4 post valve closed
2/21/2011	5:40:08 PM	Bubbler valve closed
2/21/2011	5:40:08 PM	Main Vac valve opened
2/21/2011	5:40:08 PM	Bypass valve opened
2/21/2011	5:40:08 PM	Helium MFC set to  0.000000
2/21/2011	5:40:08 PM	H2 MFC set to  0.000000
2/21/2011	5:40:08 PM	BCl3 MFC set to  0.000000
2/21/2011	5:40:08 PM	PHl3 MFC set to  0.000000
2/21/2011	5:40:08 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:40:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:40:08 PM	Tube furnace set to 0
2/21/2011	5:41:08 PM	H2 valve closed
2/21/2011	5:41:08 PM	BCl3 valve closed
2/21/2011	5:41:08 PM	PH3 valve closed
2/21/2011	5:41:08 PM	SiCl4 pre valve closed
2/21/2011	5:41:08 PM	SiCl4 post valve closed
2/21/2011	5:41:08 PM	Bubbler valve closed
2/21/2011	5:41:08 PM	Helium valve opened
2/21/2011	5:41:08 PM	Main Vac valve opened
2/21/2011	5:41:08 PM	Bypass valve opened
2/21/2011	5:41:08 PM	Helium MFC set to  100.000000
2/21/2011	5:41:08 PM	H2 MFC set to  0.000000
2/21/2011	5:41:08 PM	BCl3 MFC set to  0.000000
2/21/2011	5:41:08 PM	PHl3 MFC set to  0.000000
2/21/2011	5:41:08 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:41:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:41:08 PM	Tube furnace set to 0
2/21/2011	5:42:08 PM	Helium valve closed
2/21/2011	5:42:08 PM	H2 valve closed
2/21/2011	5:42:08 PM	BCl3 valve closed
2/21/2011	5:42:08 PM	PH3 valve closed
2/21/2011	5:42:08 PM	SiCl4 pre valve closed
2/21/2011	5:42:08 PM	SiCl4 post valve closed
2/21/2011	5:42:08 PM	Bubbler valve closed
2/21/2011	5:42:08 PM	Main Vac valve opened
2/21/2011	5:42:08 PM	Bypass valve opened
2/21/2011	5:42:08 PM	Helium MFC set to  0.000000
2/21/2011	5:42:08 PM	H2 MFC set to  0.000000
2/21/2011	5:42:08 PM	BCl3 MFC set to  0.000000
2/21/2011	5:42:08 PM	PHl3 MFC set to  0.000000
2/21/2011	5:42:08 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:42:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:42:08 PM	Tube furnace set to 0
2/21/2011	5:43:08 PM	H2 valve closed
2/21/2011	5:43:08 PM	BCl3 valve closed
2/21/2011	5:43:08 PM	PH3 valve closed
2/21/2011	5:43:08 PM	SiCl4 pre valve closed
2/21/2011	5:43:08 PM	SiCl4 post valve closed
2/21/2011	5:43:08 PM	Bubbler valve closed
2/21/2011	5:43:08 PM	Helium valve opened
2/21/2011	5:43:08 PM	Main Vac valve opened
2/21/2011	5:43:08 PM	Bypass valve opened
2/21/2011	5:43:08 PM	Helium MFC set to  100.000000
2/21/2011	5:43:08 PM	H2 MFC set to  0.000000
2/21/2011	5:43:08 PM	BCl3 MFC set to  0.000000
2/21/2011	5:43:08 PM	PHl3 MFC set to  0.000000
2/21/2011	5:43:08 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:43:08 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:43:09 PM	Tube furnace set to 0
2/21/2011	5:44:09 PM	Helium valve closed
2/21/2011	5:44:09 PM	H2 valve closed
2/21/2011	5:44:09 PM	BCl3 valve closed
2/21/2011	5:44:09 PM	PH3 valve closed
2/21/2011	5:44:09 PM	SiCl4 pre valve closed
2/21/2011	5:44:09 PM	SiCl4 post valve closed
2/21/2011	5:44:09 PM	Bubbler valve closed
2/21/2011	5:44:09 PM	Main Vac valve opened
2/21/2011	5:44:09 PM	Bypass valve opened
2/21/2011	5:44:09 PM	Helium MFC set to  0.000000
2/21/2011	5:44:09 PM	H2 MFC set to  0.000000
2/21/2011	5:44:09 PM	BCl3 MFC set to  0.000000
2/21/2011	5:44:09 PM	PHl3 MFC set to  0.000000
2/21/2011	5:44:09 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:44:09 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:44:09 PM	Tube furnace set to 0
2/21/2011	5:45:09 PM	H2 valve closed
2/21/2011	5:45:09 PM	BCl3 valve closed
2/21/2011	5:45:09 PM	PH3 valve closed
2/21/2011	5:45:09 PM	SiCl4 pre valve closed
2/21/2011	5:45:09 PM	SiCl4 post valve closed
2/21/2011	5:45:09 PM	Bubbler valve closed
2/21/2011	5:45:09 PM	Helium valve opened
2/21/2011	5:45:09 PM	Main Vac valve opened
2/21/2011	5:45:09 PM	Bypass valve opened
2/21/2011	5:45:09 PM	Helium MFC set to  100.000000
2/21/2011	5:45:09 PM	H2 MFC set to  0.000000
2/21/2011	5:45:09 PM	BCl3 MFC set to  0.000000
2/21/2011	5:45:09 PM	PHl3 MFC set to  0.000000
2/21/2011	5:45:09 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:45:09 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:45:09 PM	Tube furnace set to 0
2/21/2011	5:46:09 PM	Helium valve closed
2/21/2011	5:46:09 PM	H2 valve closed
2/21/2011	5:46:09 PM	BCl3 valve closed
2/21/2011	5:46:09 PM	PH3 valve closed
2/21/2011	5:46:09 PM	SiCl4 pre valve closed
2/21/2011	5:46:09 PM	SiCl4 post valve closed
2/21/2011	5:46:09 PM	Bubbler valve closed
2/21/2011	5:46:09 PM	Main Vac valve opened
2/21/2011	5:46:09 PM	Bypass valve opened
2/21/2011	5:46:09 PM	Helium MFC set to  0.000000
2/21/2011	5:46:09 PM	H2 MFC set to  0.000000
2/21/2011	5:46:09 PM	BCl3 MFC set to  0.000000
2/21/2011	5:46:09 PM	PHl3 MFC set to  0.000000
2/21/2011	5:46:09 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:46:09 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:46:09 PM	Tube furnace set to 0
2/21/2011	5:47:09 PM	H2 valve closed
2/21/2011	5:47:09 PM	BCl3 valve closed
2/21/2011	5:47:09 PM	PH3 valve closed
2/21/2011	5:47:09 PM	SiCl4 pre valve closed
2/21/2011	5:47:09 PM	SiCl4 post valve closed
2/21/2011	5:47:09 PM	Bubbler valve closed
2/21/2011	5:47:09 PM	Helium valve opened
2/21/2011	5:47:09 PM	Main Vac valve opened
2/21/2011	5:47:09 PM	Bypass valve opened
2/21/2011	5:47:09 PM	Helium MFC set to  100.000000
2/21/2011	5:47:09 PM	H2 MFC set to  0.000000
2/21/2011	5:47:09 PM	BCl3 MFC set to  0.000000
2/21/2011	5:47:09 PM	PHl3 MFC set to  0.000000
2/21/2011	5:47:09 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:47:09 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:47:09 PM	Tube furnace set to 0
2/21/2011	5:48:09 PM	Helium valve closed
2/21/2011	5:48:09 PM	H2 valve closed
2/21/2011	5:48:09 PM	BCl3 valve closed
2/21/2011	5:48:09 PM	PH3 valve closed
2/21/2011	5:48:09 PM	SiCl4 pre valve closed
2/21/2011	5:48:09 PM	SiCl4 post valve closed
2/21/2011	5:48:09 PM	Bubbler valve closed
2/21/2011	5:48:09 PM	Main Vac valve opened
2/21/2011	5:48:09 PM	Bypass valve opened
2/21/2011	5:48:09 PM	Helium MFC set to  0.000000
2/21/2011	5:48:09 PM	H2 MFC set to  0.000000
2/21/2011	5:48:09 PM	BCl3 MFC set to  0.000000
2/21/2011	5:48:09 PM	PHl3 MFC set to  0.000000
2/21/2011	5:48:09 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:48:09 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:48:10 PM	Tube furnace set to 0
2/21/2011	5:49:10 PM	H2 valve closed
2/21/2011	5:49:10 PM	BCl3 valve closed
2/21/2011	5:49:10 PM	PH3 valve closed
2/21/2011	5:49:10 PM	SiCl4 pre valve closed
2/21/2011	5:49:10 PM	SiCl4 post valve closed
2/21/2011	5:49:10 PM	Bubbler valve closed
2/21/2011	5:49:10 PM	Helium valve opened
2/21/2011	5:49:10 PM	Main Vac valve opened
2/21/2011	5:49:10 PM	Bypass valve opened
2/21/2011	5:49:10 PM	Helium MFC set to  100.000000
2/21/2011	5:49:10 PM	H2 MFC set to  0.000000
2/21/2011	5:49:10 PM	BCl3 MFC set to  0.000000
2/21/2011	5:49:10 PM	PHl3 MFC set to  0.000000
2/21/2011	5:49:10 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:49:10 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:49:10 PM	Tube furnace set to 0
2/21/2011	5:50:10 PM	Helium valve closed
2/21/2011	5:50:10 PM	H2 valve closed
2/21/2011	5:50:10 PM	BCl3 valve closed
2/21/2011	5:50:10 PM	PH3 valve closed
2/21/2011	5:50:10 PM	SiCl4 pre valve closed
2/21/2011	5:50:10 PM	SiCl4 post valve closed
2/21/2011	5:50:10 PM	Bubbler valve closed
2/21/2011	5:50:10 PM	Main Vac valve opened
2/21/2011	5:50:10 PM	Bypass valve opened
2/21/2011	5:50:10 PM	Helium MFC set to  0.000000
2/21/2011	5:50:10 PM	H2 MFC set to  0.000000
2/21/2011	5:50:10 PM	BCl3 MFC set to  0.000000
2/21/2011	5:50:10 PM	PHl3 MFC set to  0.000000
2/21/2011	5:50:10 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:50:10 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:50:10 PM	Tube furnace set to 0
2/21/2011	5:51:10 PM	H2 valve closed
2/21/2011	5:51:10 PM	BCl3 valve closed
2/21/2011	5:51:10 PM	PH3 valve closed
2/21/2011	5:51:10 PM	SiCl4 pre valve closed
2/21/2011	5:51:10 PM	SiCl4 post valve closed
2/21/2011	5:51:10 PM	Bubbler valve closed
2/21/2011	5:51:10 PM	Helium valve opened
2/21/2011	5:51:10 PM	Main Vac valve opened
2/21/2011	5:51:10 PM	Bypass valve opened
2/21/2011	5:51:10 PM	Helium MFC set to  100.000000
2/21/2011	5:51:10 PM	H2 MFC set to  0.000000
2/21/2011	5:51:10 PM	BCl3 MFC set to  0.000000
2/21/2011	5:51:10 PM	PHl3 MFC set to  0.000000
2/21/2011	5:51:10 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:51:10 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:51:10 PM	Tube furnace set to 0
2/21/2011	5:52:10 PM	Helium valve closed
2/21/2011	5:52:10 PM	H2 valve closed
2/21/2011	5:52:10 PM	BCl3 valve closed
2/21/2011	5:52:10 PM	PH3 valve closed
2/21/2011	5:52:10 PM	SiCl4 pre valve closed
2/21/2011	5:52:10 PM	SiCl4 post valve closed
2/21/2011	5:52:10 PM	Bubbler valve closed
2/21/2011	5:52:10 PM	Main Vac valve opened
2/21/2011	5:52:10 PM	Bypass valve opened
2/21/2011	5:52:10 PM	Helium MFC set to  0.000000
2/21/2011	5:52:10 PM	H2 MFC set to  0.000000
2/21/2011	5:52:10 PM	BCl3 MFC set to  0.000000
2/21/2011	5:52:10 PM	PHl3 MFC set to  0.000000
2/21/2011	5:52:10 PM	SiCl4 MFC set to  0.000000
2/21/2011	5:52:10 PM	Bypass solenoid MFC set to  0.000000
2/21/2011	5:52:10 PM	Tube furnace set to 0
2/21/2011	5:52:11 PM	Run finished at 5:52 PM
2/21/2011	5:52:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
